Pregled bibliografske jedinice broj: 897916
Electrothermal Tuning of MEMS Filter Resonator with Piezoelectric Actuation and Sensing
Electrothermal Tuning of MEMS Filter Resonator with Piezoelectric Actuation and Sensing // Proceedings of the 3rd International Conference on Sensors and Electronic Instrumentation Advances
Moskva, 2017. str. 183-185 (predavanje, međunarodna recenzija, cjeloviti rad (in extenso), znanstveni)
CROSBI ID: 897916 Za ispravke kontaktirajte CROSBI podršku putem web obrasca
Naslov
Electrothermal Tuning of MEMS Filter Resonator with Piezoelectric Actuation and Sensing
Autori
Sviličić, Boris ; Wood, Graham ; Mastropaolo, Enrico ; Cheung, Rebecca
Vrsta, podvrsta i kategorija rada
Radovi u zbornicima skupova, cjeloviti rad (in extenso), znanstveni
Izvornik
Proceedings of the 3rd International Conference on Sensors and Electronic Instrumentation Advances
/ - Moskva, 2017, 183-185
ISBN
978-84-697-5615-7
Skup
3rd International Conference on Sensors and Electronic Instrumentation Advances
Mjesto i datum
Moskva, Ruska Federacija, 20.09.2017. - 22.09.2017
Vrsta sudjelovanja
Predavanje
Vrsta recenzije
Međunarodna recenzija
Ključne riječi
MEMS, Resonator, Tunable filter, Piezoelectric actuation, Piezoelectric sensing, Electrothermal piezoelectric tuning
Sažetak
The operating frequency of a micro-electro-mechanical (MEMS) diaphragm resonator with piezoelectric actuation and read-out has been tuned by electrothermal transduction. The influence of the electrothermal tuning configuration on resonant behaviour of the structure has been investigated. The resonator is fabricated as a multilayer diaphragm structure with top piezoelectric actuator and sensor, and two electrothermal electrodes for resonant frequency tuning. Two-port transmission frequency response measurements have shown that the frequency tuning range can be maximised (up to three-fold) by optimising the configuration of electrothermal transduction.
Izvorni jezik
Engleski
