Pregled bibliografske jedinice broj: 887465
Semiconductor devices having gallium nitride epilayers on diamond substrates
Semiconductor devices having gallium nitride epilayers on diamond substrates
(2009)
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Naslov
Semiconductor devices having gallium nitride epilayers on diamond substrates
Autori
Francis, Daniel ; Ejeckam, Felix ; Wasserbauer, John ; Babic, Dubravko
Broj patenta
7, 595, 507
Godina
2009
Datum patenta
29.09.2009.
Sažetak
Methods for integrating wide-gap semiconductors with synthetic diamond substrates are disclosed. Diamond substrates are created by depositing synthetic diamond onto a nucleating layer deposited or formed on a layered structure including at least one layer of gallium nitride, aluminum nitride, silicon carbide, or zinc oxide. The resulting structure is a low stress process compatible with wide- gap semiconductor films, and may be processed into optical or high-power electronic devices. The diamond substrates serve as heat sinks or mechanical substrates.
Izvorni jezik
Engleski
