Pregled bibliografske jedinice broj: 887456
Monolithic multiple wavelength VCSEL array
Monolithic multiple wavelength VCSEL array
(2001)
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Naslov
Monolithic multiple wavelength VCSEL array
Autori
Lemoff, Brian E. ; Babic, Dubravko ; Schneider, Richard P.
Broj patenta
6, 259, 121
Godina
2001
Datum patenta
10.07.2001.
Sažetak
An array of n-wavelength vertical cavity surface emitting lasers (VCSELs) can be grown with precise and repeatable wavelength control. First, a foundation VCSEL structure is grown on a substrate. Next, n-paired layers of AlGaAs and InGaP are grown, where n is the desired number of different wavelengths. Next, one of the n regions is masked and etched. The steps of masking and etching are repeated until all n regions are etched. Finally, the upper VCSEL structure is grown.
Izvorni jezik
Engleski
