Naslov
Monolithic multiple wavelength VCSEL array

Autori
Lemoff, Brian E. ; Babic , Dubravko ; Schneider, Richard P.

Broj patenta
6, 117, 699

Sažetak
An array of n-wavelength vertical cavity surface emitting lasers (VCSELs) can be grown with precise and repeatable wavelength control. First, a foundation VCSEL structure is grown on a substrate. Next, n-paired layers of AlGaAs and InGaP are grown, where n is the desired number of different wavelengths. Next, one of the n regions is masked and etched. The steps of masking and etching are repeated until all n regions are etched. Finally, the upper VCSEL structure is grown.

Izvorni jezik
Engleski

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