Pregled bibliografske jedinice broj: 886170
Sputter deposition of precision Si/Si3N4 Bragg reflectors using multitasking interactive processing control
Sputter deposition of precision Si/Si3N4 Bragg reflectors using multitasking interactive processing control // Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 9 (1991), 3; 1113-1117 doi:10.1116/1.577586 (međunarodna recenzija, članak, znanstveni)
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Naslov
Sputter deposition of precision Si/Si3N4 Bragg reflectors using multitasking interactive processing control
Autori
Babić, Dubravko I. ; Dudley, J.J. ; Shirazi, M. ; Hu, E.L. ; Bowers, J.E.
Izvornik
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films (0734-2101) 9
(1991), 3;
1113-1117
Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni
Ključne riječi
Process monitoring and control ; Distributed Bragg reflectors ; Sputter deposition ; Mirrors ; Sequence analysis
Sažetak
High quality Si/Si3N4 Bragg reflectors have been fabricated using magnetron sputter deposition. The individual layer characterization and process control were performed using multitasking processing control software that we have designed and implemented onto the sputter‐deposition equipment. The experimentally determined Bragg reflector characteristics match very closely with the theoretical model which includes both loss and dispersion in the films. The multitasking processing control software system enables real‐time monitoring and control for in‐depth process characterization and sequencing. Individual layers, as well as the full structure of ten alternating layers of Si and Si/Si3N4, have been optimized to produce 99.4% reflective mirrors at wavelength of 1300 nm.
Izvorni jezik
Engleski
Citiraj ovu publikaciju:
Časopis indeksira:
- Current Contents Connect (CCC)
- Web of Science Core Collection (WoSCC)
- SCI-EXP, SSCI i/ili A&HCI
