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Pregled bibliografske jedinice broj: 886166

Laser machining of GaN-on-diamond wafers

Babić, Dubravko I.; Diduck, Quentin; Faili, Firooz; Wasserbauer, John; Lowe, Frank; Francis, Daniel; Ejeckam, Felix
Laser machining of GaN-on-diamond wafers // Diamond and Related Materials, 20 (2011), 5/6; 675-681 doi:10.1016/j.diamond.2011.03.017 (međunarodna recenzija, članak, znanstveni)

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Naslov
Laser machining of GaN-on-diamond wafers

Autori
Babić, Dubravko I. ; Diduck, Quentin ; Faili, Firooz ; Wasserbauer, John ; Lowe, Frank ; Francis, Daniel ; Ejeckam, Felix

Izvornik
Diamond and Related Materials (0925-9635) 20 (2011), 5/6; 675-681

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
Gallium nitride on diamond ; Laser machining ; AlGaN/GaN high-electron mobility transistors ; Via processing in diamond ; Diamond wafer dicing

Sažetak
The commercialization of gallium-nitride microwave circuits on diamond substrates requires chip-dicing technology and via formation process compatible with standard semiconductor processes. This paper discusses issues related to dicing and drilling of GaN-on-diamond wafers for RF power transistor applications (die size < 1 mm2) using laser micromachining.

Izvorni jezik
Engleski



POVEZANOST RADA

Profili:

Avatar Url Dubravko Babić (autor)

Poveznice na cjeloviti tekst rada:

doi www.sciencedirect.com doi.org

Citiraj ovu publikaciju:

Babić, Dubravko I.; Diduck, Quentin; Faili, Firooz; Wasserbauer, John; Lowe, Frank; Francis, Daniel; Ejeckam, Felix
Laser machining of GaN-on-diamond wafers // Diamond and Related Materials, 20 (2011), 5/6; 675-681 doi:10.1016/j.diamond.2011.03.017 (međunarodna recenzija, članak, znanstveni)
Babić, D., Diduck, Q., Faili, F., Wasserbauer, J., Lowe, F., Francis, D. & Ejeckam, F. (2011) Laser machining of GaN-on-diamond wafers. Diamond and Related Materials, 20 (5/6), 675-681 doi:10.1016/j.diamond.2011.03.017.
@article{article, author = {Babi\'{c}, Dubravko I. and Diduck, Quentin and Faili, Firooz and Wasserbauer, John and Lowe, Frank and Francis, Daniel and Ejeckam, Felix}, year = {2011}, pages = {675-681}, DOI = {10.1016/j.diamond.2011.03.017}, keywords = {Gallium nitride on diamond, Laser machining, AlGaN/GaN high-electron mobility transistors, Via processing in diamond, Diamond wafer dicing}, journal = {Diamond and Related Materials}, doi = {10.1016/j.diamond.2011.03.017}, volume = {20}, number = {5/6}, issn = {0925-9635}, title = {Laser machining of GaN-on-diamond wafers}, keyword = {Gallium nitride on diamond, Laser machining, AlGaN/GaN high-electron mobility transistors, Via processing in diamond, Diamond wafer dicing} }
@article{article, author = {Babi\'{c}, Dubravko I. and Diduck, Quentin and Faili, Firooz and Wasserbauer, John and Lowe, Frank and Francis, Daniel and Ejeckam, Felix}, year = {2011}, pages = {675-681}, DOI = {10.1016/j.diamond.2011.03.017}, keywords = {Gallium nitride on diamond, Laser machining, AlGaN/GaN high-electron mobility transistors, Via processing in diamond, Diamond wafer dicing}, journal = {Diamond and Related Materials}, doi = {10.1016/j.diamond.2011.03.017}, volume = {20}, number = {5/6}, issn = {0925-9635}, title = {Laser machining of GaN-on-diamond wafers}, keyword = {Gallium nitride on diamond, Laser machining, AlGaN/GaN high-electron mobility transistors, Via processing in diamond, Diamond wafer dicing} }

Časopis indeksira:


  • Current Contents Connect (CCC)
  • Web of Science Core Collection (WoSCC)
    • Science Citation Index Expanded (SCI-EXP)
    • SCI-EXP, SSCI i/ili A&HCI
  • Scopus

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