Pregled bibliografske jedinice broj: 886151
Wafer fusion : materials issues and device results
Wafer fusion : materials issues and device results // IEEE Journal of selected topics in quantum electronics, 3 (1997), 3; 943-951 doi:10.1109/2944.640648 (međunarodna recenzija, članak, znanstveni)
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Naslov
Wafer fusion : materials issues and device results
Autori
Black, A. ; Hawkins, A.R. ; Margalit, N.M. ; Babić, Dubravko I. ; Holmes, A.L. ; Chang, Y.-L. ; Abraham, P. ; Bowers, J.E. ; Hu, E.L.
Izvornik
IEEE Journal of selected topics in quantum electronics (1077-260X) 3
(1997), 3;
943-951
Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni
Ključne riječi
Semiconductor materials, Optical materials, Conducting materials, Wafer bonding, Lattices, Thermal resistance, Mirrors, Substrates, Wavelength division multiplexing, Semiconductor devices
Sažetak
A large number of novel devices have been recently demonstrated using wafer fusion to integrate materials with different lattice constants. In many cases, devices created using this technique have shown dramatic improvements over those which maintain a single lattice constant. We present device results and characterizations of the fused interface between several groups of materials.
Izvorni jezik
Engleski
Citiraj ovu publikaciju:
Časopis indeksira:
- Current Contents Connect (CCC)
- Web of Science Core Collection (WoSCC)
- Science Citation Index Expanded (SCI-EXP)
- SCI-EXP, SSCI i/ili A&HCI
- Scopus