Naslov
Tunability of Piezoelectric MEMS Ring Resonator Based Filter

Autori
Sviličić, Boris ; Wood, Graham ; Mastropaolo, Enrico ; Cheung, Rebecca

Izvornik
Procedia engineering (1877-7058) 168 (2016); 1517-1520

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
MEMS resonator, Tunable filter, Piezoelectric actuation, Piezoelectric sensing

Sažetak
The influence of piezoelectric actuator design on a two-port piezoelectrically transduced micro-electro-mechanical (MEMS) ring resonator frequency tuning performance has been investigated. A cubic silicon carbide (3C-SiC) ring resonator was fabricated with a lead–zirconium–titanate (PZT) piezoelectric actuator and sensor integrated on the surface of the ring. Measurements of the transmission frequency response have shown that the device with the ring diameter of 260 m resonates at 1.082 MHz and a frequency tuning range of about 3, 200 ppm has been achieved by applying DC bias voltage in the range 0 V – 6 V. Experimental results have shown that, under the same operating conditions, a wider frequency tuning range has been detected when the device was actuated and tuned with the piezoelectric actuator that covers a larger area of the ring surface and surrounds the central hole of the ring resonant structure.

Izvorni jezik
Engleski

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