Naslov
Long term stability of silicon roughness standards

Autori
Baršić, Gorana ; Katić, Marko ; Šimunović, Vedran

Izvornik
Precision engineering (0141-6359) 48 (2017); 352-356

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
Silicon roughness standards ; Long term stability

Sažetak
In 1986 the roughness reference standards made of silicon were produced at the Laboratory for Precise Measurements of Length (LFSB), which is now a part of Croatian Metrology Institute (HMI) designated as HMI/FSB-LPMD. At that time, roughness standards were commonly made either from steel or glass. After 3 decades of use it was decided to conduct a research of metrological features on two silicon roughness standards which were continuously used as primary standards for roughness in Croatia. The analysis is based on measurement results of roughness parameters (Ra, Rz and RSm) from calibration certificates provided by several national metrology institutes. Statistical consistency is checked with Birge ratio test, and En values are calculated in order to check if significant change of roughness parameters over the years can be determined.

Izvorni jezik
Engleski

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