Naslov
Tunability of Piezoelectric MEMS Ring Resonator Based Filter

Autori
Sviličić, Boris ; Wood, Graham S. ; Mastropaolo, Enrico ; Cheung, Rebecca

Vrsta, podvrsta i kategorija rada
Radovi u zbornicima skupova, cjeloviti rad (in extenso), znanstveni

Izvornik
30th European Conference on Solid-State Transducers - EUROSENSORS 2016 / - Budimpešta, 2016

Skup
30th European Conference on Solid-State Transducers - EUROSENSORS2016

Mjesto i datum
Budimpešta, Mađarska, 04.09.2016. - 07.09.2016

Vrsta sudjelovanja
Poster

Vrsta recenzije
Međunarodna recenzija

Ključne riječi
MEMS resonator; tunable filter; piezoelectric actuation; piezoelectric sensing

Sažetak
The influence of piezoelectric actuator design on a two-port piezoelectric micro-electro-mechanical (MEMS) ring resonator frequency tuning performance has been investigated. Cubic silicon carbide (3C-SiC) ring resonator was fabricated with piezoelectric actuator and sensor made of lead– zirconium–titanate (PZT) on the top of the ring. Measurements of the transmission frequency response have shown that the device with the ring diameter of 260 μm resonate at 1.082 MHz and frequency range of about 3, 200 ppm has been achieved by applying DC bias voltage in the range 0 V – 6 V. Experimental results have shown that, under the same operating conditions, a wider frequency tuning range has been detected when the device was actuated and tuned with the piezoelectric actuator that covers larger area of the ring surface and surrounds the central hole of the ring resonant structure.

Izvorni jezik
Engleski

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