Naslov
Electrothermal Actuation of MEMS Resonator Based Filters with Piezoelectric Sensing

Autori
Sviličić, Boris ; Mastropaolo, Enrico ; Cheung, Rebecca

Vrsta, podvrsta i kategorija rada
Radovi u zbornicima skupova, cjeloviti rad (in extenso), znanstveni

Izvornik
37th Progress in Electromagnetics Research Symposium - PIERS 2016 / - Shanghai, 2016

Skup
Progress in Electromagnetics Research Symposium - PIERS 2016

Mjesto i datum
Šangaj, Kina, 08.08.2016. - 11.08.2016

Vrsta sudjelovanja
Poster

Vrsta recenzije
Međunarodna recenzija

Ključne riječi
MEMS resonator; Tunable filter; Electrothermal actuation; Piezoelectric sensing

Sažetak
In this work, we investigate on electrothermal actuator design solutions for optimizing frequency tuning range and Q-factor of the devices. Devices of two types were fabricated, with the only difference in the electrothermal actuator layout design, slab and u- shape layout, while other technological parameters and dimensions are the same (Fig. 1). Tested devices were taken from the same die and tested by performing two-port transmission frequency response measurements. The devices operate between 0.75 and 1.2 MHz for tuning voltages of 1 to 7 V, and Q-factors up to ~400 have been measured in atmospheric conditions. Experimental results have shown that the device actuated with u-shape electrode resonates at lower frequencies with higher Q-factor, and that wider frequency tuning has been obtained under the same actuating conditions.

Izvorni jezik
Engleski

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