Naslov
Holographic interferometric microscope for complete displacement determination

Autori
Kruschke, Oliver ; Wernicke, Guenther ; Huth, Torsten ; Demoli, Nazif ; Gruber, Hartmut

Izvornik
Optical engineering (0091-3286) 36 (1997), 9; 2448-2456

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
holographic microscopy; holographic interferometry

Sažetak
Holographic microscopy for the simultaneous interferometric determination of all displacement components is described. The recording and the evaluation procedures are optimized by three illumination directions and conjugate reconstruction, respectively. Microscopic observation is completely separated from holographic recording. The holographic microscope performs maximum flexibility of magnification combined with high imaging accuracy. The phase-shift technique and Fourier analysis with a carrier frequency are applied for interferogram evaluation. Both methods are compared regarding the measurement range, accuracy, and handling. In-plane and out-of-plane displacement components can be measured simultaneously by both evaluation methods. A cantilever beam, a circular plate, and a surface-mounted microresistor are used to demonstrate the capabilities of the holographic microscope.

Izvorni jezik
Engleski

Znanstvena područja
Fizika

POVEZANOST RADA