Pregled bibliografske jedinice broj: 76062
Structure of W-C films deposited on Si substrates; Surface and subsurface analysis by GISAXS and SAXS patterns
Structure of W-C films deposited on Si substrates; Surface and subsurface analysis by GISAXS and SAXS patterns // Final Programme and Book of Abstracts 9th Joint Vacuum Conference / Leisch, Manfred , Winkler, Adolf (ur.).
Graz: Austrian Vacuum Society, 2002. str. 55-55 (poster, međunarodna recenzija, sažetak, znanstveni)
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Naslov
Structure of W-C films deposited on Si substrates; Surface and subsurface analysis by GISAXS and SAXS patterns
Autori
Salamon, Krešimir ; Milat, Ognjen ; Dubček, Pavo ; Radić, Nikola
Vrsta, podvrsta i kategorija rada
Sažeci sa skupova, sažetak, znanstveni
Izvornik
Final Programme and Book of Abstracts 9th Joint Vacuum Conference
/ Leisch, Manfred , Winkler, Adolf - Graz : Austrian Vacuum Society, 2002, 55-55
Skup
9th Joint Vacuum Conference (JVC9)
Mjesto i datum
Leibnitz, Austrija, 16.06.2002. - 20.06.2002
Vrsta sudjelovanja
Poster
Vrsta recenzije
Međunarodna recenzija
Sažetak
Tungsten carbide films (with average thickness t < 0,5 micron) were deposited onto silicon wafer substrates by reactive DC magnetron sputtering of pure W target with benzene as the carbon-supplying admixture. ...
Izvorni jezik
Engleski
Znanstvena područja
Fizika
POVEZANOST RADA
Ustanove:
Institut za fiziku, Zagreb,
Institut "Ruđer Bošković", Zagreb
