Pregled bibliografske jedinice broj: 755486
XPS Data interpretation of PureB layers
XPS Data interpretation of PureB layers, 2013. (ekspertiza).
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Naslov
XPS Data interpretation of PureB layers
Autori
Suligoj, Tomislav ; Koričić, Marko ; Knežević, Tihomir ; Poljak, Mirko ; Žilak, Josip
Izvornik
PureB layer analysis with Raman spectroscopy, ellipsometry, simulation and electrical measurements
Vrsta, podvrsta
Ostale vrste radova, ekspertiza
Godina
2013
Ključne riječi
XPS; amorphous boron; PureB layers; thin layers
Sažetak
XPS measurements of the structures with the amorphous boron layers (PureB layers) are performed before and after the sputtering. Composition of the PureB layer is determined based on the XPS spectra. Valence band spectra is also measured using the XPS measurement techinque.
Izvorni jezik
Engleski
Znanstvena područja
Elektrotehnika
POVEZANOST RADA
Ustanove:
Fakultet elektrotehnike i računarstva, Zagreb
Profili:
Tomislav Suligoj
(autor)
Mirko Poljak
(autor)
Josip Žilak
(autor)
Marko Koričić
(autor)
Tihomir Knežević
(autor)