Pregled bibliografske jedinice broj: 718181
A MEMS Cantilever Resonator with Electrothermal Actuation and Piezoelectric Sensing
A MEMS Cantilever Resonator with Electrothermal Actuation and Piezoelectric Sensing // Proceedings of the 40th International Conference on Micro and Nano Engineering
Lausanne, 2014. (poster, međunarodna recenzija, cjeloviti rad (in extenso), znanstveni)
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Naslov
A MEMS Cantilever Resonator with Electrothermal Actuation and Piezoelectric Sensing
Autori
Sviličić, Boris ; Mastropaolo, Enrico ; Cheung, Rebecca.
Vrsta, podvrsta i kategorija rada
Radovi u zbornicima skupova, cjeloviti rad (in extenso), znanstveni
Izvornik
Proceedings of the 40th International Conference on Micro and Nano Engineering
/ - Lausanne, 2014
Skup
40th International Conference on Micro and Nano Engineering
Mjesto i datum
Lausanne, Švicarska, 21.09.2014. - 24.09.2014
Vrsta sudjelovanja
Poster
Vrsta recenzije
Međunarodna recenzija
Ključne riječi
MEMS; cantilever resonator; electrothermal actuation; piezoelectric sensing; tuning
Sažetak
We report on a microelectromechanical (MEMS) cantilever resonator that is electrothermally actuated and piezoelectrically sensed, and has voltage tunable centre frequency. The device has been designed as a two-port vertical-mode cantilever resonator. The single- clamped beam (cantilever) resonator has been fabricated in silicon carbide with top platinum electrothermal actuator (input port) and lead zirconium titanate piezoelectric sensor (output port). The two- port transmission frequency response measurements have shown that the device with a beam length of 200 µm resonate at 522.2 kHz with a Q factor in air of 415. By applying DC bias voltage in the range 6 V – 11 V, a frequency tuning range of about 1, 300 ppm has been achieved.
Izvorni jezik
Engleski
