Pregled bibliografske jedinice broj: 718176
A MEMS Filter Based on Ring Resonator with Electrothermal Actuation and Piezoelectric Sensing
A MEMS Filter Based on Ring Resonator with Electrothermal Actuation and Piezoelectric Sensing // Procedia engineering, 87 (2014), 1406-1409 doi:10.1016/j.proeng.2014.11.706 (podatak o recenziji nije dostupan, članak, znanstveni)
CROSBI ID: 718176 Za ispravke kontaktirajte CROSBI podršku putem web obrasca
Naslov
A MEMS Filter Based on Ring Resonator with Electrothermal Actuation and Piezoelectric Sensing
Autori
Sviličić, Boris ; Mastropaolo, Enrico ; Cheung, Rebecca
Izvornik
Procedia engineering (1877-7058) 87
(2014);
1406-1409
Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni
Ključne riječi
MEMS; filter; ring resonator; electrothermal actuation; piezoelectric sensing; tuning
Sažetak
We report on the design of a two-port ring microelectromechanical (MEMS) resonator with electrothermal actuation and piezoelectric sensing for filtering applications. The ring resonator has been fabricated in silicon carbide with top platinum electrothermal actuator and lead zirconium titanate piezoelectric sensor. The transmission frequency response measurements have shown that the device with a ring radius of 200 μm resonate in the frequency range 0.4 MHz – 0.6 MHz, in the presence of tuning. By applying DC bias voltage in the range 4 V – 10 V, a frequency tuning range of 330, 000 ppm has been achieved.
Izvorni jezik
Engleski
