Pregled bibliografske jedinice broj: 718172
A MEMS Filter Based on Ring Resonator with Electrothermal Actuation and Piezoelectric Sensing
A MEMS Filter Based on Ring Resonator with Electrothermal Actuation and Piezoelectric Sensing // Proceedings of the 28th European Conference on Solid-State Transducers
Brescia, 2014. (poster, međunarodna recenzija, cjeloviti rad (in extenso), znanstveni)
CROSBI ID: 718172 Za ispravke kontaktirajte CROSBI podršku putem web obrasca
Naslov
A MEMS Filter Based on Ring Resonator with Electrothermal Actuation and Piezoelectric Sensing
Autori
Sviličić, Boris ; Mastropaolo, Enrico ; Cheung, Rebecca
Vrsta, podvrsta i kategorija rada
Radovi u zbornicima skupova, cjeloviti rad (in extenso), znanstveni
Izvornik
Proceedings of the 28th European Conference on Solid-State Transducers
/ - Brescia, 2014
Skup
European Conference on Solid-State Transducers (EUROSENSORS 2014)
Mjesto i datum
Brescia, Italija, 2014
Vrsta sudjelovanja
Poster
Vrsta recenzije
Međunarodna recenzija
Ključne riječi
MEMS; filter; ring resonator; electrothermal actuation; piezoelectric sensing; tuning
Sažetak
We report on the design of a two-port ring microelectromechanical (MEMS) resonator with electrothermal actuation and piezoelectric sensing for filtering applications. The ring resonator has been fabricated in silicon carbide with top platinum electrothermal actuator and lead zirconium titanate piezoelectric sensor. The transmission frequency response measurements have shown that the device with the ring radius of 200μm resonate in the frequency range 0.4MHz – 0.6MHz, in the presence of tuning. By applying DC bias voltage in the range 4V – 10V and frequency tuning range of 330, 000ppm has been achieved.
Izvorni jezik
Engleski
