Naslov
LIF spectroscopy at a cylindrical magnetron discharge

Autori
D.Gracin, R.Denkelmann, S.Maurmann, H.-J.Kunze

Vrsta, podvrsta i kategorija rada
Sažeci sa skupova, sažetak, znanstveni

Izvornik
Abstract book of 14th international vacuum congress / - Birmingham, 1998

Skup
14th international vacuum congress and 10th international conference on solid surfaces

Mjesto i datum
Birmingham, Ujedinjeno Kraljevstvo, 31.08.1998. - 04.09.1998

Vrsta sudjelovanja
Poster

Vrsta recenzije
Međunarodna recenzija

Ključne riječi
LIF spectroscopy; Ar ion energy distribution; cylindrical magnetron

Sažetak
The energy and density distribution of Ar ions in a non-isothermal, low temperature plasma of a cylindrical magnetron discharge was examined by laser induced fluorescence (LIF), using tuneable dye laser in Littman-type design, pumped by pulsed Nd:YAG laser. The magnetron was runing in cylindrical- post magnetron configuration, at Ar gas pressure between 2 and 10 Pa and cathode current densities about 4 mA/cm2. Permanent magnets, placed at the end of stainless steel cathode, produced an average magnetic field in the discharge areas of about 200 Gauss. The probe beam, 0, 1mmx4mm was stepscanned in radial direction, parallel and perpendicular to the electric field. The LIF signal was recorded normaly to the probe beam by a Photomultiplier, connected to the 0, 25 m monochromator, with 1mm entrance slit, using a boxcar integrator. The investigation shows that the density of the ions has a maximum value near the cathode region ; it decreases abruptly in the direction to the cathode and rather slowly in the opposite direction, cosistent with recently published results obtained by probe measurements. The effective ion temperature, estimated from line profile, is in the 1 eV range, which is similar to results obtained by Goeckner for the planar magnetron.

Izvorni jezik
Engleski

Znanstvena područja
Fizika

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