Pregled bibliografske jedinice broj: 633163
Tunability of silicon carbide resonators with electrothermal actuation and piezoelectric readout
Tunability of silicon carbide resonators with electrothermal actuation and piezoelectric readout // Proceedings of the 57th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication
Nashville (TN), 2013. (predavanje, međunarodna recenzija, cjeloviti rad (in extenso), znanstveni)
CROSBI ID: 633163 Za ispravke kontaktirajte CROSBI podršku putem web obrasca
Naslov
Tunability of silicon carbide resonators with electrothermal actuation and piezoelectric readout
Autori
Mastropaolo, Enrico ; Sviličić, Boris ; Cheung, Rebecca
Vrsta, podvrsta i kategorija rada
Radovi u zbornicima skupova, cjeloviti rad (in extenso), znanstveni
Izvornik
Proceedings of the 57th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication
/ - Nashville (TN), 2013
Skup
The 57th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication
Mjesto i datum
Nashville (TN), Sjedinjene Američke Države, 28.05.2013. - 31.05.2013
Vrsta sudjelovanja
Predavanje
Vrsta recenzije
Međunarodna recenzija
Ključne riječi
silicon carbide; MEMS resonator; electrothermal actuation; piezoelectric sensing; frequency tuning
Sažetak
Silicon carbide MEMS resonators with electrothermal actuation and piezoelectric sensing are presented. By varying the d.c. input bias from 1V to 7V the devices’ frequency can be tuned to 300, 000ppm and Q-factor improved by 130%. The influence of structures’ dimension on frequency shift, Q-factor and energy dissipation is discussed.
Izvorni jezik
Engleski
