Pregled bibliografske jedinice broj: 593967
Silicon Carbide MEMS Cantilever Resonator with Piezoelectric Actuation and Sensing
Silicon Carbide MEMS Cantilever Resonator with Piezoelectric Actuation and Sensing // Proceedings of 48rd International Conference on Microelectronics, Devices and Materials and the Workshop on Ceramic Microsystems
Otočec, 2012. str. 181-184 (predavanje, međunarodna recenzija, cjeloviti rad (in extenso), znanstveni)
CROSBI ID: 593967 Za ispravke kontaktirajte CROSBI podršku putem web obrasca
Naslov
Silicon Carbide MEMS Cantilever Resonator with Piezoelectric Actuation and Sensing
Autori
Sviličić, Boris ; Mastropaolo, Enrico ; Cheung, Rebecca
Vrsta, podvrsta i kategorija rada
Radovi u zbornicima skupova, cjeloviti rad (in extenso), znanstveni
Izvornik
Proceedings of 48rd International Conference on Microelectronics, Devices and Materials and the Workshop on Ceramic Microsystems
/ - Otočec, 2012, 181-184
ISBN
978-961-92933-2-4
Skup
International Conference on Microelectronics, Devices and Materials and the Workshop on Ceramic Microsystems
Mjesto i datum
Otočec, Slovenija, 19.09.2012. - 21.09.2012
Vrsta sudjelovanja
Predavanje
Vrsta recenzije
Međunarodna recenzija
Ključne riječi
Silicon carbide; MEMS; resonator; cantilever; piezoelectric actuation; piezoelectric sensing
Sažetak
A silicon carbide single-clamped beam (cantilever) microelectromechanical system (MEMS) resonant device actuated piezoelectrically and sensed piezoelectrically has been presented. Lead zirconium titanate (PZT) has been used as active material to implement the piezoelectric actuator and sensor. Piezoelectric electrodes have been placed on the top of the single 3C-SiC beam forming a flexural-mode resonator. Operation has been demonstrated with two-port measurements of the transmission frequency response. The 250-µm long device resonates at 372 kHz with Q factor of 385 in the atmospheric conditions.
Izvorni jezik
Engleski
