Pregled bibliografske jedinice broj: 582701
Piezoelectrically Transduced Silicon Carbide MEMS Double-Clamped Beam Resonators
Piezoelectrically Transduced Silicon Carbide MEMS Double-Clamped Beam Resonators // Proceedings of the 56th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication
Lahti, 2012. (predavanje, međunarodna recenzija, cjeloviti rad (in extenso), znanstveni)
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Naslov
Piezoelectrically Transduced Silicon Carbide MEMS Double-Clamped Beam Resonators
Autori
Sviličić, Boris ; Mastropaolo, Enrico ; Chen, Tao ; Cheung, Rebecca
Vrsta, podvrsta i kategorija rada
Radovi u zbornicima skupova, cjeloviti rad (in extenso), znanstveni
Izvornik
Proceedings of the 56th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication
/ - Lahti, 2012
Skup
The 56th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication
Mjesto i datum
Havaji, Sjedinjene Američke Države, 29.05.2012. - 01.06.2012
Vrsta sudjelovanja
Predavanje
Vrsta recenzije
Međunarodna recenzija
Ključne riječi
silicon carbide; MEMS resonator; double-clamped beam resonator; piezoelectric sensing; piezoelectric actuation
Sažetak
In this work, we present the the design, fabrication and testing of piezoelectrically transduced 3C-SiC double-clamped beam MEMS resonant devices. The influence of the DC bias voltage, electrode and beam dimensions on the resonant frequency, including the impact of the DC voltage on the linearity of the frequency response, is investigated.
Izvorni jezik
Engleski
