Pregled bibliografske jedinice broj: 547119
Piezoelectrically Actuated and Sensed Silicon Carbide Ring MEMS Resonators
Piezoelectrically Actuated and Sensed Silicon Carbide Ring MEMS Resonators // Proceedings of the 37th International Conference on Micro and Nano Engineering
Berlin, 2011. (predavanje, međunarodna recenzija, cjeloviti rad (in extenso), znanstveni)
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Naslov
Piezoelectrically Actuated and Sensed Silicon Carbide Ring MEMS Resonators
Autori
Sviličić, Boris ; Mastropaolo, Enrico ; Flynn, Brian ; Chen, Tao ; Cheung, Rebecca
Vrsta, podvrsta i kategorija rada
Radovi u zbornicima skupova, cjeloviti rad (in extenso), znanstveni
Izvornik
Proceedings of the 37th International Conference on Micro and Nano Engineering
/ - Berlin, 2011
Skup
37th International Conference on Micro and Nano Engineering
Mjesto i datum
Berlin, Njemačka, 19.09.2011. - 23.09.2011
Vrsta sudjelovanja
Predavanje
Vrsta recenzije
Međunarodna recenzija
Ključne riječi
silicon carbide; MEMS resonator; ring resonator; piezoelectric sensing; piezoelectric actuation
Sažetak
In this work, in order to demonstrate electrical actuation and sensing in SiC flexural ring resonators, PZT electrodes have been integrated on SiC flexural ring resonators. Ring shaped resonators in 3C-SiC with a radius between 60 µm and 200 µm and hole radius of 5 µm and 10 µm that operate between 600 kHz and 3.7 MHz have been designed, fabricated and tested. The linearity of the device as a function of input power has been studied. Good linearity behaviour has been observed, suggesting devices with good reliability.
Izvorni jezik
Engleski
