Pregled bibliografske jedinice broj: 547118
Electrothermally Actuated and Piezoelectrically Sensed Silicon Carbide Tunable MEMS Resonator
Electrothermally Actuated and Piezoelectrically Sensed Silicon Carbide Tunable MEMS Resonator // IEEE electron device letters, 33 (2012), 2; 278-280 doi:10.1109/LED.2011.2177513 (međunarodna recenzija, članak, znanstveni)
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Naslov
Electrothermally Actuated and Piezoelectrically Sensed Silicon Carbide Tunable MEMS Resonator
Autori
Sviličić, Boris ; Mastropaolo, Enrico ; Flynn, Brian ; Cheung, Rebecca
Izvornik
IEEE electron device letters (0741-3106) 33
(2012), 2;
278-280
Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni
Ključne riječi
silicon carbide; MEMS; resonators; filters; electrothermal actuation; frequency tuning; piezoelectric sensing
Sažetak
In this letter, we present the design, fabrication, and electrical testing of a silicon carbide microelectromechanical (MEMS) resonant device with electrothermal actuation and piezoelectric sensing. A doubly clamped flexural-mode beam resonator made of cubic silicon carbide has been fabricated with a top platinum electrothermal actuator and a top lead zirconium titanate piezoelectric sensor. Electrothermal transduction has been used to drive the device into resonance and tune its frequency. Piezoelectric transduction has been used as resonance sensing technique. Electrical measurements have shown that by increasing the DC bias of the actuating voltage from 1 V to 7 V, a tuning range of 171 kHz can be achieved with a device resonating at 1.766 MHz.
Izvorni jezik
Engleski
Citiraj ovu publikaciju:
Časopis indeksira:
- Current Contents Connect (CCC)
- Web of Science Core Collection (WoSCC)
- Science Citation Index Expanded (SCI-EXP)
- SCI-EXP, SSCI i/ili A&HCI
- Scopus
