Naslov
IR-Based Temperature Measurement in Rotational Grinding of Sapphire Wafers

Autori
Klocke, F. ; Kuljanić, Elso ; Dambon, O. ; Sortino, M. ; Herben, M. ; Totis, G.

Vrsta, podvrsta i kategorija rada
Radovi u zbornicima skupova, cjeloviti rad (in extenso), znanstveni

Izvornik
AMST'11 Advanced Manufacturing Systems and Technology / Kuljanić, Elso - Udine, 2011, 623-634

ISBN
978-953-6326-64-8

Skup
9th International Conference on Advanced Manufacturing Systems and Technology AMST'11

Mjesto i datum
Mali Lošinj, Hrvatska, 16.06.2011. - 17.06.2011

Vrsta sudjelovanja
Predavanje

Vrsta recenzije
Međunarodna recenzija

Ključne riječi
Grinding; Temperature measurement; Sapphire

Sažetak
Single crystalline sapphire wafers are used as a substrate for semiconductor applications like gallium nitride-based white LEDs. In optimization of the manufacturing chain, rotational grinding can play a mayor role by substituting the conventional lapping process and reducing cost intensive efforts in downstream polishing steps. Due the material properties and in particular the hardness of sapphire, however, grinding process development is difficult. For this reason, the measurement of in-process variables like contact zone temperatures is of significant interest. In this paper, a concept and experimental setup for IR-based temperature measurement that utilizes the optical properties of sapphire is presented. The system behaviour of the realized test setup is examined in calibration tests. The results of successfully performed grinding tests are presented to prove the feasibility of the measuremnt concept.

Izvorni jezik
Engleski

Znanstvena područja
Strojarstvo

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