Pregled bibliografske jedinice broj: 521922
Defects in silicon introduced by helium implantation and subsequent annealing
Defects in silicon introduced by helium implantation and subsequent annealing // Radiation physics and chemistry, 80 (2011), 10; 1099-1103 doi:10.1016/j.radphyschem.2011.02.006 (međunarodna recenzija, članak, znanstveni)
CROSBI ID: 521922 Za ispravke kontaktirajte CROSBI podršku putem web obrasca
Naslov
Defects in silicon introduced by helium implantation and subsequent annealing
Autori
Capan, Ivana ; Bak-Misiuk, Jadwiga ; Pivac, Branko ; Dubček, Pavo ; Misiuk, Andrzej ; Bernstorff, Sigrid ; Romanowski, P.
Izvornik
Radiation physics and chemistry (0969-806X) 80
(2011), 10;
1099-1103
Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni
Ključne riječi
silicon ; implantation ; defect structure ; GISAXS ; annealing ; hydrostatic pressure
Sažetak
Formation and morphology of defects, including bubbles and voids, induced in silicon by He+ implantation and subsequent high temperature and pressure treatment have been studied by means of X-ray diffraction method and grazing incidence small angle X-ray scattering (GISAXS). Enhanced pressure affects the formation of voids and/or of large cavities inducing creation of faceted structures. Moreover, high pressure treatment suppresses creation of interstitial-related defects.
Izvorni jezik
Engleski
Znanstvena područja
Fizika
Napomena
Rad je prezentiran na skupu The 10th International School and Symposium on Synchrotron Radiation in Natural Science (ISSRNS) : Synchrotron radiation studies in Poland ; Maciej Kozak, Wojciech Paszkowicz, Pawel Piszora (ur.).
POVEZANOST RADA
Projekti:
098-0982886-2866 - Temeljna svojstva nanostruktura i defekata u poluvodičima i dielektricima (Pivac, Branko, MZOS ) ( CroRIS)
Ustanove:
Institut "Ruđer Bošković", Zagreb
Citiraj ovu publikaciju:
Časopis indeksira:
- Current Contents Connect (CCC)
- Web of Science Core Collection (WoSCC)
- Science Citation Index Expanded (SCI-EXP)
- SCI-EXP, SSCI i/ili A&HCI
- Scopus