Naslov
Optical emission spectroscopy of inductively coupled RF ammonia plasma

Autori
Kregar, Zlatko ; Grulich, Ondrej ; Mraček, Aleš ; Cvelbar, Uroš ; Mozetič, Miran

Vrsta, podvrsta i kategorija rada
Sažeci sa skupova, sažetak, znanstveni

Izvornik
Zbornik sažetaka 17. Međunarodni sastanak Vakuumska znanost i tehnika / Pivac, Branko - Zagreb, 2010

Skup
17. Međunarodni sastanak Vakuumska znanost i tehnika

Mjesto i datum
Tuheljske Toplice, Hrvatska, 01.06.2010

Vrsta sudjelovanja
Poster

Vrsta recenzije
Nije recenziran

Ključne riječi
Optical emission spectroscopy; ammonia plasma

Sažetak
Low temperature ammonia plasma was generated by a RF inductively coupled system. The discharge chamber was a linear quartz glass tube with an inner diameter of 3.6 cm which has a good optical transparency from 200 nm to IR. Ammonia plasma was created by a 6 turn coil, and the operating frequency of the RF generator was a standard 13.56 MHz. The generator (which has the nominal power up to 1000 W) was connected to the coil via the matching network. Plasma was investigated by an Avantes 3648 optical spectrometer (range from 200 nm to 1100 nm, with a resolution of 1 nm). Observed spectra consist primarily of nitrogen molecular bands (which dominate the spectrum) and hydrogen Balmer lines. The most prominent bands were the 2nd positive band of molecular nitrogen at 337.3 nm (0, 0), 357.6 nm (0, 1) and 317 nm (1, 0) and the fainter first positive band (more prominent at around 750 nm). Only distinguishable atomic lines of hydrogen are Halfa at 656 nm and Hbeta at 486 nm and Hgama at 434 nm (Hdelta was noticed only at higher powers). Characterization of ammonia plasma was performed in order to optimize plasma parameters for surface modification of Hyaluronan films.

Izvorni jezik
Engleski

Znanstvena područja
Fizika

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