Pregled bibliografske jedinice broj: 521732
Optical Emission From Oxygen Plasma in E and H Modes
Optical Emission From Oxygen Plasma in E and H Modes // Ieee transactions on plasma science, 39 (2011), 11; 2502-2503 doi:10.1109/TPS.2011.2160733 (međunarodna recenzija, kratko priopcenje, znanstveni)
CROSBI ID: 521732 Za ispravke kontaktirajte CROSBI podršku putem web obrasca
Naslov
Optical Emission From Oxygen Plasma in E and H Modes
Autori
Kregar, Zlatko ; Milošević, Slobodan ; Vesel, Alenka
Izvornik
Ieee transactions on plasma science (0093-3813) 39
(2011), 11;
2502-2503
Vrsta, podvrsta i kategorija rada
Radovi u časopisima, kratko priopcenje, znanstveni
Ključne riječi
optical emission; oxygen plasma; plasma modes
Sažetak
Highly reactive oxygen plasma with a very high dissociation fraction of oxygen molecules is often created in electrodeless discharges. The discharge runs either in the E or H mode. The E mode is obtained at low power while the H mode dominates at high power. The transition between two modes is easily observed by the naked eye or, even better, by optical emission spectroscopy. In this paper, we show major differences between the two modes obtained in an experimental plasma reactor with a 1200-W RF generator operating at the frequency of 13.56 MHz.
Izvorni jezik
Engleski
Znanstvena područja
Fizika
POVEZANOST RADA
Projekti:
035-0352851-2856 - Laserska spektroskopija hladne plazme za obradu materijala (Milošević, Slobodan, MZOS ) ( CroRIS)
Ustanove:
Institut za fiziku, Zagreb
Citiraj ovu publikaciju:
Časopis indeksira:
- Current Contents Connect (CCC)
- Web of Science Core Collection (WoSCC)
- Science Citation Index Expanded (SCI-EXP)
- SCI-EXP, SSCI i/ili A&HCI
- Scopus
