Naslov
Novel Horizontal Current Bipolar Transistor (HCBT) in AKM's 0, 18μm BiCMOS Process

Autori
Suligoj, Tomislav ; Koričić, Marko

Izvornik
Research on the Novel Horizontal Current Bipolar Transistor (HCBT) Structures

Vrsta, podvrsta
Ostale vrste radova, ekspertiza

Godina
2007

Ključne riječi
bipolar transistor; HCBT; semiconductor technology; BiCMOS
(Research on the Novel Horizontal Current Bipolar Transistor (HCBT) Structures)

Sažetak
Process integration of Horizontal Current Bipolar Transistor (HCBT) into AKM's 0.18um CMOS process is developed. Critical process steps are investigated such as selectivity of TMAH etching, polysilicon planarization techniques, base implantation etc.

Izvorni jezik
Engleski

Znanstvena područja
Elektrotehnika

POVEZANOST RADA