Pregled bibliografske jedinice broj: 484405
Physical mechanisms of electron mobility behavior in ultra-thin body double-gate MOSFETs with (100) and (111) active surfaces
Physical mechanisms of electron mobility behavior in ultra-thin body double-gate MOSFETs with (100) and (111) active surfaces // Proceedings of the 46th International Conference on Microelectronics, Devices and Materials (MIDEM) / Đonlagić, D. ; Šorli, I. ; Šorli, P. (ur.).
Ljubljana: BIRO M, 2010. str. 101-105 (predavanje, međunarodna recenzija, cjeloviti rad (in extenso), znanstveni)
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Naslov
Physical mechanisms of electron mobility behavior in ultra-thin body double-gate MOSFETs with (100) and (111) active surfaces
Autori
Poljak, Mirko ; Jovanović, Vladimir ; Suligoj, Tomislav
Vrsta, podvrsta i kategorija rada
Radovi u zbornicima skupova, cjeloviti rad (in extenso), znanstveni
Izvornik
Proceedings of the 46th International Conference on Microelectronics, Devices and Materials (MIDEM)
/ Đonlagić, D. ; Šorli, I. ; Šorli, P. - Ljubljana : BIRO M, 2010, 101-105
ISBN
978-961-92933-0-0
Skup
International Conference on Microelectronics, Devices and Materials (MIDEM)
Mjesto i datum
Radenci, Slovenija, 29.09.2010. - 01.10.2010
Vrsta sudjelovanja
Predavanje
Vrsta recenzije
Međunarodna recenzija
Ključne riječi
double-gate MOSFET; Si (100); Si (111); physics-based modeling; quantum modeling; mobility
Sažetak
Influence of downscaling of body thickness on electron mobility in double-gate MOSFETs with ultra-thin body is investigated for (100) and (111) orientations of the active surface. Effective mass approximation is used in our Schrödinger-Poisson solver while momentum relaxation time approximation is used for the calculation of electron scattering rates. Intravalley acoustic, intervalley optical and surface-roughness scattering is included in our simulations. Behavior of electron mobility is investigated by examination of form-factors, ladder and subband repopulation effects and field-induced perturbations. Compared to (100) devices, (111)-oriented UTB double-gate MOSFETs exhibit mobility enhancement for body thickness of approximately 8 nm and only at high inversion charge densities.
Izvorni jezik
Engleski
Znanstvena područja
Elektrotehnika
POVEZANOST RADA
Projekti:
036-0361566-1567 - Nanometarski elektronički elementi i sklopovske primjene (Suligoj, Tomislav, MZO ) ( CroRIS)
036-0982904-1642 - Sofisticirane poluvodičke strukture za komunikacijsku tehnologiju (Koričić, Marko, MZO ) ( CroRIS)
Ustanove:
Fakultet elektrotehnike i računarstva, Zagreb