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Pregled bibliografske jedinice broj: 459960

Application of Laser Annealing in the EU FP6 Project D-DotFET

Nanver, Lis K; Jovanović, Vladimir; Biasotto, Cleber; van der Cingel, Johan; Milosavljević, Silvana
Application of Laser Annealing in the EU FP6 Project D-DotFET // Proceedings of 17th International Conference on Advanced Thermal Processing of Semiconductors, RTP '09
Albany (NY), Sjedinjene Američke Države, 2009. str. 1-7 (pozvano predavanje, međunarodna recenzija, cjeloviti rad (in extenso), znanstveni)

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Naslov
Application of Laser Annealing in the EU FP6 Project D-DotFET

Autori
Nanver, Lis K ; Jovanović, Vladimir ; Biasotto, Cleber ; van der Cingel, Johan ; Milosavljević, Silvana

Vrsta, podvrsta i kategorija rada
Radovi u zbornicima skupova, cjeloviti rad (in extenso), znanstveni

Izvornik
Proceedings of 17th International Conference on Advanced Thermal Processing of Semiconductors, RTP '09 / - , 2009, 1-7

ISBN
978-1-4244-3815-0

Skup
17th IEEE Conference on Advanced Thermal Processing of Semiconductors RTP 2009

Mjesto i datum
Albany (NY), Sjedinjene Američke Države, 29.09.2009. - 02.10.2009

Vrsta sudjelovanja
Pozvano predavanje

Vrsta recenzije
Međunarodna recenzija

Ključne riječi
Ge-Si alloys; MISFET; excimer lasers; field effect transistors; laser beam annealing; semiconductor quantum dots

Sažetak
Full-melt high-power excimer laser annealing is investigated as a means of activating implanted source/drain regions in a MISFET structure, which could be positioned on a SiGe dot in such a manner that strain is transferred to the channel region. Such a “DotFET” device is the focus of the EU FP6 project DDotFET. A MISFET structure fabricated at suitably low processing temperatures, below 400C, is demonstrated with a metal/high-k gate-stack that is self-aligned to laser-annealed S/D regions.

Izvorni jezik
Engleski

Znanstvena područja
Elektrotehnika



POVEZANOST RADA

Projekti:
036-0361566-1567 - Nanometarski elektronički elementi i sklopovske primjene (Suligoj, Tomislav, MZO ) ( CroRIS)
036-0982904-1642 - Sofisticirane poluvodičke strukture za komunikacijsku tehnologiju (Koričić, Marko, MZO ) ( CroRIS)

Ustanove:
Fakultet elektrotehnike i računarstva, Zagreb

Profili:

Avatar Url Vladimir Jovanović (autor)

Citiraj ovu publikaciju:

Nanver, Lis K; Jovanović, Vladimir; Biasotto, Cleber; van der Cingel, Johan; Milosavljević, Silvana
Application of Laser Annealing in the EU FP6 Project D-DotFET // Proceedings of 17th International Conference on Advanced Thermal Processing of Semiconductors, RTP '09
Albany (NY), Sjedinjene Američke Države, 2009. str. 1-7 (pozvano predavanje, međunarodna recenzija, cjeloviti rad (in extenso), znanstveni)
Nanver, L., Jovanović, V., Biasotto, C., van der Cingel, J. & Milosavljević, S. (2009) Application of Laser Annealing in the EU FP6 Project D-DotFET. U: Proceedings of 17th International Conference on Advanced Thermal Processing of Semiconductors, RTP '09.
@article{article, author = {Nanver, Lis K and Jovanovi\'{c}, Vladimir and Biasotto, Cleber and van der Cingel, Johan and Milosavljevi\'{c}, Silvana}, year = {2009}, pages = {1-7}, keywords = {Ge-Si alloys, MISFET, excimer lasers, field effect transistors, laser beam annealing, semiconductor quantum dots}, isbn = {978-1-4244-3815-0}, title = {Application of Laser Annealing in the EU FP6 Project D-DotFET}, keyword = {Ge-Si alloys, MISFET, excimer lasers, field effect transistors, laser beam annealing, semiconductor quantum dots}, publisherplace = {Albany (NY), Sjedinjene Ameri\v{c}ke Dr\v{z}ave} }
@article{article, author = {Nanver, Lis K and Jovanovi\'{c}, Vladimir and Biasotto, Cleber and van der Cingel, Johan and Milosavljevi\'{c}, Silvana}, year = {2009}, pages = {1-7}, keywords = {Ge-Si alloys, MISFET, excimer lasers, field effect transistors, laser beam annealing, semiconductor quantum dots}, isbn = {978-1-4244-3815-0}, title = {Application of Laser Annealing in the EU FP6 Project D-DotFET}, keyword = {Ge-Si alloys, MISFET, excimer lasers, field effect transistors, laser beam annealing, semiconductor quantum dots}, publisherplace = {Albany (NY), Sjedinjene Ameri\v{c}ke Dr\v{z}ave} }

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