Naslov
Thermal Stability of Amorphous Silicon-Carbon Alloys Deposited by Magnetron Source

Autori
Gracin, Davor ; Radić, Nikola ; Desnica, U.V. ; Andreić, Željko ; Balzar, D.

Izvornik
Fizika A (1330-0008) 4 (1995); 329-335

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
magnetron

Sažetak
Morphous a-Si0.85C0.15:H and a-Si0.6C0.4:H alloys were deposited onto a non-heated substrate using a magnetron source. The samples were exposed to a sequential iso-chronal thermal annealing up to 1000 ° C in a vacuum chamber, and were investigated by the IR spectroscopy and X-ray diffraction measurements. The influence of the thermal treatment on structural ordering was monitored by the evolution of the intensity and shape of the spectral IR lines corresponding to the Si-H and Si-C bonds. At low temperatures, the most pronounced features were accompanied with hydrogen evolution which completes up to 400 ° C. Up to 800 ° C the Si-C absorption lines have gradually changed their shape, peak position and intensity. At 900 ° C, the abrupt changes occured, denoting final transition to crystalline state.

Izvorni jezik
Engleski

Znanstvena područja
Fizika

POVEZANOST RADA