Naslov
New analytical methods in the Laboratory for Ion Beam Interactions at the RBI: TOF-ERDA and coincident elastic scattering

Autori
Bogdanović Radović, Ivančica ; Siketić, Zdravko ; Skukan, Natko ; Jakšić, Milko

Vrsta, podvrsta i kategorija rada
Sažeci sa skupova, sažetak, znanstveni

Izvornik
16th International Scientific Meeting on Vacuum Science and Technique, Book of Abstracts / Kovač, Janez ; Mozetič, Miran - Ljubljana : Društvo za vakuumsko tehniko Slovenije, 2009

Skup
16th International Scientific Meeting on Vacuum Science and Technique

Mjesto i datum
Bohinj, Slovenija, 04.06.2009. - 05.06.2009

Vrsta sudjelovanja
Pozvano predavanje

Vrsta recenzije
Nije recenziran

Ključne riječi
IBIBA techniques; TOF-ERDA; coincident elastic scattering
(IBA techniques; TOF-ERDA; coincident elastic scattering)

Sažetak
Since recently, two new analytical methods are available for depth profiling and quantification of light elements in thin films in the Laboratory for Ion Beam Interactions. TOF ERDA method uses heavy and energetic ion beams to recoil lighter products from the target. Mass resolution of 1 amu for the elements (Z < 14) has been achieved with surface depth resolution for oxygen around 5 nm in SiO2 matrix. TOF ERDA efficiency is often less than unity for light elements. This is particularly critical for hydrogen where detection efficiency can be drastically reduced (~ 10%). To improve TOF ERDA detection efficiency for H, electron emission of thin C foils (~0.3 µ g/cm2) was enhanced by evaporating thin LiF layer on the foil. That improves significantly H detection efficiency and makes TOF ERDA spectrometer suitable for hydrogen analysis. Some recent results of multilayer analysis as well as analyisis of hydrogen containig samples are shown.

Izvorni jezik
Engleski

Znanstvena područja
Fizika

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