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Pregled bibliografske jedinice broj: 392791

Suppression of Corner Effects in Wide-Channel Triple-Gate Bulk FinFETs

Poljak, Mirko; Jovanović, Vladimir; Suligoj, Tomislav
Suppression of Corner Effects in Wide-Channel Triple-Gate Bulk FinFETs // Microelectronic Engineering, 87 (2010), 2; 192-199 doi:10.1016/j.mee.2009.07.013 (međunarodna recenzija, članak, znanstveni)

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Naslov
Suppression of Corner Effects in Wide-Channel Triple-Gate Bulk FinFETs

Autori
Poljak, Mirko ; Jovanović, Vladimir ; Suligoj, Tomislav

Izvornik
Microelectronic Engineering (0167-9317) 87 (2010), 2; 192-199

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
body-tied; bulk; corner effect; FinFET; kink effect; short-channel effects; triple-gate MOSFET

Sažetak
This paper presents a method of eliminating corner effects in triple-gate bulk FinFETs. The parasitic device in FinFET's corners can be turned off by increasing body doping in corner regions by corner implantation. Corner implantation described in this work does not require additional masks, rotation or tilt. This method is investigated in idealized (with rectangular cross-section of the fin) and realistic (with rounded top corners of the fin) triple-gate bulk FinFETs and has shown considerable improvements: kink effect in transfer characteristics is completely eliminated, threshold voltage increased by up to 0.43 V, subthreshold swing and drain-induced barrier-lowering decreased to values under 95 mV/dec and 16 mV/V, respectively. Optimization is performed on the realistic rounded-corner FinFET structure to find the proper body doping and corner implantation peak values for acceptable threshold voltage and on-state current.

Izvorni jezik
Engleski

Znanstvena područja
Elektrotehnika



POVEZANOST RADA

Projekti:
036-0361566-1567 - Nanometarski elektronički elementi i sklopovske primjene (Suligoj, Tomislav, MZO ) ( CroRIS)
036-0982904-1642 - Sofisticirane poluvodičke strukture za komunikacijsku tehnologiju (Koričić, Marko, MZO ) ( CroRIS)

Ustanove:
Fakultet elektrotehnike i računarstva, Zagreb

Profili:

Avatar Url Tomislav Suligoj (autor)

Avatar Url Vladimir Jovanović (autor)

Avatar Url Mirko Poljak (autor)

Poveznice na cjeloviti tekst rada:

doi www.sciencedirect.com dx.doi.org

Citiraj ovu publikaciju:

Poljak, Mirko; Jovanović, Vladimir; Suligoj, Tomislav
Suppression of Corner Effects in Wide-Channel Triple-Gate Bulk FinFETs // Microelectronic Engineering, 87 (2010), 2; 192-199 doi:10.1016/j.mee.2009.07.013 (međunarodna recenzija, članak, znanstveni)
Poljak, M., Jovanović, V. & Suligoj, T. (2010) Suppression of Corner Effects in Wide-Channel Triple-Gate Bulk FinFETs. Microelectronic Engineering, 87 (2), 192-199 doi:10.1016/j.mee.2009.07.013.
@article{article, author = {Poljak, Mirko and Jovanovi\'{c}, Vladimir and Suligoj, Tomislav}, year = {2010}, pages = {192-199}, DOI = {10.1016/j.mee.2009.07.013}, keywords = {body-tied, bulk, corner effect, FinFET, kink effect, short-channel effects, triple-gate MOSFET}, journal = {Microelectronic Engineering}, doi = {10.1016/j.mee.2009.07.013}, volume = {87}, number = {2}, issn = {0167-9317}, title = {Suppression of Corner Effects in Wide-Channel Triple-Gate Bulk FinFETs}, keyword = {body-tied, bulk, corner effect, FinFET, kink effect, short-channel effects, triple-gate MOSFET} }
@article{article, author = {Poljak, Mirko and Jovanovi\'{c}, Vladimir and Suligoj, Tomislav}, year = {2010}, pages = {192-199}, DOI = {10.1016/j.mee.2009.07.013}, keywords = {body-tied, bulk, corner effect, FinFET, kink effect, short-channel effects, triple-gate MOSFET}, journal = {Microelectronic Engineering}, doi = {10.1016/j.mee.2009.07.013}, volume = {87}, number = {2}, issn = {0167-9317}, title = {Suppression of Corner Effects in Wide-Channel Triple-Gate Bulk FinFETs}, keyword = {body-tied, bulk, corner effect, FinFET, kink effect, short-channel effects, triple-gate MOSFET} }

Časopis indeksira:


  • Current Contents Connect (CCC)
  • Web of Science Core Collection (WoSCC)
    • Science Citation Index Expanded (SCI-EXP)
    • SCI-EXP, SSCI i/ili A&HCI
  • Scopus

Uključenost u ostale bibliografske baze podataka::


  • INSPEC
  • Science Citation Index
  • Scopus

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