Pregled bibliografske jedinice broj: 384055
Quantitative analysis of hydrogen in thin films using TOF ERDA spectroscopy
Quantitative analysis of hydrogen in thin films using TOF ERDA spectroscopy // Thin solid films, 518 (2010), 10; 2617-2622 doi:10.1016/j.tsf.2009.07.196 (međunarodna recenzija, članak, znanstveni)
CROSBI ID: 384055 Za ispravke kontaktirajte CROSBI podršku putem web obrasca
Naslov
Quantitative analysis of hydrogen in thin films using TOF ERDA spectroscopy
Autori
Siketić, Zdravko ; Bogdanović Radović, Ivančica ; Jakšić, Milko
Izvornik
Thin solid films (0040-6090) 518
(2010), 10;
2617-2622
Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni
Ključne riječi
hydrogen analysis ; TOF ERDA
(Hydrogen analysis ; TOF ERDA)
Sažetak
Determination of atomic concentrations in thin films is one of key problems in materials science. Time-of-Flight Elastic Recoil Detection Analysis (TOF ERDA) is a powerful method for depth profiling of light and medium mass elements in near surface layers of material. However, due to poor detection efficiency those spectrometers are not commonly used for hydrogen analysis. We have performed some improvements in order to increase detection efficiency and to make spectrometer more suitable for hydrogen analysis. The spectrometer performance was tested on amorphous Si samples implanted with H- and D- and hydrogenised Si standard referent material. Sensitivity for hydrogen in silicon matrix was found to be several tenths of ppm with a surface depth resolution of ~15 nm.
Izvorni jezik
Engleski
Znanstvena područja
Fizika
POVEZANOST RADA
Projekti:
098-1191005-2876 - Procesi interakcije ionskih snopova i nanostrukture (Jakšić, Milko, MZOS ) ( CroRIS)
Ustanove:
Institut "Ruđer Bošković", Zagreb
Citiraj ovu publikaciju:
Časopis indeksira:
- Current Contents Connect (CCC)
- Web of Science Core Collection (WoSCC)
- Science Citation Index Expanded (SCI-EXP)
- SCI-EXP, SSCI i/ili A&HCI
- Scopus
