Naslov
Interaction of Magnetrons in a Codeposition Mode

Autori
Jerčinović, Marko ; Siketić, Zdravko ; Grötzschel, Rainer ; Radić, Nikola

Vrsta, podvrsta i kategorija rada
Sažeci sa skupova, sažetak, znanstveni

Izvornik
Proceedings of ICTF14 & RSD2008 / De Gryse, Roger ; Depla, Diederik ; Poelman, D. ; Mahieu, S. ; Leroy, W.P. ; Poelman, H. - Ghent : University of Ghent, 2008, 331-331

ISBN
978 90 334 7347 0

Skup
14th International Conference on Thin Films

Mjesto i datum
Gent, Belgija, 17.11.2008. - 20.11.2008

Vrsta sudjelovanja
Poster

Vrsta recenzije
Međunarodna recenzija

Ključne riječi
magnetron; codeposition

Sažetak
In a co-deposition mode of thin film preparation, two or more magnetrons are simultaneously operated in a deposition chamber. Cross-contamination shields are used to minimize mutual deposition of respective target materials onto each other. However, the magnetron plasmas are in contact above the shield, and the operating conditions of each magnetron are somewhat perturbed due to their interaction. A main consequence of these perturbations is the change of deposition rates of co-deposited materials, which leads to the departure of the true composition of prepared material from the prescribed composition of the film. Film composition being one of key parameters which determine material properties, its reproducibility is essential for correct interpretation of measured properties and applications. Two magnetron characteristics dominantly influence a composition of the materials prepared by a codeposition: a) magnetron discharge IU characteristics, and b) deposition rate as a function of discharge power. Difference between the IU characteristics of singularly operated magnetrons, and those of magnetrons operated simulatenously during codeposition, reveals the perturbation introduced by magnetron plasmas interaction. This interaction mostly affects the respective discharges operating voltage, and thus the average energy of sputtering (argon) ions, which allows to estimate the change of respective deposition rates of codepositing magnetrons. Here, a nominal (prescribed) and measured (RBS method) chemical composition of two series of binary alloys (Al-Mo, Ag-W) are compared, and the observed differences are correlated with the change of operating conditions of two magnetrons due to their respective plasmas interaction.

Izvorni jezik
Engleski

Znanstvena područja
Fizika

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