ࡱ> ;=:?@99:;<FGHIJq q` XbjbjqPqP db::- ~ ~ ~ ~ ~ ~ ~ $ ```Pl$ 0L^///////$1h74&0~ 0~ ~ 0###~ ~ /#/##V(J~ ~ /@ +%-`: ."/D000. ]5"]5 /]5~ /hJ#7<s=00#R0 ` ` ~ ~ ~ ~ ~ ~  Stopping power of different ions in Si measured with a bulk sample method and Bayesian inference data analysis N.P. Barradas1,2, E. Alves1,2, Z. Siketi3, I. Bogdanovi Radovi3 (1)Instituto Tecnolgico e Nuclear, E.N. 10 , Sacavm 2686-953, Portugal (2) Centro de Fsica Nuclear da Universidade de Lisboa, Av. Prof. Gama Pinto 2, Lisboa, Portugal (3)Ruer Boakovi Institute, P.O. Box 180, Zagreb 10002 , Croatia Abstract. The accuracy of ion beam analysis experiments depends critically on the stopping power values available. While for H and He ions accuracies normally better than 5% are achieved by usual interpolative schemes such as SRIM, for heavier ions the accuracy is worse. One of the main reasons is that the experimental data bases are very sparse, even for important materials such as Si. New measurements are therefore needed. Measurement of stopping power is often made with transmission in thin films, with the usual problems of film thickness homogeneity. We have previously developed an alternative method based on measuring bulk spectra, and fitting the yield by treating the stopping power as a fit parameter in a Bayesian inference Markov chain Monte Carlo procedure included in the standard IBA code NDF. We report on improvements of the method and on its application to the determination of the stopping power of 7Li in Si. To validate the method, we also apply it to the stopping of 4He in Si, which is known with 2% accuracy. Keywords: electronic stopping, RBS, silicon PACS: 06.20.Fn, 02.50.Ga, 34.50.Bw, 61.18.Bn Introduction Quantification of the depth scale in ion beam analysis techniques such as Rutherford backscattering (RBS), Elastic Recoil Detection Analysis, or Nuclear Reaction Analysis depends on knowledge of the stopping powers involved. The accuracy of the experiments thus depends crucially on the stopping power values available. Given that not all ion/target pairs have been measured, interpolative schemes such as SRIM1 or MSTAR2 are often used. The accuracy of SRIM is 4.2% for H and 4.1% for He ions. However, for Li and heavier ions the accuracy is only 5.1% and 6.1%, respectively.3 These numbers are averages, and are not the uncertainty for a given system. For instance, for heavy ions 42% of stopping power values calculated with SRIM2008 are off from the experimental ones by more than 5%. One of the main reasons is that the experimental data bases are sparse, even for important materials such as Si. Therefore, new measurements are needed to improve experimental data bases. Stopping power measurements are most often performed using thin transmission films, with the usual problems of film thickness homogeneity. We have previously developed an alternative method based on measuring bulk spectra, and fitting the yield by treating the stopping power as a fit parameter in a Bayesian inference Markov chain Monte Carlo procedure included in the standard IBA code NDF.4,5 We report on improvements of the method and on its application to the determination of the stopping power of 7Li ions in Si. To validate the method, we first apply it to the stopping of 4He in Si, which is known with a 2% accuracy6, and with 0.6% accuracy at a 1.5 MeV beam energy.7 Experimental details We self-amorphised Si by implanting Si at liquid nitrogen temperature, with 51015 at/cm2 at 340 keV and 51015 at/cm2 at 100 keV. This leads to an amorphous Si layer 300 nm thick (see Figure 1a). Then an Au marker layer around 20 nm thick was deposited. The 4He RBS experiments at 0.5, 1.0, 1.5, 2.0 and 2.4 MeV were done at ITN at an 179.9 scattering angle using an annular detector. The 7Li RBS experiments at 1.0, 1.5, 2.0, 2.5 and 3.0 MeV were done at the Ruer Boakovi Institute using three detectors simultaneously, at 118, 150 and 165 scattering angles. The energy calibration was made using the narrow 991.88 keV resonance in 27Al(p,)28S, and the neutron threshold reaction 7Li(p,n)7Be at 1880.6 keV. The exact Au areal density was determined to be 116.8(1.1)1015 at/cm2 from the 1.5 MeV 4He experiment (see Figure 1b). At this energy, a careful analysis of the certified standard IRMM0001/BAML003 released by IRMM, Geel8,9, has shown that SRIM2008 stopping power of 4He in Si is correct with an uncertainty of 0.6%.7 The total 0.97% error in the Au content includes errors from statistics, background determination (namely pile-up), and from the uncertainty in the angle of incidence.  EMBED Origin50.Graph Figure  SEQ Figures \* MERGEFORMAT 1. a) Channelled 4He spectrum. The amorphised region is clearly seen. b) 1.5 MeV 4He spectrum. The simulations use SRIM2008 stopping. BAYESIAN INFERENCE Full details of the Bayesian inference (BI) method with Markov chain Monte Carlo (MCMC) integration as applied to stopping power determination is given in.4 The improvements reported in Ref. 10 were also used. We have previously reported a similar Bayesian approach to the determination of the error of the depth profiles extracted from IBA spectra11 for high resolution data12, RBS/ERD data13 and to extract scattering cross sections from bulk and thin film samples.14 We have also used these methods to analyse the ambiguity of ellipsometry data.15 Basically, the method consists in treating the stopping power function as a free parameter, and fitting the energy spectra. In our case, the a1-a8 parameters of the ZBL85 parameterisation16 are the free parameters, ensuring that the shape of the stopping curve is realistic. A large number of different simulations are made, all with a different stopping power curve, but all leading to simulations consistent with the data within the experimental uncertainties. Other parameters such as the energy calibration or the detector dead layer thickness (which leads to changes in the calculated yield17,18), are also varied during the procedure. In the end, a consistent estimate of the errors can be made taking the average and standard deviation of all stopping curves that led to a good fit. Note that the Au areal density was fixed during the BI/MCMC at the value determined from the 1.5 MeV 4He experiment. The corresponding 0.97% error was then added to the BI/MCMC error. RESULTS For the 4He data, we constructed a Markov chain with 60000 elements, that is, 60000 stopping power data sets in the energy range up to 3 MeV. Each of these data sets leads to RBS spectra that simultaneously fit the five experimental spectra well, i.e. within experimental errors. The final results are shown in Figure 2, where the BI/MCMC is given as the two curves, corresponding to the average plus minus one standard deviation.  EMBED Origin50.Graph Figure 2. Confidence limits ( 1s) obtained for the 4He in Si stopping power with BI/MCMC. SRIM20081 and KKKNS6 stopping are also shown. The results agree very well both with SRIM2008 and with KKKNS6 stopping values, which validates the present approach. Note that at low energies, below 500 keV, the deviation seen is within two standard deviations, so it is statistically not significant. The deviation might be due to the notorious difficulties in simulating the yield at low energies19, even when double scattering20 and pile-up21 were included in the simulations. For the 7Li data, we constructed a Markov chain with 15000 elements. The smaller length of the Markov chain is justified because 15 spectra (3 per beam energy, corresponding to the three detectors) were collected, leading to more information in the data. We show three of the spectra in Fig. 3, together with simulations using SRIM2008 stopping and the average value determined in this work. An improvement in the simulation is seen particularly at low energies. Note that the minimum energy probed is around 0.3 MeV, corresponding to the way out in the 1 MeV experiment.  EMBED Origin50.Graph Figure 3. Three of the 15 spectra collected with the 7Li beam. Simulations using SRIM2008 stopping and the average value found in this work are also shown. The vertical dashed lines indicate, for 1.5 and 2.5 MeV, where the a-Si layer begins. For 1 MeV, only the a-Si layer is probed, and the vertical dashed line indicates the ROI for the fit. DS+PUP indicate the calculated double scattering and pile-up. The final results are shown in Fig. 4, together with SRIM2008 and other experimental measurements.22-27 The results indicate a slightly lower maximum than given by SRIM2008, and slightly higher stopping at low energies, but always within three standard deviations. This shows that SRIM2008 is fundamentally correct.  EMBED Origin50.Graph Figure 4. Confidence limits ( 1s) obtained for the 7Li in Si stopping power with BI/MCMC. SRIM20081 and different experimental22-77 stopping values are also shown. SUMMARY We reported on a method to determine the stopping of ions in matter using bulk samples. We validated the method by determining the stopping of 4He in Si and comparing the results with the highly accurate current knowledge. We then applied to the determination of the stopping power of 7Li in Si in the 0.3-3 MeV range. Acknowledgments We would like to thank the International Atomic Energy Agency for support under the Research Contracts No. 14635 and 14580. References 1. J.F. 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Littmark, in      " 0 2 4 8 : < P R ` b d f l ¸ϥwwwhhi?hi?6H*]mHsHhi?hi?CJmHsHhi?hi?6CJ]mHsH!hi?hi?6CJH*]mHsHhF#haJhF#hF#>*aJhF#hi?>*aJ hF#>*aJ hF#aJhF#hi?H*aJhF#hF#aJhF#hi?aJhhi?hi?hi?0J!5aJ$#f @   -u[#gd'P #`gd= gd= hgdF#xgd= $1$^`a$gd= gdt*XX > @ R V => 2ɥɄɀsjdZjZjh4h4CJH* h4CJh= h= CJh= h= CJmH sH h= hF#hF#5mH sH hZ`hF#5mH sH h 5mH sH h4ZhCJaJ hOaJhF#hF#H*aJhF#hF#aJh h5hi?hmHsHhi?hi?]mHsHhF#]mHsHhi?hi?H*]mHsH XY,-turuv01\]p`cfh`b}h<|h8]aJ h<|h8 h8H* hh8h h hX Bh8H*h8 hX Bh8hh= mH sH h= haJh= h= CJH* h4CJh= h= CJmH sH h4h4CJH*h= h= CJ h CJ1  RVdhdhntv*:QTZ[\stuv}㼱㼥Ċ{ h 5;jh`UjxI0L h UVjh UhmH sH he_he_H*mH sH hLBh8mH sH h8mH sH h h'PhX Bh8H*h<|h8H* h<|h8h8 h8]aJh<|h8]aJ he_]aJ/}~"#56 ; Y Z \ !!!"ͽxxxxxxth*h{@h{@H*mH sH h{@H*mH sH he_he_H*mH sH h{@mH sH he_mH sH h*mH sH h8h85CJaJh8h85CJaJmH sH h mH sH hIh H*h hu5;mHnHu h 5;jh 5;U,#6] s#+$3$%''9)u+'-(-.%0&0.0m1}1`gd*gd#a7$a$gd`gd``gd_9`gd`gdR$`a$gd*$`a$gd8"""##+$2$3$;$<$j%m%q%r%%%%%%%%&>&@&f&h&&&&&&'''h(((󽹽󽱭{v{rjrfh_9h{@hyt?H*hyt? h6hRhH*hIhH*hOJQJ h5;jThUjL hUVhjhUh'PhRhD^h*H*h*5CJaJh*5CJaJmH sH hp-h*H*mH sH h*mH sH h*h{@h{@H*$(())))9)A)B)u+v++++++++(---....../@/B/h/j////0&0-0.00ﰬ}}ple h*h*h*h*5CJaJmH sH h#a7h#a7H* h#a7H*h#a7OJQJ h#a75;j Bh`Uj6J0L h#a7UVh#a7jh#a7Uh3h`H*hc5hH* h5;j7hUj J0L hUVjhU h`H*h`hh{@hH*'000K1L1m1}11222 2$2(28292<2=2>2C2K2N22222222222222333333"3(3)3+3f333ļݸ˱˪h9_h45aJmHsHh9_h9_mHsHh9_h4aJmHsH h3h4 h3h3h4h3h45 h4h3h3 hPh3 hxuh3 h4h4 h*hhh*h*H*aJh*h*aJ/}112K22+33j44i5566 7l77KTT6UUUVcVVVZWW Xgdgd4333354X4Y4\4^4a4j4m44444444444445W5X5[5\5]5a5i555555555źОВЮкЈ{mۮh9_h45aJmHsHhh4aJmHsHh4aJmHsHhh4hmHsHh4mHsHh9_mHsHh9_h45mHsHhh9_mHsHh9_h9_mHsHhh4mHsHh9_h4mHsHh9_h4aJmHsHh9_h9_aJmHsH&556 6 6 666)6t6v6}66666767<7Y7Z7]7c7777777777T%T1TCTITKTOTƺƯƤzvokoiakokovhIh46Uhyu hIh4h4hyuhyumHsHhyumHsHhyuh45mHsHhyuh4mHsHhyuh9_mHsHh9_h4mHsHh9_h45mHsHh9_h9_mHsHh9_h9_mHsHh9_h45mHsHh9_h4mHsHh9_h46mHsH&Stopping and Ranges of Ions in Solids Publisher, Pergamon, New York, 1985. 15. 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V"Arial--  V"Arial--  V"Arial-2  a) 2 MeV **?*3-  4"Arial- 2 4-  V"Arial-'2  He in Si - channelled7**3&*******- '--. V"Arial--  V"Arial--  V"Arial- 2 +c-Si&3- '--. V"Arial--  V"Arial--  V"Arial- 2  - '--. V"Arial--  V"Arial--  V"Arial-2  Channel7*****- '--. V"Arial--  V"Arial--  V"Arial- 2 A - '--. V"Arial--  V"Arial--  V"Arial- 2 ` - '--. V"Arial--  V"Arial--  V"Arial-2 jYield (counts)3++'+++'- '--. V"Arial--  V"Arial--  V"Arial- 2 a-Si*3- '--. V"Arial--  V"Arial--  V"Arial- 2 NAu3*- ' --<hi#OPp 67W---'Contents:r_1285403549 ac(@=%-%-Ole ObjInfo ECPYA 4.2769 817# ' ,: X2U0*S@ P??ndff0302_channelP  ?@@@@@@ @"@$@&@(@*@,@.@0@1@2@3@4@5@6@7@8@9@:@;@<@=@>@?@@@@@A@A@B@B@C@C@D@D@E@E@F@F@G@G@H@H@I@I@J@J@K@K@L@L@M@M@N@N@O@O@P@@P@P@P@Q@@Q@Q@Q@R@@R@R@R@S@@S@S@S@T@@T@T@T@U@@U@U@U@V@@V@V@V@W@@W@W@W@X@@X@X@X@Y@@Y@Y@Y@Z@@Z@Z@Z@[@@[@[@[@\@@\@\@\@]@@]@]@]@^@@^@^@^@_@@_@_@_@`@ `@@`@``@`@`@`@`@a@ a@@a@`a@a@a@a@a@b@ b@@b@`b@b@b@b@b@c@ c@@c@`c@c@c@c@c@d@ d@@d@`d@d@d@d@d@e@ e@@e@`e@e@e@e@e@f@ f@@f@`f@f@f@f@f@g@ g@@g@`g@g@g@g@g@h@ h@@h@`h@h@h@h@h@i@ i@@i@`i@i@i@i@i@j@ j@@j@`j@j@j@j@j@k@ k@@k@`k@k@k@k@k@l@ l@@l@`l@l@l@l@l@m@ m@@m@`m@m@m@m@m@n@ n@@n@`n@n@n@n@n@o@ o@@o@`o@o@o@o@o@p@p@ p@0p@@p@Pp@`p@pp@p@p@p@p@p@p@p@p@q@q@ q@0q@@q@Pq@`q@pq@q@q@q@q@q@q@q@q@r@r@ r@0r@@r@Pr@`r@pr@r@r@r@r@r@r@r@r@s@s@ s@0s@@s@Ps@`s@ps@s@s@s@s@s@s@s@s@t@t@ t@0t@@t@Pt@`t@pt@t@t@t@t@t@t@t@t@u@u@ u@0u@@u@Pu@`u@pu@u@u@u@u@u@u@u@u@v@v@ v@0v@@v@Pv@`v@pv@v@v@v@v@v@v@v@v@w@w@ w@0w@@w@Pw@`w@pw@w@w@w@w@w@w@w@w@x@x@ x@0x@@x@Px@`x@px@x@x@x@x@x@x@x@x@y@y@ y@0y@@y@Py@`y@py@y@y@y@y@y@y@y@y@z@z@ z@0z@@z@Pz@`z@pz@z@z@z@z@z@z@z@z@{@{@ {@0{@@{@P{@`{@p{@{@{@{@{@{@{@{@{@|@|@ |@0|@@|@P|@`|@p|@|@|@|@|@|@|@|@|@}@}@ }@0}@@}@P}@`}@p}@}@}@}@}@}@}@}@}@~@~@ ~@0~@@~@P~@`~@p~@~@~@~@~@~@~@~@~@@@ @0@@@P@`@p@@@@@@@@@@,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t  A`??ndff0302_dataP  p@@"@K@Ȉ@@@ @@@+@@t@@Y@@@#@@7@0@f@5@^@»@@@A@_@ڹ@@@Q@?@@@t@ @@׶@@y@@@!@@@ε@g@H@@@|@^@J@+@@W@ȳ@@@s@7@@@@@@̲@ò@i@ϲ@޲@ @@:@Q@j@S@@&@@@@ @@@ֱ@ @@ӱ@@@ϱ@@@@@!@!@ @?@|@^@o@r@O@9@@@N@v@@@@@@@@@@ڰ@w@@°@@I@:@@@Y@1@@J@`@@@6@V@@@@@e@|@@3@@@@|@@@@@@+@@:@E@w@د@"@@@į@@"@@@ʯ@@c@%@@@Ű@ @@@{@@}@x@@5@@@ް@@@˰@@@C@4@@@p@@=@@@@d@گ@@B@@@@<@@@Ȍ@@p{@v@Pt@o@@g@`f@b@_@a@a@Z@@_@@\@[@_@@]@]@@a@]@a@_@Z@a@@`@@_@`@@^@b@@]@`@ a@`b@ b@ c@a@ `@@b@`@`b@`@a@@`@@\@@^@``@]@^@@Y@ a@@^@[@X@Z@ `@]@\@[@[@]@]@[@@_@\@@_@@_@`@]@_@_@ b@@`@a@`@_@@_@_@Y@``@Z@ `@@`@^@b@Z@[@ `@@`@_@_@^@`@]@a@@^@`@_@@^@@a@_@`@@^@@`@`@b@`c@b@^@a@d@c@d@a@e@d@ c@b@b@@f@c@c@ b@ d@@d@d@ f@ h@ i@h@@i@ l@n@@s@ w@(@ȇ@@`@@ @@ @@@S@@@@s@B@R@t@p@x@w@a@@V@G@D@?@B@9@;@5@7@1@2@5@2@*@1@4@(@1@.@0@$@2@"@0@$@&@@&@ @"@@$@*@&@@ @@@@"@@&@"@@"@@@ @@@@@ @ @ @&@@"@@@"@@@@@@ @@@"@@@ @@@@@@@ @@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@?@@@@@@?@@@@?@@@?@@@@?@@,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t A`??ndff0302_fitP  !@@@l@M@@w@@j@@@@@@7@@@_@J@K@`@@@@p@@3333R@Y@L[@ @̌@Y@@gffffn@@@L@33333"@fffff@ffff'@33333@L@L@3333@.@gffffػ@̅@8@@ffff椺@ffff_@@33333۹@̜@_@%@@L@@fffffR@"@@Ƿ@fffff@fffffr@H@fffff!@L@ն@L@@n@M@33333/@@@׵@@@L@k@fffffR@L9@"@33333 @3333@43333޴@Lɴ@@@L@y@gfffff@S@A@/@4333@gffff @fffff@fffff@ڳ@ffffɳ@gffff@@@@33333@Lt@g@[@fffffP@ffffD@33338@gfff*@@@@33333߲@ʲ@3333@@ffff暲@L@@ffff|@t@l@fffffd@33333\@S@3333J@A@8@/@33333&@@@ @@@gfff@fffff@@ٱ@Lұ@33333ʱ@3333±@gffff@@@̥@@@3333@@@fffff@L@@@33333@z@u@m@f@_@X@R@gffffL@E@?@fffff9@2@L,@fffff%@@3333@33333@ @@L@3333@@ffff@@L@ܰ@Lְ@Lа@Lʰ@Lİ@33333@̷@@3333@@L@@ffff昰@@3333@@gfff恰@}@3333w@33333r@l@33333g@3333`@gfffY@ffffM@7@ffff @fffffr@E@_@@@fffff@@f@p= ׅ@{Gv@33333z@(\r@p= ׫k@p= 3e@Gz`@](lZ@Gz>U@/tQ@V-M@FhJ@QH@p= ׃G@x&1F@/$F@MbXYF@K7)F@}?5^E@~jE@`"۩E@xyE@1ZdE@$SE@/$E@V-E@CD@+D@!rhD@MbX9D@Zd;OD@MbXyD@Q[D@NbX94D@gffffD@L7A`C@}?5^9C@ +iB@J +A@V->@-G:@7A`5@'10@x)@<,Ԛ}#@ׁsF@ lV}n@,ݓ@W2@]m;@@v@_@@F%u@M@w#9@9#J@ h"lx@zG@B-@( @z,Ck @H.!} @ rh @D @K7A` @6 @{/L @o_Q @|Pk @?ܵ @cZB> @qr@sF@Cl@3ı.n#@ c@:M@ŏ1@r -@"~j@~jt@Tt$@l@jM@UR'@Qkw@{P@1%@8d@@TR'0@ho@v@|гY@HP@/n@Zڊ}@cZB@/$@Q|@y):@U0*@X5;N@W2ı@wOjM@2ı.n# @b4@o@Gz!@-'@L7A`-@E1@K73@Vm3@Gz'2@+N/@Dl(@ݵ|S"@Fx d@9v_@): @F_@@TN@@A`"?( 0?cZB?tV?UR'?Ac]K@@鷯@/$1@e;OK@p= דd@ ףp={@fffff@gffff@ @a@@r@@@@@w@@433335@հ@W@@(\vz@ ףp=c@\(L@vo6@-F'@ΪV,!@Ǻ@V/@ׁsF@@ Q@`Q@ @ @b=y@gs@ Q@s@`TR'`@䃞ͪ@ڊe@2w-!@-@Zd;@`vO@lV}n@߾3@Q@sF@n@@/n@9#J@ho@†W2@_@gfffff@ @|Pk@34@1Z @Biq @A @ @u @fc] @;Nё\~ @  @M @H.!} @?$ @g @ - @UX @aTR' @46@z@ $(~9@sF@@@ h"lxz@1*T@_vO@HPs@-C@l g@I}8g@<,T@"u@@W2@iq@ܵ|3@ZB>,@ph@b4@ yǩ@y):@L@fX7@x#@t@ZӼ@M O@I.!v@=yX5@XQ@St$@C@kw@&1@鷯@Bfj@C6@2U0*@Pn@|?5^@ yǩ@JY@_v@Q8@6[ @St$@47@p_@e`TR@Mb@1*T@ cZB>@x $(~ @@E? r?~jt?Af?1%?T?y):?x&1?X9v? ?9#J{?N@??@?@@@@@A@A@B@B@C@C@D@D@E@E@F@F@G@G@H@H@I@I@J@J@K@K@L@L@M@M@N@N@O@O@P@@P@P@P@Q@@Q@Q@Q@R@@R@R@R@S@@S@S@S@T@@T@T@T@U@@U@U@U@V@@V@V@V@W@@W@W@W@X@@X@X@X@Y@@Y@Y@Y@Z@@Z@Z@Z@[@@[@[@[@\@@\@\@\@]@@]@]@]@^@@^@^@^@_@@_@_@_@`@ `@@`@``@`@`@`@`@a@ a@@a@`a@a@a@a@a@b@ b@@b@`b@b@b@b@b@c@ c@@c@`c@c@c@c@c@d@ d@@d@`d@d@d@d@d@e@ e@@e@`e@e@e@e@e@f@ f@@f@`f@f@f@f@f@g@ g@@g@`g@g@g@g@g@h@ h@@h@`h@h@h@h@h@i@ i@@i@`i@i@i@i@i@j@ j@@j@`j@j@j@j@j@k@ k@@k@`k@k@k@k@k@l@ l@@l@`l@l@l@l@l@m@ m@@m@`m@m@m@m@m@n@ n@@n@`n@n@n@n@n@o@ o@@o@`o@o@o@o@o@p@p@ p@0p@@p@Pp@`p@pp@p@p@p@p@p@p@p@p@q@q@ q@0q@@q@Pq@`q@pq@q@q@q@q@q@q@q@q@r@r@ r@0r@@r@Pr@`r@pr@r@r@r@r@r@r@r@r@s@s@ s@0s@@s@Ps@`s@ps@s@s@s@s@s@s@s@s@t@t@ t@0t@@t@Pt@`t@pt@t@t@t@t@t@t@t@t@u@u@ u@0u@@u@Pu@`u@pu@u@u@u@u@u@u@u@u@v@v@ v@0v@@v@Pv@`v@pv@v@v@v@v@v@v@v@v@w@w@ w@0w@@w@Pw@`w@pw@w@w@w@w@w@w@w@w@x@x@ x@0x@@x@Px@`x@px@x@x@x@x@x@x@x@x@y@y@ y@0y@@y@Py@`y@py@y@y@y@y@y@y@y@y@z@z@ z@0z@@z@Pz@`z@pz@z@z@z@z@z@z@z@z@{@{@ {@0{@@{@P{@`{@p{@{@{@{@{@{@{@{@{@|@|@ |@0|@@|@P|@`|@p|@|@|@|@|@|@|@|@|@}@}@ }@0}@@}@P}@`}@p}@}@}@}@}@}@}@}@}@~@~@ ~@0~@@~@P~@`~@p~@~@~@~@~@~@~@~@~@@@ @0@@@P@`@p@@@@@@@@@@,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t  A`?? ndff0701_dataP  @?@$@1@l@@!@[@@ @^@@@`@%@@`@@@@@ @@@Q@ @ @"@@`@'@@@(@@E@z@@@@@@@@@V@@@@z@@@?@?@?J@N@ @@@@@@@@@@@@@@F@@@]@@`@@K@@Q@@@@@@@P@V@@d@;@@@<@@@@@@@@S@@@@@@+@o@@,@,@@@@@@@t@x@p@[@@B@@@D@@@@@@@@@@@@@p@@g@3@@+@@9@H@@@@ @@@@@@@@@@@_@@G@s@@@R@@K@@@@;@@@@u@@@@$@M@Ӽ@@@f@d@h@8@@@x@t@t@t@u@w@y@z@|@0~@@@8@Ѓ@؀@@@8@}@0~@y@ x@Pw@v@r@r@0p@i@ c@``@^@X@\@@Z@Y@@T@Q@@R@P@T@T@P@@W@@Q@T@R@T@S@T@T@X@T@S@V@T@@T@S@S@@R@R@S@@U@Q@P@R@@P@Q@R@R@@V@S@U@W@V@@[@`a@@c@d@`i@ h@ h@j@d@ l@k@ q@q@`r@t@|@@@@@ک@@5@)@@@@@`'@A!APAA@@@@@@@@@`@t@l@b@@e@e@`@^@ a@@Y@^@\@Y@@W@V@S@@T@T@P@S@@Q@P@L@I@K@@P@F@O@G@L@H@J@D@J@G@E@I@J@F@E@J@C@L@C@E@B@D@C@D@C@C@@@A@D@C@@@B@;@E@9@D@<@B@>@7@A@<@2@;@C@>@;@>@A@<@9@<@1@3@>@2@2@@@.@8@7@4@?@4@3@5@,@7@0@0@4@9@:@<@0@6@2@0@.@.@*@1@4@4@1@0@"@*@4@(@0@4@&@,@$@ @*@*@3@4@0@*@@"@(@"@3@$@ @(@*@$@,@ @@$@"@ @ @"@@@"@@ @@@@@@??@@@@@@@@@@@$@@@@@@@@@?@@@@@@@ @@@@@@@?@@@?@@@@@@@@?@@@@ @?@@@@@@@@@@@@@@@@?@@ @@@,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t A`?? ndff0701_fitP  @@pF@`m@m@2@@P @@@b@B@B@]@@ @(@@@ߓ@`@@@@@H@@@@n@@@f@@@`@@@b@@@w@0@@@Y@@j@@@@-@@@q@@@@w@)@@@@@P@ @@@N@@@@?@v@E@@@@@@_@4@ @@@@p@M@@+@ @@@@@@l@@O@3@@@@@@@@@|@@c@K@4@@ @@@@@@@@z@g@T@A@/@@ @@@@@@@@@@@@x@i@Z@@L@=@/@"@@@@@@@@@@@@@@@@@}@r@g@[@P@D@8@+@@@@@@@@R@$@@J@@ffffN@@fffff@gffff@@@Gz@ףp= G}@\(u@\(q@Qsn@)\k@Rj@Hzj@Hzi@Gz>i@(\h@Gz~h@Q h@Gzg@(\jg@= ףpg@Qf@Gzf@(\Rf@ףp= f@e@De@Gzd@Rac@Gza@Q^@QY@ bT@> ףp=O@ʡEG@X9vB@K>@`"y:@ rh8@i|?7@v:6@fffff5@ rh4@\(\4@Q3@ 23@(\2@S㥛2@(\1@~j0@l0@p= ף0@&1\/@`"y.@ ףp=-@ -@p= ףp,@kt+@xi+@?5^I +@On*@vZ*@t*@gffff)@V-)@x&1)@GzT)@V-)@w/(@-(@Mb(@uVN(@V-(@V-'@/$'@V-'@|?5^'@Zd{(@+N*@ҍ.@(\3@|?5^;@/C@MbXL@|?5S@\(\Y@Rq^@`@p= ;a@<`@ ףp=\@QV@~jP@KG@Gz>@@(\7@K7A 2@V-3@KWA@K7X@zGs@zG@a@Ѹ@@ @@@@@@pAPAAK@[@*@@ @@3333Ѳ@33333y@)\@{GJp@)_@^I T@t^Q@V O@xiL@Zd;/J@SCH@tF@xvE@~jtsD@5^I C@zGB@ClWB@K7A@PnSA@X9v@@%C{@@(\@@K7i?@J +>@43333>@0$u=@(\<@K7<@Zd;;@/$;@:@-:@K7A9@xI9@x8@ʡEs8@/$8@`"۹7@ʡES7@F6@Dl6@QX6@rh5@&15@w/]5@ʡ%5@{G4@A`"4@mR4@ 4@Zd;3@l3@h|?U3@Zd;3@M2@M2@Qk2@Q82@V-1@䥛 1@Cl1@Hzg1@Q%1@"0@/0@Cl0@~jts0@F80@l0@&1/@q= ףp/@/@{G.@Qk.@7A`.@i|?-@V-o-@2Z$-@,@Gz,@n@,@A`"+@K7A`+@d;OW+@y&1*@kt*@K7A`e*@B`"*@E)@V-r)@"~j<)@V-(@A`Т(@ffffff(@n (@Zd;'@Hz'@+7'@S&@&1&@(\O&@M"&@+%@Zd;ߏ%@Zd;OM%@x&1%@K7$@"~$@q= ף0$@?#@H#@]K]#@+#@cZB"@ o_"@e;O7"@sh|!@h!@t$^!@ r(!@D @HP @߾S @@Bi@ґ\C@ec@ @ F%u@x&1@ @ZӼ#@*ԉ@+η@H.@Pn@MbX@3@+7@0*U@q -@Bf@Ԛ@`vO@uq @j+@DJ @Zd; @,C@H}@!uq@ 0@y):@@p= #@ޓZ@|Pk@x $(~@Y8m@ݓZ@ yG@Mb@?_@ho@@u@0' @†Wʲ@:#J{@O@a@vq @cZB>@b=@x@Ciq @ @Έ @ݓ@TR'0@#J{/L@䥛 0@tV@_L@"uq@uV@/$@J{/L@[B>٬@gs@8m4@~jt@Q8@KY8E@7d@w#|@ cZB@@@q@@sK@oTA@F%u@TR'@p_@^Fx @lV}.@^LJ@37x@ y@tF@F%u@yX5;@Xр@jM@8m4@H.!@Bi^@ZӼ@2ı.@HP@鷯g@V/@鷯@cZB@L O@n{@d`T @Cl @_L @ё\Cz @t @Afg @- @@a+ @=yX @joT @镲 @,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t  Graph4{D(`DDocume,FrXXߦFBAߦFBAXX@${[0|3|SYSTEM|38|3385664992]}[98] 97="\\mars\R1" 95=1 94=600 96=15 - I@r@I@@x&1*@A@4_l "  S2? ף= ף=Pd2, o !ppM? B΍?H-?_Text4 > Ss - b) 1.5 MeV \+(4)He in Si - SRIM2008 o Py鿿{E>>X2  * o Py鿿{E>>X1  * o Z4*we@Q? AH >>XT > &d o  Z 4*we@ 5׀H9hBXB > &/d  Channel o #:m?7i6?(i>>3D ( Si:m?7i6?(i i GB33pv??m->Rbv?&>&- m?GĮ76Č ??DDD???EEF4bF! G EEEv??m->v?&>&- m?GĮ76Č ?$@@ o &I b 6gʶs@Q^Cy @H >>@YR > &d o #E ^ @'!Q^Cy @H >> D@YL > &d o =9  lfƿ3i:?H>>D@Text1 > &d  Yield (counts) o rRsz=>?C Bä?H >>Text2 > ]d Au o /Nȿ>>_202   A? 2 o /Nȿ>>_202  A? 2 o ffffff?::?>>_202   A? 2 o ffffff?::?>>_202  A? 2 o ffffff?::?>>_202  A? 2 o Fȿ>>_202  A? 2 o qq?ooĿ>> _202  A? 2  o qq?ooĿ>>_202  A? 2 o  1pȿ>>_202   A? 2 o  1pȿ>>_202  A? 2 o  1pȿ>>_202  A? 2 o  1pȿ>>_202  A? 2 o  1pȿ>> _202  A? 2  o  1pȿ>> _202  A? 2  o  1pȿ>>_202  A? 2 o  1pȿ>>_202   A? 2 o Qʿ::>> _202  A? 2  o 1΋Zyȿ^m>>_202   A? 2 o 1΋Zyȿ^m>>_202  A? 2 o 1΋Zyȿ^m>> _202  A? 2  o 1΋Zyȿ^m>>_202  A? 2 o 1΋Zyȿ^m>>_202  A? 2 o 1΋Zyȿ^m>>_202  A? 2 o WhzKvЉXͿ>> _202  A? 2  o WhzKvЉXͿ>>_202   A? 2 o WhzKvЉXͿ>>_202  A? 2 o WhzKvЉXͿ>>_202  A? 2 o WhzKvЉXͿ>> _202  A? 2  o t"ȿ~/nz>>_202   A? 2 o t"ȿ~/nz>>_202  A? 2 o t"ȿ~/nz>>_202  ? 2 o t"ȿ~/nz>>_202  A? 2 o t"ȿ~/nz>>_202  A? 2 o t"ȿ~/nz>> _202  A? 2  o P"My?;zF?>>_202  A? 2 o P"My?;zF?>>_202  A? 2 o P"My?;zF?>>_202  A? 2 o #dd(>>__LayerInfoStorage7 ( 2d(   A`#? 2??  A`#? 2?? - L@@L@j@I@    Q P   }Q P  @'  P  @_Q  P   ? P  P@_A P   _ P   _< P  +@Q&| P  @&Q I@ P   ? P  P@Q r@ P   P   P   P   P   P   P - I@y@I@@#d"@v@@@wZ̹l "  S2? ף= ף=Pd2, o ppM? B΍?H-?_Text4 > s - a) 2 MeV \+(4)He in Si - channelled o +A??HdhText3 > d  c-Si o Py鿿{E>>X2  * o Py鿿{E>>X1  * o ;n@l@n2@H >>XT > &d o n@l@ͨ5H9hBXB > &/d  Channel o #:m?7i6?(i>>3D ( Si:m?7i6?(i i GB33pv??m->Rbv?&>&- m?GĮ76Č ??DDD???EEF4bF! G EEEv??m->v?&>&- m?GĮ76Č ?$@@ o &Yz@Aau@H >>@YR > &d o E_.Aau@H >> D@YL > &d o O:.ĿgKb?H>>D@Text1 > &d  Yield (counts) o >I?HQ@?HdhText > d  a-Si o N G?۩*R?H >>Text2 > ]d Au o ffffff?::?>>_202   A? 2 o ffffff?::?>>_202  A? 2 o ffffff?::?>>_202  A? 2 o Fȿ>>_202  A? 2 o qq?ooĿ>> _202  A? 2  o qq?ooĿ>>_202  A? 2 o  1pȿ>>_202   A? 2 o  1pȿ>>_202  A? 2 o  1pȿ>>_202  A? 2 o  1pȿ>>_202  A? 2 o  1pȿ>> _202  A? 2  o  1pȿ>> _202  A? 2  o  1pȿ>>_202  A? 2 o  1pȿ>>_202   A? 2 o Qʿ::>> _202  A? 2  o 1΋Zyȿ^m>>_202   A? 2 o 1΋Zyȿ^m>>_202  A? 2 o 1΋Zyȿ^m>> _202  A? 2  o 1΋Zyȿ^m>>_202  A? 2 o 1΋Zyȿ^m>>_202  A? 2 o 1΋Zyȿ^m>>_202  A? 2 o WhzKvЉXͿ>> _202  A? 2  o WhzKvЉXͿ>>_202   A? 2 o WhzKvЉXͿ>>_202  A? 2 o WhzKvЉXͿ>>_202  A? 2 o WhzKvЉXͿ>> _202  A? 2  o t"ȿ~/nz>>_202   A? 2 o t"ȿ~/nz>>_202  A? 2 o t"ȿ~/nz>>_202  ? 2 o t"ȿ~/nz>>_202  A? 2 o t"ȿ~/nz>>_202  A? 2 o t"ȿ~/nz>> _202  A? 2  o P"My?;zF?>>_202  A? 2 o P"My?;zF?>>_202  A? 2 o P"My?;zF?>>_202  A? 2 o "w>>Line x #F1"g@#F1"g@.S.@~5~@   o #dd(>>__LayerInfoStorage7 ( 2d(   A`#? 2??  A`#? 2?? - X@Y@@Q@   UO P   IU P  @'j P  @_ P   ? P  P@_Uwv@ P   _i P   _ P  M@si& P  @&UI@ P   ? P  P@Uy@ P   P   P   P   P   P   P @ ResultsLog    6 FBAuFBA           %  (  Contents_1278233099 ac(@=%-%-Ole PRINT=l      !"#$%&'()*+,-./0123456789:;<=>?@ABCDEFGHIJKLMNOPQRSTUVWXYZ[\]^_`abcdefghijklmnopqrstuvwxyz{|}~CPYA 4.2625 #  ,X r P??0KKKNS_A } ?@@@@@@ @"@$@&@(@*@,@.@0@1@2@3@4@5@6@7@8@9@:@;@<@=@>@?@@@@@A@A@B@B@C@C@D@D@E@E@F@F@G@G@H@H@I@I@J@J@K@K@L@L@M@M@N@N@O@O@P@@P@P@P@Q@@Q@Q@Q@R@@R@R@R@S@@S@S@S@T@@T@T@T@U@@U@U@U@V@@V@V@V@W@@W@W@W@X@@X@X@X@Y@@Y@Y@Y@Z@@Z@Z@Z@[@@[@[@[@\@@\@\@\@]@@]@]@]@^@@^@^@^@_@@_@_@_@`@ `@@`@``@`@`@`@`@a@ a@@a@`a@a@a@a@a@b@ b@@b@`b@b@b@b@b@c@ c@@c@`c@c@c@c@c@d@ d@@d@`d@d@d@d@d@e@ e@@e@`e@e@e@e@e@f@ f@@f@`f@f@f@f@f@g@ g@@g@`g@g@g@g@g@h@ h@@h@`h@h@h@h@h@i@ i@@i@`i@i@i@i@i@j@ j@@j@`j@j@j@j@j@k@ k@@k@`k@k@k@k@k@l@ l@@l@`l@l@l@l@l@m@ m@@m@`m@m@m@m@m@n@ n@@n@`n@n@n@n@n@o@ o@@o@`o@o@o@o@o@p@p@ p@0p@@p@Pp@`p@pp@p@p@p@p@p@p@p@p@q@q@ q@0q@@q@Pq@`q@pq@q@q@q@q@q@q@q@q@r@r@ r@0r@@r@Pr@`r@pr@r@r@r@r@r@r@r@r@s@s@ s@0s@@s@Ps@`s@ps@s@s@s@s@s@s@s@s@t@t@ t@0t@@t@Pt@`t@pt@t@t@t@t@t@t@t@t@u@u@ u@0u@@u@Pu@`u@pu@u@u@u@u@u@u@u@u@v@v@ v@0v@@v@Pv@`v@pv@v@v@v@v@v@v@v@v@w@w@ w@0w@@w@Pw@`w@pw@w@w@w@w@w@w@w@w@x@x@ x@0x@@x@Px@`x@px@x@x@x@x@x@x@x@x@y@y@ y@0y@@y@Py@`y@py@y@y@y@y@y@y@y@y@z@z@ z@0z@@z@Pz@`z@pz@z@z@z@z@z@z@z@z@{@{@ {@0{@@{@P{@`{@p{@{@{@{@{@{@{@{@{@|@|@ |@0|@@|@P|@`|@p|@|@|@|@|@|@|@|@|@}@}@ }@0}@@}@P}@`}@p}@}@}@}@}@}@}@}@}@~@~@ ~@0~@@~@P~@`~@p~@~@~@~@~@~@~@~@~@@@ @0@@@P@`@p@@@@@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȁ@Ѐ@؀@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȁ@Ё@؁@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȃ@Ђ@؂@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȃ@Ѓ@؃@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȅ@Є@؄@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȅ@Ѕ@؅@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȇ@І@؆@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȇ@Ї@؇@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȉ@Ј@؈@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȉ@Љ@؉@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȋ@Њ@؊@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȋ@Ћ@؋@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȍ@Ќ@،@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȍ@Ѝ@؍@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȏ@Ў@؎@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȏ@Џ@؏@@@@@@@@ @@@@@ @$@(@,@0@4@8@<@@@D@H@L@P@T@X@\@`@d@h@l@p@t@x@|@@@@@@@@@@@@@@@@@@Đ@Ȑ@̐@А@Ԑ@ؐ@ܐ@@@@@@@@@@@@ @@@@@ @$@(@,@0@4@8@<@@@D@H@L@P@T@X@\@`@d@h@l@p@t@x@|@@@@@@@@@@@@@@@@@@đ@ȑ@̑@Б@ԑ@ؑ@ܑ@@@@@@@@@@@@ @@@@@ @$@(@,@0@4@8@<@@@D@H@L@P@T@X@\@`@d@h@l@p@t@x@|@@@@@@@@@@@@@@@@@@Ē@Ȓ@̒@В@Ԓ@ؒ@ܒ@@@@@@@@@@@@ @@@@@ @$@(@,@0@4@8@<@@@D@H@L@P@T@X@\@`@d@h@l@p@t@x@|@@@@@@@@@@@@@@@@@@ē@ȓ@̓@Г@ԓ@ؓ@ܓ@@@@@@@@@@@@ @@@@@ @$@(@,@0@4@8@<@@@D@H@L@P@T@X@\@`@d@h@l@p@t@x@|@@@@@@@@@@@@@@@@@@Ĕ@Ȕ@̔@Д@Ԕ@ؔ@ܔ@@@@@@@@@@@@ @@@@@ @$@(@,@0@4@8@<@@@D@H@L@P@T@X@\@`@d@h@l@p@t@x@|@@@@@@@@@@@@@@@@@@ĕ@ȕ@̕@Е@ԕ@ؕ@ܕ@@@@@@@@@@@@ @@@@@ @$@(@,@0@4@8@<@@@D@H@L@P@T@X@\@`@d@h@l@p@t@x@|@@@@@@@@@@@@@@@@@@Ė@Ȗ@̖@Ж@Ԗ@ؖ@ܖ@@@@@@@@@@@@ @@@@@ @$@(@,@0@4@8@<@@@D@H@L@P@T@X@\@`@d@h@l@p@t@x@|@@@@@@@@@@@@@@@@@@ė@ȗ@̗@З@ԗ@ؗ@ܗ@@@@@@@@@@@@ @@@@@ @$@(@,@0@4@8@<@@@D@H@L@P@T@X@\@`@d@h@l@p@t@x@|@@@@@@@@@@@@@@@@@@Ę@Ș@̘@И@Ԙ@ؘ@ܘ@@@@@@@@@@@@ @@@@@ @$@(@,@0@4@8@<@@@D@H@L@P@T@X@\@`@d@h@l@p@t@x@|@@@@@@@@@@@@@@@@@@ę@ș@̙@Й@ԙ@ؙ@ܙ@@@@@@@@@@@@ @@@@@ @$@(@,@0@4@8@<@@@D@H@L@P@T@X@\@`@d@h@l@p@t@x@|@@@@@@@@@@@@@@@@@@Ě@Ț@̚@К@Ԛ@ؚ@ܚ@@@@@@@@@@@@ @@@@@ @$@(@,@0@4@8@<@@@D@H@L@P@T@X@\@`@d@h@l@p@t@x@|@@@@@@@@@@@@@@@@@@ě@ț@̛@Л@ԛ@؛@ܛ@@@@@@@@@@@@ @@@@@ @$@(@,@0@4@8@<@@@D@H@L@P@T@X@\@`@d@h@l@p@t@x@|@@@@@@@@@@@@@@@@@@Ĝ@Ȝ@̜@М@Ԝ@؜@ܜ@@@@@@@@@@@@ @@@@@ @$@(@,@0@4@8@<@@@D@H@L@P@T@X@\@`@d@h@l@p@t@x@|@@@@@@@@@@@@@@@@@@ĝ@ȝ@̝@Н@ԝ@؝@ܝ@@@@@@@@@@@@ @@@@@ @$@(@,@0@4@8@<@@@D@H@L@P@T@X@\@`@d@h@l@p@t@x@|@@@@@@@@@@@@@@@@@@Ğ@Ȟ@̞@О@Ԟ@؞@ܞ@@@@@@@@@@@@ @@@@@ @$@(@,@0@4@8@<@@@D@H@L@P@T@X@\@`@d@h@l@p@t@x@|@@@@@@@@@@@@@@@@@@ğ@ȟ@̟@П@ԟ@؟@ܟ@@@@@@@@@@@@@@ @ @@@@@@@@@@ @"@$@&@(@*@,@.@0@2@4@6@8@:@<@>@@@B@D@F@H@J@L@N@P@R@T@V@X@Z@\@^@`@b@d@f@h@j@l@n@p@r@t@v@x@z@|@~@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@ @Ġ@Ơ@Ƞ@ʠ@̠@Π@Р@Ҡ@Ԡ@֠@ؠ@ڠ@ܠ@ޠ@@@@@@@@@@@@@@@@@@@@@@ @ @@@@@@@@@@ @"@$@&@(@*@,@.@0@2@4@6@8@:@<@>@@@B@D@F@H@J@L@N@P@R@T@V@X@Z@\@^@`@b@d@f@h@j@l@n@p@r@t@v@x@z@|@~@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@¡@ġ@ơ@ȡ@ʡ@̡@Ρ@С@ҡ@ԡ@֡@ء@ڡ@ܡ@ޡ@@@@@@@@@@@@@@@@@@@@@@ @ @@@@@@@@@@ @"@$@&@(@*@,@.@0@2@4@6@8@:@<@>@@@B@D@F@H@J@L@N@P@R@T@V@X@Z@\@^@`@b@d@f@h@j@l@n@p@r@t@v@x@z@|@~@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@¢@Ģ@Ƣ@Ȣ@ʢ@̢@΢@Т@Ң@Ԣ@֢@آ@ڢ@ܢ@ޢ@@@@@@@@@@@@@@@@@@@@@@ @ @@@@@@@@@@ @"@$@&@(@*@,@.@0@2@4@6@8@:@<@>@@@B@D@F@H@J@L@N@P@R@T@V@X@Z@\@^@`@b@d@f@h@j@l@n@p@r@t@v@x@z@|@~@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@£@ģ@ƣ@ȣ@ʣ@̣@Σ@У@ң@ԣ@֣@أ@ڣ@ܣ@ޣ@@@@@@@@@@@@@@@@@@@@@@ @ @@@@@@@@@@ @"@$@&@(@*@,@.@0@2@4@6@8@:@<@>@@@B@D@F@H@J@L@N@P@R@T@V@X@Z@\@^@`@b@d@f@h@j@l@n@p@r@t@v@x@z@|@~@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@¤@Ĥ@Ƥ@Ȥ@ʤ@̤@Τ@Ф@Ҥ@Ԥ@֤@ؤ@ڤ@ܤ@ޤ@@@@@@@@@@@@@@@@@@@@@@ @ @@@@@@@@@@ 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N@XN@\='oN@`5!N@&kԃN@5N@A&9N@m|N@%ǝzN@HPxN@.vN@yܝsN@JhqN@LoN@7OulN@_{fIjN@}:3hN@VFeN@dXcN@ZKaN@3P^N@ B\N@jeZN@jtXN@jUN@lC8SN@!A 3QN@vۅNN@F%uLN@MJN@XOHN@D EN@8gDiCN@ӼAN@C9>N@r]kM@ ^hM@PLۿfM@:ǀdM@ BbM@3`M@r.]M@&†[M@pӟHYM@P6 WM@ TM@ RM@JRPM@ʉvNM@2YKM@oꐛIM@I_GM@0"EM@vۅBM@8d@M@On>M@}:3M@4)M@NM@M@([M@#-#M@uM@mM@a| M@ ҌE M@ M@tM@1M@5FjM@9m4M@`iL@ϠgL@~W[eL@s,&6cL@iUMaL@V`^L@kC\L@t:EL@ĬCL@n@L@v>L@F_A K@TK@ꐛK@e6K@;%K@gK@CO}K@x@eK@++MK@Xni5K@K@9K@K@2YK@|K@+0duK@˹WK@K@Sy;iK@^TK@h|?K@sFZ*K@UeK@;fK@rhK@ILK@?K@LۿK@3hK@DK@9zK@ hK@c('UK@ё\CK@ctv2K@oB!K@MbK@˾+K@ǀK@ީK@3ΧK@oK@9dK@aTR'K@E>K@5UK@sK@eK@pWK@UHIK@`MdK@BsFbK@F?`K@!<8^K@@"2\K@ʾ+ZK@&XK@dF VK@cTK@ʉvRK@MbPK@ NK@2=aLK@RJK@S:XGK@ EK@"CK@YAK@+'IJ@ m9J@.9J@ /J@>xJ@sczJ@̗`J@lxz,J@9J@9@0GJ@oTJ@V}bJ@apJ@J@(yuJ@28J^J@J@@ٔ+J@j̱J@ۯJ@:ǀJ@x J@öE J@JJ@|a2U0J@!AJ@|SJ@1%eJ@?xJ@㪲J@%ǝJ@{J@BxqĖJ@DؔJ@J@ >J@Ih˹J@)J@SW>J@ySJ@8gDiJ@6~J@x@ٔJ@J@J@D4}J@-{J@%zJ@gyxJ@o%;6vJ@1PNtJ@fffffrJ@#pJ@_2nJ@"^FlJ@†WjJ@0hJ@fJ@0*eJ@m2cJ@>$@MaJ@g_J@(XQ]J@խ[J@}?5^YJ@]wbWJ@=IfUJ@@߾TJ@ʾ+RJ@ղHPJ@eNJ@mQfLJ@B!JJ@ HJ@ YFJ@jDJ@vCJ@9AJ@,eX?J@x=J@ ;J@d9J@2Y7J@s5J@4J@%:2J@*g\0J@CO}.J@],J@&ǝ*J@0(J@Pp'J@)%J@rPL#J@]o!J@ J@=;kJ@&J@k)J@=$J@.lIJ@~nJ@J@rwJ@?J@X J@%̴+ J@4R J@ yJ@ϠJ@d]KJ@DnJ@#J@'@I@N֨hI@ySI@KI@tI@x I@z6I@o l`I@k`I@D I@d*I@/ I@e6I@uaI@ۅ:I@MI@[_$I@,I@!'>I@:}kI@vöEI@I@N ^I@ h"I@<1PI@#I@խI@7I@4 I@K;I@<;kI@K=I@):I@gaO;I@d,I@ʦ\]I@72I@nI@{I@St$I@EVI@[Z I@/nI@ǀI@i>"I@?RDUI@C5vI@F|'fI@mI@(A&I@jjZI@oŏI@oşI@2I@j@+0I@fffffI@b֋I@_FҖI@b I@~@I@LqUwI@9dI@ؙBI@2w-!I@SWI@6ُI@V`ȆI@:I@Ah:I@gsI@$ I@|}I@N(D!|I@x=\zI@ǘxI@vI@x uI@:HsI@odqI@6oI@gaO;mI@g\8lI@ F%ujI@i5$hI@P6 fI@Z {,eI@@jcI@gaI@_I@|DL$^I@b\I@ ZI@FXI@%1 WI@Ù_UI@+~SI@R8QI@ PI@Ws`NI@T7LI@VCJI@w#II@OXeGI@KEI@$CI@C+BI@cbqm@I@ >I@ x#H@xE𿕬H@{1H@~8gDH@ȵbH@w( H@\tYLH@*H@~oӟH@CVH@H@H@\wbH@#H@9]H@= ףpH@SW>˓H@ %H@:ǀH@B ܎H@K7H@sᒋH@H@΍ KH@GH@"TH@x]`H@H@cH@ 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6F r s 6x 6 6 6   6 6 6 6   6 6% 6- Y Z 6b 6n 6z   6 6 6 6   6 6 6 6 @ A 6L 6X 6a   6 6 6   6 6 6 6 ' ( 6* 66 6B 6H t u 6 6 6   6 6 6   6 6 6, 6/ [ \ 6^ 6j 6v 6|   6 6 6   6 6 6BC6H6T6`6c6666666)*626>6Jvw6{666666666(61]^6e6r6~66666666DE6O6\6e6666666+,6-696F6Lxy66666666#6063_`6a6m6z666666 6FG6K6W6d6g6666666-.656A6M6Nz{6666666666+65ab6i6u66666666 66HI6S6_6i66666666/0606=6I6P|}666666666'6367cd6d6q6}66666666JK6N6Z6g6k666666612686D6Q6R~666666666"6.69ef6l6x6666666 66$PQ6V6b6o6q6666666 786@6L6X666666666*666?kl6t666666  6 6 6 6& R S 6^ 6j 6s   6 6 6   6 6 6 !6 !9!:!6;!6H!6T!6Z!!!6!6!6!% ( % (   " !_:=[ & %  '% YY6^6d6i%6o+6u16w3YZ6]6a6e6h6l6o66666 66=>6>6D6I6O6U6[6^66&" WMFC 66666666666$%6)6/656:6@6Eqr6t6z66666666 6'6.Z[6c6m6w6{+,6,61676=6B6H6Lxy6|6666666666666 66$6.Z[6a6n6z6{666xLK626+66 e d6D6""6'61V~V}6X{6dk6p]54616+6(6(34656?6K6 P-|.}656B6H``6hnn6r7ycyd6~66 6JK6X6k666"#6,686C% ( % (   " !_U:"3C=%[1 &% % +R3eF+U+h>+XBkU+[In\+^Hq[+aQtd+dYwl+gmz+jj}}+mh{+pq+sv+vt+y+|++++++++++++++++++++++++++++++++++++++++++  +++++ + +  +#+&+)!+ ,+/*+ 2+"5#+%8'+(;'++>(+.A*+1D(+4G2+7#J6+:M.+= P3+@"S5+CV/+E#X6+H'[:+K&^9+N1aD+Q-d@+T&g9+W)j<+Z1mD+]0pC+`+s>+c6vI+f1yD+i/|B+l2E+o4G+r5H+u2E+x;N+{2E+~2E+:M+:M+>Q+5H+>Q+;N+;N+?R+>Q+>Q+AT+DW+=P+?R+DW+CV+I\+K^+L_+I\+L_+L_+DW+Uh+Qd+GZ+Na+I\+J]+Uh+H[+K^+Ob+Pc+Wj+Sf+Wj+L_+Wj+Uh+Y l+Xk+Tg+Uh+_r+\o+ [n+ Xk+X"k+W%j+[(n+Z+m+Y.l+\1o+!Y4l+$]7p+'T:g+*X=k+-V@i+0ZCm+3YFl+6\Io+9aLt+<^Oq+?_Rr+BdUw+EVXi+H][p+Kd^w+N\ao+Q^dq+T`gs+Wbju+Zamt+]apt+`fsy+chv{+e]xp+hb{u+ka~t+nm+q`s+tat+wbu+z^q+}k~+cv+l+i|+cv+i|+m+k~+dw+l+k~+bu+l+m+j}+k~+l+h{+p+m+cv+p+n+i|+u+u+k~+l+k~+i|+u+r+p+u+s+p+l+q+t+&" WMFC cy+u+r +p +|+v+v+t+ y+ |+|"+%+y(+v++|.+1+!4+#6+&9+)<+,?+/B+2E+5H+8K+;N+>Q+AT+DW+GZ+J]+M`+Pc+Sf+Vi+Yl+\o+_r+bu+ex+h{+k~+n +q +t +w!+z  +}#+#+#+$+%+%+'+&+'+'+(+(+'+(+(+(+(+)+)+$+"+"+#+ +   + ) +! 4+-@+8K+DW+Ob+[n+fy+r +}+++++++i|+=P++++@S+&'+1+*=+5H+AT+L_+Xk+cv+o+z+++++++++++ ++#+.+':+2E+>Q!+I\.+Ufhy+`s+l +w*=+Vi+++++++++ + !+$+  &++'+$7(+/B)+:M)% ( %  " !_U:"3C=%[1 & %  '% \W_9!u\_behkn q!t"w#z$}%6<BHMSX]bglquy~  #&),/258;>ADGJM O R UX[^adgjmpsvy |!#$%'()*+,-/0123456789:;<=>?@AABCDEFGHHIJKLLMNOP PQRSTTUV"V%W(X+Y.Y1Z4[7[:\=]@]C^F_I_L`OaRaUbXc[c^daddegfjfmgogrhuixi{j~jkkllmmnoopppqqrrssttuuvvvwwxxyyzzz{{||}}}~~  "%(+-0369<?BEHKNQTWZ]`cfi l orux{~     ! !!!!! !!  + 7 B NYep| pB 8(4?KVbmy%1<H S_!jhv1d  ".9 D % ( % (   " !_U:"3C=%[1 & %  '% HH6A69626,6(*+6-63696 @6G6K!w!x6$~6'6*6-6.CC6C6F6I6L6O6R6U6X6[6666666 6 6 6 6 6 666666666666!"6"6%6(6+6.6164676:6=6@6Bno6o6r6u6x6{6~666666666666666666 6 6 6666666!6$6'6)UV6W6Z6]6`6c6f 6i 6l 6n 6q 6t 6v   6 6 6 6 6 6 6 6 6 6 6 6   6 6 6 6 6 6 6 6 6  6  6 6 < = 6> 6A 6D 6G 6J 6M 6P 6S 6V 6&" WMFC CY 6\ 6]   6 6 6 6 6 6 6 6 6 6 6 6 !!6!6!6!6!"!#!6*!66!6A!6C!o!p!6{!6!6!!!6!6!6!6! ! !6!6!6'!6*!V!W!6a!6l!6w!!!6!6!6!6!!!6!6!6 !6!=!>!6G!6R!6^!!!6!6!6!6!!!6!6!6!6!$!%!6-!68!6C!6E!q!r!6}!6!6!!!6!6!6!6! ! !6 !6 !6) !6, !X !Y !6c !6n !6y ! ! !6 !6 !6 !6 ! ! !6 !6 !6 !6 !? !@ !6I !6T !6` ! ! !6 !6 !6 !6 ! ! !6 !6 !6 !6 !& !' !6/ !6: !6F !6G !s !t !6t !6 !6 !6 ! ! !6 !6 !6 !6 ! ! !6 !6 !6+ !6. !Z ![ !6e !6p !6{ ! ! !6 !6 !6 !6 ! ! !6 !6 !6 !6 !A !B !6K !6V !6b ! ! !6 !6 !6 !6 ! ! !6 !6 !6 !6 !(!)!61!6<!6H!6I!u!v!6v!6!6!6!!!6!6!6!6!!!6!6"!6-!60!\!]!6g!6r!6}!!!6!6!6!6!!!6!6!6!6!C!D!6M!6X!6d!!!6!6!6!6!!!6!6!% ( % (   " !_U:"3C=%[1 & %  '% \J\J6_P6aV6e]6gc6ji6kj6666666666666666666666  6 6 6" 6%6(6+6.6164676:6;g*h*6i+6l,6o-6r.6u/6x06{16~162636464AA6A6B6C6D6E6E6F6G6H6H6I6ISS6T6T6 U6 V6V6W6W6X6Y6Y6!Z6"ZNbOb6Qc6Tc6Wd6Zd6]e6`f6cf6fg6ig6lh6nh6ohoo6o6p6p6q6q6r6r6r6s6s6tyy6z6z6z6{6{6|6|6|6}6}6 }3465686;6>6B6CTT6W6Z6]6_6b6c666666666666!!6!6!6!6!# $ 6* 66 6A 6D pq6{66 666uIH6B6(6  6ba6A./636>6J6Mvw6x666666666$6/VW6^ 6c9jejf6jg6ovv6v6{6 LM6c6m66&" WMFC #66666!6-60% ( % (   "  RpE"Arial#(X#WD~`A~YA~5C~h4## C~c4#(X4#c0#lD~h4###sh4#s4#<#.#&#7|7|&#||ڙ7w #xt#x4#Dۢ"κw(xdv%  T`  `A`A LT260"""% ( "   !RpE"Arial%!,#w& #& #&p|m|Om| >&`w&# #p|m|Z|m| @ڙ7w #xt#x4#pݢ"κw(xdv%  T`  `A`A LT280"""% ( "   !RpE"Arial%!,#w& #& #&p|m|Om| @&`w&# #p|m|Z|m| Bڙ7w #xt#x4#ߢ"κw(xdv%  T` ) `A`A LT300"""% ( "    % (   RpE"Arial|m|#||* #|hǘ#Q|H&m|i pǘpǘ<b=!|@#[(wT#'w x#<###&#7|7|&#||!|dv% Tl=`A`Alu LdLi 1.5 MeV, """3")%  (  RpESymbol#|hǘ\#Q|H&m|i pǘpǘ !|1## w%!, w%!, w%!, w%!, w%!,# 0w%!,-E8&&T#7||&#||M1#[(w A!|dv% TT=`A`AuLPa"%  (  Rp)"Arial#|hǘ#Q|H&m|i pǘpǘ1## w%!, w%!, w%!, w%!, w%!, w%!,# 0w%!,-D8& &#7||&D#||M14#[(w C!|dv% Tll `A`ALXscatt %  (  RpE"Arial#|hǘ#Q|H&m|i pǘpǘ# w%!, w%!, w%!, w%!, w%!, w%!, w%!,# 0w%!,-)!&&#7||&#||M1#[(w8E!|dv% Tl!=`A`A!uLX=150$"""%  ( " % % !    RpE"Arial2|||w`?A~\1##潀|h  !|1##h?00#*2Xuj&#7||& #||M1#[(wG!|dv% %  (  RpE"Arial#|hǘ#Q|H&m|i pǘpǘ?A~\1##潀|h  !|1##h w%!,L# 0w%!,-E8&&#7||&#||M1#[(wLI!|dv% %  (  RpE"Arial#|hǘ@#Q|H&m|i pǘpǘ##潀|h  !|1##h w%!, w%!,# 0w%!,-E8&&8#7||&t#||M1d#[(wJ!|dv% TTf`A`ALP %  ( " % % !    RpE"Arial2|||w`?A~\1##潀|  0w !|1## ?0 0#*2|# &#7||& #||M1#[(wHM!|dv% %  (  RpE"Arial#|hǘ#Q|H&m|i pǘpǘ?A~\1##潀|  0w !|1## w%!,L# 0w%!,-E8&&#7||&#||M1#[(wN!|dv% %  (  RpE"Arial#|hǘ@#Q|H&m|i pǘpǘ##潀|  0w !|1## w%!, w%!,# 0w%!,-E8&&8#7||&t#||M1d#[(wP!|dv% TT?`A`AwLP %  ( " % % !    RpE"ArialArialw`?A~\1##潀|  0w !|1## ?0 0#*2|# &#7||& #||M1#[(wR!|dv% %  (  RpE"Arial#Arial#Q|H&m|i pǘpǘ?A~\1##潀|  0w !|1## w%!,L#D 0w%!,H9& &#7||&#||M1#[(wT!|dv% %  (  RpE"Arial#Arial#Q|H&m|i pǘpǘ##潀|  0w !|1## w%!, w%!,#D 0w%!,H9& &8#7||&t#||M1d#[(wHV!|dv% TTos`A`ALP %  ( " % % !    RpE"ArialArialw`?A~\1##潀|  0w !|1##?0 0#*2|# &#7||& #||M1#[(wX!|dv% %  (  RpE"Arial#Arial#Q|H&m|i pǘpǘ?A~\1##潀|  0w !|1## w%!,L#D 0w%!,H9& &#7||&#||M1#[(wDZ!|dv% %  (  RpE"Arial#Arial#Q|H&m|i pǘpǘ##潀|  0w !|1## w%!, w%!,#D 0w%!,H9& &8#7||&t#||M1d#[(w[!|dv% TT"li}`A`A[}LP %  ( " % % !    RpE"ArialArialw`?A~\1##潀|X  0w !|1##X?0 0#*2|# &#7||& #||M1#[(w@^!|dv% %  (  RpE"Aria&" WMFC cl#Arial#Q|H&m|i pǘpǘ?A~\1##潀|X  0w !|1##X w%!,L#D 0w%!,H9& &#7||&#||M1#[(w_!|dv% %  (  RpE"Arial#Arial#Q|H&m|i pǘpǘ##潀|X  0w !|1##X w%!, w%!,#D 0w%!,H9& &8#7||&t#||M1d#[(wa!|dv% TD`A`A}LhYield (counts))"""""%  ( " % % !    RpE"Arial2|||w`?A~\1##潀|8'  0w !|1##8'?0 0#*2|# &#7||& #||M1#[(w4d!|dv% %  (  RpE"Arial#|hǘ#Q|H&m|i pǘpǘ?A~\1##潀|8'  0w !|1##8' w%!,L# 0w%!,-E8&&#7||&#||M1#[(we!|dv% %  (  RpE"Arial#|hǘ@#Q|H&m|i pǘpǘ##潀|8'  0w !|1##8' w%!, w%!,# 0w%!,-E8&&8#7||&t#||M1d#[(wg!|dv% Tdf2`A`Af&LTa-Si")%  ( " % % !    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E"Arial--  E"Arial--  E"Arial-2 DS+PUP-)$)-)- ' --bbbbbHbIbibbbb---'ObjInfoContentsK}_1278233142ac(@=%-+%-Ole       !"#$%&'()*+,-./0123456789:;<=>?@ABCDEFGHIJKLMNOPQRSTUVWXYZ[\]^_`abcdefghijklmnopqrstuvwxyz{|}~      !"#$%&'()*+,-./0123456789:;<=>?@ABCDEFGHIJKLMNOPQRSTUVWXYZ[\]^_`abcdefghijklmnopqrstuvwxyz{|}~r CPYA 4.2769 817# ' XtFX2U0*S@ P??ndff0501_channelP ?@@@@@@ @"@$@&@(@*@,@.@0@1@2@3@4@5@6@7@8@9@:@;@<@=@>@?@@@@@A@A@B@B@C@C@D@D@E@E@F@F@G@G@H@H@I@I@J@J@K@K@L@L@M@M@N@N@O@O@P@@P@P@P@Q@@Q@Q@Q@R@@R@R@R@S@@S@S@S@T@@T@T@T@U@@U@U@U@V@@V@V@V@W@@W@W@W@X@@X@X@X@Y@@Y@Y@Y@Z@@Z@Z@Z@[@@[@[@[@\@@\@\@\@]@@]@]@]@^@@^@^@^@_@@_@_@_@`@ `@@`@``@`@`@`@`@a@ a@@a@`a@a@a@a@a@b@ b@@b@`b@b@b@b@b@c@ c@@c@`c@c@c@c@c@d@ d@@d@`d@d@d@d@d@e@ e@@e@`e@e@e@e@e@f@ f@@f@`f@f@f@f@f@g@ g@@g@`g@g@g@g@g@h@ h@@h@`h@h@h@h@h@i@ i@@i@`i@i@i@i@i@j@ j@@j@`j@j@j@j@j@k@ k@@k@`k@k@k@k@k@l@ l@@l@`l@l@l@l@l@m@ m@@m@`m@m@m@m@m@n@ n@@n@`n@n@n@n@n@o@ o@@o@`o@o@o@o@o@p@p@ p@0p@@p@Pp@`p@pp@p@p@p@p@p@p@p@p@q@q@ q@0q@@q@Pq@`q@pq@q@q@q@q@q@q@q@q@r@r@ r@0r@@r@Pr@`r@pr@r@r@r@r@r@r@r@r@s@s@ s@0s@@s@Ps@`s@ps@s@s@s@s@s@s@s@s@t@t@ t@0t@@t@Pt@`t@pt@t@t@t@t@t@t@t@t@u@u@ u@0u@@u@Pu@`u@pu@u@u@u@u@u@u@u@u@v@v@ v@0v@@v@Pv@`v@pv@v@v@v@v@v@v@v@v@w@w@ w@0w@@w@Pw@`w@pw@w@w@w@w@w@w@w@w@x@x@ x@0x@@x@Px@`x@px@x@x@x@x@x@x@x@x@y@y@ y@0y@@y@Py@`y@py@y@y@y@y@y@y@y@y@z@z@ z@0z@@z@Pz@`z@pz@z@z@z@z@z@z@z@z@{@{@ {@0{@@{@P{@`{@p{@{@{@{@{@{@{@{@{@|@|@ |@0|@@|@P|@`|@p|@|@|@|@|@|@|@|@|@}@}@ }@0}@@}@P}@`}@p}@}@}@}@}@}@}@}@}@~@~@ ~@0~@@~@P~@`~@p~@~@~@~@~@~@~@~@~@@@ @0@@@P@`@p@@@@@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȁ@Ѐ@؀@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȁ@Ё@؁@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȃ@Ђ@؂@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȃ@Ѓ@؃@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȅ@Є@؄@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȅ@Ѕ@؅@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȇ@І@؆@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȇ@Ї@؇@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȉ@Ј@؈@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȉ@Љ@؉@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȋ@Њ@؊@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȋ@Ћ@؋@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȍ@Ќ@،@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȍ@Ѝ@؍@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȏ@Ў@؎@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȏ@Џ@؏@@@@@@,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t  A`??ndff0501_dataP J@X@ @@ȵ@@˴@(@س@@˳@E@@@@3@@B@@l@@@@@@f@^@@$@j@@@@@@f@@@@@ @ڧ@d@ʧ@@@@n@@@@@Τ@R@d@@>@@Σ@@@@t@ʡ@6@L@@Р@.@Н@@@@@4@Ԓ@@@@@@@@p{@v@r@ o@m@g@`d@@^@\@Z@X@V@X@T@T@Q@S@@Q@@R@R@L@J@M@P@S@L@G@G@J@C@L@I@E@G@K@I@8@H@K@G@F@L@I@A@@@H@C@A@F@G@B@G@@@A@C@D@@@A@C@B@?@A@:@A@J@3@@@F@D@A@D@C@E@>@B@F@@@E@>@:@?@B@F@E@A@E@B@D@:@B@;@D@B@B@B@D@@@B@C@D@B@A@A@D@B@D@C@F@B@E@I@H@C@B@F@B@L@G@D@C@I@P@P@O@Q@R@L@Q@Q@U@@V@U@@S@W@@[@Y@@Y@_@`@^@d@f@l@l@Pq@s@y@@@ @T@$@@@@֬@J@@@`@X@9@u@@<@#@@r@@@@@@ @@3@7@M@@@@@@@@@<@h@@@@@Pv@q@d@]@S@F@?@,@(@@@@@?@?@???@@@???@??@@???@?????@@??@?@@????@@????????????????????????@???????@?????????????@????????????????????w@,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t A`??ndff0501_fitP @N@9@@@@@F@L@5@@@@@@@@@YE@gfff&@@@c@33333@W@33333@3333;@33333@@N@@LϺ@L@l@43333ĸ@fffff"@@@`@յ@gffffO@ϴ@S@fffffݳ@gfffk@@3333@2@ұ@fffffv@@ɰ@w@fffff(@33333@&@̙@@@@̕@33333 @̮@33333A@ת@q@@̯@gffffS@@fffff@fffffO@@@43333a@33333@̦@43333@gffff?@@fffff@43333u@333333@fffff@@j@#@ף@gffff@33333*@â@33333O@ʡ@1@@̂@gffffН@gffff@@՗@fffff@j@333333@@p= ף@(\,@ףp= @zG)@̸y@ףp= u@Gz#q@(\k@Hzf@Hz_b@Q(^@ Y@nU@ʡR@gffffO@DlL@voI@RaG@ʡEE@+~D@MrC@MB@T㥛A@t&A@?5^I@@Zd?@tV>@=@t<@-<@w/;@~jt3:@ ףp=J9@A`b8@ףp= w7@V6@(\5@X9ȶ4@3@K7A`2@fffff2@)\(1@ףp= W0@p= #/@l-@ +Y,@U㥛 +@x&1*@bX9)@K7A (@ףp= W'@nʡ&@ˡE%@Vm%@!rh$@(\u$@+$@<#@ Q#@v"@ "@*:h"@kw#"@ho!@}?5^!@TR'p!@H=!@ ףp= !@Gr @8m @b2U0* @pTa @TN@ @߾3" @MSt @St$@k @?ܵ@%^@rh<@B)@H@/$@46@s@{P@,Ԛ@ 0@ݵ|@ -@J&@6;N@Fx $(@~j4@귯L@&1\@.!u@jM@7d@fc]@"~@.1 @(  @V0*0 @/'K @ ^)k @ @r @[Ӽ @^I!@>W[!@ y)"@s"@NbX9#@Ƌ$@Cl%@Dl)'@/$(@sh|*@^I ,@bX9H/@0@ClG2@ r3@S5@ʡEV6@q= ף7@K78@(\•9@MbP:@J +:@n ;@~j4;@Gz;@?5^I:@/$f:@q= ף9@|?5^z9@Q9@zG9@+N9@Yd;OM:@V-r<@Gz4@@^I C@"~:I@Q@ClX@(\ea@GzVi@Qpr@Qz@(\@Gz@x@43333@̴@ץ@33333@@ffffõ@43333a@d@̌W@@@[@@@I@@N@@k@@B@@@%@{@L@@(@f@@@ffff@ffff`@P@gffff@̬@33333@fffff֕@33333@GzJ@~@Qt@Qk@QMb@6^I W@Q5N@n:C@Mb8@K/@Zd;_%@48@@K@z6> @&†W@/$@1w-!@|a2U?:#J{/?ׁsF?$(~k? F%u?W/'?ZӼ?VF??l, PS?(rw?"^?Ic&?o|%?E>?&pn?{?ZӼ?$0{?E$]3?Ku?=~oӟ?dz?O#-#?ѮBO?h?RDU?/?J8?SW>?5U?b(?p:ǀ??M?a4? m9?Oup?jHc?=If?9?9d??Tt$??Kq?鷯?iƢd? o_?vOjM?W 3?R 1?C?vۅ:?=U?ߡ('?U+~?Q?m??Ŋ?VC?N ?KR%?'Nw( ?=,Ԛ?bJ$(?c('UH?G`?HPs?z6? r?Q?d*g?"?%1 ?F? ?RDU?o|%?kC?9 p??C9ѮBʿ?AH0[??}"O?&pn??J4?S.?bg ؽ?.ǽ?=~oӟ? vö?j+?_?{?u?%e˽?ս?0r.Ž? ?f?.9? <?70?fC? <.9?Bi??H0[w?6>W[?wR~R?x@ٔ+?ec]?˾+?ԕ? Y9?od? v?dF ?-s?^ D?hs?Ϡ?IZ?=>?Hh˹?\Z {,?iR ?Xni5$? m9?U+?#bJ$?~!<8?Ϡ?q?*:H?Gz?(>?B?:f?Y9}?W}W??0AC?W[Ɏ?x#?Ut^H0?R%R·?8@?s|?Dc6=v?[q?ԱJi?mrc?K(]?I +V?V%Q?"vSJ?Cw{D?g <@?"(w\:?k6?3k2?efb0?wY#Q.?,?c*?r:e)?L(?m'?{5v'?ě-'?4/&?BkQR&?&?,ݞ%?:f%?$xC%?0j$?W=$? 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ndfx0501_channel ) ?@@@@@@ @"@$@&@(@*@,@.@0@1@2@3@4@5@6@7@8@9@:@;@<@=@>@?@@@@@A@A@B@B@C@C@D@D@E@E@F@F@G@G@H@H@I@I@J@J@K@K@L@L@M@M@N@N@O@O@P@@P@P@P@Q@@Q@Q@Q@R@@R@R@R@S@@S@S@S@T@@T@T@T@U@@U@U@U@V@@V@V@V@W@@W@W@W@X@@X@X@X@Y@@Y@Y@Y@Z@@Z@Z@Z@[@@[@[@[@\@@\@\@\@]@@]@]@]@^@@^@^@^@_@@_@_@_@`@ `@@`@``@`@`@`@`@a@ a@@a@`a@a@a@a@a@b@ b@@b@`b@b@b@b@b@c@ c@@c@`c@c@c@c@c@d@ d@@d@`d@d@d@d@d@e@ e@@e@`e@e@e@e@e@f@ f@@f@`f@f@f@f@f@g@ g@@g@`g@g@g@g@g@h@ h@@h@`h@h@h@h@h@i@ i@@i@`i@i@i@i@i@j@ j@@j@`j@j@j@j@j@k@ k@@k@`k@k@k@k@k@l@ l@@l@`l@l@l@l@l@m@ m@@m@`m@m@m@m@m@n@ n@@n@`n@n@n@n@n@o@ o@@o@`o@o@o@o@o@p@p@ p@0p@@p@Pp@`p@pp@p@p@p@p@p@p@p@p@q@q@ q@0q@@q@Pq@`q@pq@q@q@q@q@q@q@q@q@r@r@ r@0r@@r@Pr@`r@pr@r@r@r@r@r@r@r@r@s@s@ s@0s@@s@Ps@`s@ps@s@s@s@s@s@s@s@s@t@t@ t@0t@@t@Pt@`t@pt@t@t@t@t@t@t@t@t@u@u@ u@0u@@u@Pu@`u@pu@u@u@u@u@u@u@u@u@v@v@ v@0v@@v@Pv@`v@pv@v@v@v@v@v@v@v@v@w@w@ w@0w@@w@Pw@`w@pw@w@w@w@w@w@w@w@w@x@x@ x@0x@@x@Px@`x@px@x@x@x@x@x@x@x@x@y@y@ y@0y@@y@Py@`y@py@y@y@y@y@y@y@y@y@z@z@ z@0z@@z@Pz@`z@pz@z@z@z@z@z@z@z@z@{@{@ {@0{@@{@P{@`{@p{@{@{@{@{@{@{@{@{@|@|@ |@0|@@|@P|@`|@p|@|@|@|@|@|@|@|@|@}@}@ }@0}@@}@P}@`}@p}@}@}@}@}@}@}@}@}@~@~@ ~@0~@@~@P~@`~@p~@~@~@~@~@~@~@~@~@@@ @0@@@P@`@p@@@@@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȁ@Ѐ@؀@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȁ@Ё@؁@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȃ@Ђ@؂@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȃ@Ѓ@؃@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȅ@Є@؄@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȅ@Ѕ@؅@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȇ@І@؆@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȇ@Ї@؇@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȉ@Ј@؈@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȉ@Љ@؉@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȋ@Њ@؊@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȋ@Ћ@؋@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȍ@Ќ@،@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȍ@Ѝ@؍@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȏ@Ў@؎@@@@@@@@@ @(@0@8@***************************************************************************sum,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t A!a?? 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}=b>9\>YB34V>RqDR>7EO>u,^hJ>(CRyH>F>ׄ@E>ncRnD>acMD>ON0-D>oC>Y0C>3PKơB>nI< C>9`B>>E?FB>Ȩe؊A> jnA>ћXi۳A>]es'A>=k@>n"j_A>M~@>=@>1U@>`?>KaP@>C9:?>8>>lE=>~hE=>)iNp<>Sl<>F+=>v 5.<> I<>Οr;>H:>luY:>9>UL](8>Q[U;8>i8>T58>,e/8>BE7>a|7>$#W7>l Ar)7>Dga(6>Uߝ[5>! i5>utxB5>M -I5>/95>LbN3>ĥ 14>404>i0+3>P-i3>n+3> _jQ2>x A2>rS2>"Yz2>WlF2>ӵ2>Ŋl2>\VCG2> =D2>;>2>q汸1>91>.7z1>l"\1>QXa0>p0>3I@p0> z0>w1>: 0>rh0>D^|{0>du0>NS`0>_/> 'E/>+ @O.>SW/>7%1/>T .>.>\ .>>iC9.>B>.>}fDw.>Cp ->I1->h'kk,>!->Dr ->JC->Y)DH->jP->->U/+>GY+>V *>V}*>Y0D+>@"*>,J*>+g8+>*>ѿ*> =*>-lX+>)*>BA˼\)>dv)>v&)>L!(>;'>;w,5)>mհ(>`;R(>q3)>n[>(>JeK(>Wa61)>VD}y'>n{'>9Ad'>evۙ'> &>Id&>Ŋm.C'>[Z&>LxbC'>muj&>wCk%>OC&&>)@-%>+ \B%>8v3-%>0x`$>_6_y$>=dſ,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t P??ndff0502_channelP ?@@@@@@ @"@$@&@(@*@,@.@0@1@2@3@4@5@6@7@8@9@:@;@<@=@>@?@@@@@A@A@B@B@C@C@D@D@E@E@F@F@G@G@H@H@I@I@J@J@K@K@L@L@M@M@N@N@O@O@P@@P@P@P@Q@@Q@Q@Q@R@@R@R@R@S@@S@S@S@T@@T@T@T@U@@U@U@U@V@@V@V@V@W@@W@W@W@X@@X@X@X@Y@@Y@Y@Y@Z@@Z@Z@Z@[@@[@[@[@\@@\@\@\@]@@]@]@]@^@@^@^@^@_@@_@_@_@`@ `@@`@``@`@`@`@`@a@ a@@a@`a@a@a@a@a@b@ b@@b@`b@b@b@b@b@c@ c@@c@`c@c@c@c@c@d@ d@@d@`d@d@d@d@d@e@ e@@e@`e@e@e@e@e@f@ f@@f@`f@f@f@f@f@g@ g@@g@`g@g@g@g@g@h@ h@@h@`h@h@h@h@h@i@ i@@i@`i@i@i@i@i@j@ j@@j@`j@j@j@j@j@k@ k@@k@`k@k@k@k@k@l@ l@@l@`l@l@l@l@l@m@ m@@m@`m@m@m@m@m@n@ n@@n@`n@n@n@n@n@o@ o@@o@`o@o@o@o@o@p@p@ p@0p@@p@Pp@`p@pp@p@p@p@p@p@p@p@p@q@q@ q@0q@@q@Pq@`q@pq@q@q@q@q@q@q@q@q@r@r@ r@0r@@r@Pr@`r@pr@r@r@r@r@r@r@r@r@s@s@ s@0s@@s@Ps@`s@ps@s@s@s@s@s@s@s@s@t@t@ t@0t@@t@Pt@`t@pt@t@t@t@t@t@t@t@t@u@u@ u@0u@@u@Pu@`u@pu@u@u@u@u@u@u@u@u@v@v@ v@0v@@v@Pv@`v@pv@v@v@v@v@v@v@v@v@w@w@ w@0w@@w@Pw@`w@pw@w@w@w@w@w@w@w@w@x@x@ x@0x@@x@Px@`x@px@x@x@x@x@x@x@x@x@y@y@ y@0y@@y@Py@`y@py@y@y@y@y@y@y@y@y@z@z@ z@0z@@z@Pz@`z@pz@z@z@z@z@z@z@z@z@{@{@ {@0{@@{@P{@`{@p{@{@{@{@{@{@{@{@{@|@|@ |@0|@@|@P|@`|@p|@|@|@|@|@|@|@|@|@}@}@ }@0}@@}@P}@`}@p}@}@}@}@}@}@}@}@}@~@~@ ~@0~@@~@P~@`~@p~@~@~@~@~@~@~@~@~@@@ @0@@@P@`@p@@@@@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȁ@Ѐ@؀@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȁ@Ё@؁@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȃ@Ђ@؂@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȃ@Ѓ@؃@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȅ@Є@؄@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȅ@Ѕ@؅@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȇ@І@؆@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȇ@Ї@؇@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȉ@Ј@؈@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȉ@Љ@؉@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȋ@Њ@؊@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȋ@Ћ@؋@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȍ@Ќ@،@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȍ@Ѝ@؍@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȏ@Ў@؎@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȏ@Џ@؏@@@@@@,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t  A`??ndff0502_dataP L@@/@@@ӽ@f@@m@6@@@@M@@_@@@3@`@9@@@մ@,@-@@[@@@@"@ȱ@̱@ڱ@ȱ@/@Ѱ@*@@ư@t@0@@@@Ү@ʮ@@@@@@t@ @(@P@@@@=@ @^@@@ܪ@@@©@@J@@@@@@@R@@@@P@@ @@@p@T@n@h@@n@p@ĥ@4@%@@ʥ@@7@@@:@@j@@\@@@7@6@.@X@`@0@ʢ@@΢@@n@~@^@H@V@ơ@@@@Ҡ@С@@@*@$@@(@@Л@@@d@_@l@H@@@؆@x@@|@x@u@r@o@l@d@c@`a@@[@X@X@N@P@@R@J@M@F@L@H@J@F@F@C@F@@@D@A@B@E@C@B@>@E@A@:@<@:@<@C@?@:@:@8@5@5@9@7@4@<@3@<@8@<@4@5@1@4@;@;@6@8@4@9@7@<@@@8@5@<@8@5@:@4@4@5@7@2@5@;@:@&@.@<@5@.@7@0@<@0@1@8@6@7@3@2@3@3@3@5@1@*@4@6@4@,@0@0@.@0@*@5@3@1@0@6@6@1@.@.@2@2@;@3@,@*@4@*@*@,@2@4@<@"@.@5@1@5@4@.@1@.@6@5@5@4@0@4@,@5@9@6@,@;@3@5@2@,@<@.@6@.@7@4@3@5@9@2@1@6@5@3@7@9@<@1@:@,@2@5@5@1@;@3@3@<@8@E@A@:@<@@@G@9@C@?@?@B@C@C@F@E@<@B@H@@@D@A@H@A@E@?@E@@@<@D@@@E@C@G@P@L@P@O@S@S@U@W@R@S@]@X@W@b@ b@e@e@h@m@pp@s@@x@p|@@@@0@G@@ʡ@@B@@@H@'@c@&@@@@@@@@[@@)@@Q@2@z@@)@@@@@$@:@G@@@@@Z@ԥ@6@@@@@}@u@@l@`a@Y@Q@A@A@3@2@@$@(@@(@@@"@@@ @@@@@@@@@@@@@@@@@@@@@@@@@@@@?@ @@@@?@@@????@@?@??@@?@?@@?@?@@??@@@@?@?@@@??@???@@?@@@?@????@@@??@?@??@@???@??@???????@??@????@@@@?@???@????@??????@?@?@????@????@@?@??????@@???@??@??@??@@?@?@?????????@?????@?@????????@????@@???????@?@@???@???@\@,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t A`??ndff0502_fitP ~@I@@w@@@@E@@@@h@@@@J@@@=@@@=@@@k@@I@@B@L@@N@@3333j@gffff@@L4@gfff樿@4333@gffff?@gfff攽@@fffffS@@*@@@̔@@̟@,@@33333R@@3333@(@̵@t@3333@̴@3333}@1@ffff@33333@\@L@33333ڲ@@_@$@33333@33333@|@LG@L@@gfff殰@~@gffffO@L!@@@:@@̔@C@fffff@33333@[@@Ǭ@fffff@:@@33333@fffffp@/@gffff@@v@gffff:@gffff@33333ǩ@@fffffX@"@@gffff@@U@gffff%@@Ƨ@̗@33333j@<@fffff@33333@@@d@;@fffff@33333@å@@w@33333R@,@gffff@@@33333@33333|@43333Z@8@@@ף@̸@@gffff{@gffff]@?@"@@33333@33333Ţ@33333@}@T@$@@@[@@@ @@@@43333M@x@@43333@33333w@l@ ףp=@{G@zG@(\Q@~@Hzy@(\Yu@ ףp=q@Hzl@Qg@c@H`@\([@9vV@ClCS@㥛 xP@lqL@rhH@A`E@MbXC@ZdA@J +6@@Cl>@l<@^I :@ rhM9@ R8@S㥛7@= ףp6@y&1L6@X95@xf5@Gz5@?5^I4@i|?U4@Cl4@Zd3@Et3@cX9(3@I +2@-2@Se2@Gz'2@bX91@bX91@x&q1@91@/$1@}?5^0@~jt0@S[0@K7!0@ rh/@v/]/@jt.@&1\.@/$-@p= ף0-@ʡ,@t+@Zd;O +@F8*@L)@uVN(@bX9H'@ˡE=&@x&%@~jt$@9#J"@7A`!@$J{/ @ŏ1w@cZB>@{P@B-@B@sA@JY8@H@A&@jMSt@Ps@鷯L@ݓ@PnC@E@gDio@S@u@ +Y@%䃞 @=U@{Pk@z): @W2ı@1%@]Fx@@u @Z< @z6> @p= ףp @N@ @.n @Sc @u% @ΪV @Qsג @HP @k @ho @5;N @|a2U0 @$C @(i @ cZ @|a2U0* @r @b+e @&S @X9@n{@ @Oe @* @ @Q @x@~:p @H} @lw# @Zd;O @QI& @J{/L& @6 ףp@fa@jt @Q@% @7>W[1 @MbX @ho @[ Aq @W2 @U0* @Ǻ @0* @I @L F%u @I + @7>W[ @q @q @w#9 @ qh @Q @W2 @ڊe @vq - @&䃞ͪ @g @9 @B@D6@r@NSt@48@}8g@>W[@?@jMSt@k @[ A@y): @D"@/ݤ$@~jt&@Zd;)@E+@(\.@V-0@/$F1@bX9H2@n*3@$3@ rhq4@l4@NbX94@X9v4@:v4@S#4@3@ƫ2@(\1@+η0@K/@.-@d;O*@ʡE(@ r&@d;O$@^I +#@.1!@m{ @K7A`%@}8g@*Ǻ@fffff&@]Fx@ZB>@A&@ŏ1w@Dl@x $(@@V- @R1"@Dio#@|?5^z&@K7*@;O0@K75@V->@jtE@K7O@ rW@Ra@Q[j@{GVs@> ףp{@)\@Q@&@ә@@6@fffffU@fffff@3333ӵ@a@gfffW@ O@ @@@ @@@@n@@.@4@@@@@@@@t@@@<@Lo@43333u@fffff^@@@ʫ@fffff@33333u@@@Rщ@\((@R y@Gzp@43333f@)\]@m"S@Zd;H@l?@@5^I 5@-,@n$@2%C@Pkw\@iq@v}@uV@?ܵ@ŏ1w-@=yX(@5;N@<, @_L @~:pΈ @HPs @#lxz, @F_ @%C @HP|@HP@Ǻ@ǘ@&S@|?5^:@!u@48EGr@|a2U0*@/L @ rh@Q@@gs@7d*@\(@x $(~@ޓZS@uV@@:pΈ@K7A@^)@Zd;@H.@K7A`@( 0@3?X5;N?/n??(?ZӼ?jMS??߾?b2U0*?#J{/L?D?ǘ?37?ZB>?&S?( 0?n{??H?w/?2ı.n?Pec?9EGr?ZӼ?):?v/?>W[? h"lxz?Y5;N?ZӼ?^)?Cl?yX5;?Ǻ?u?8gDio?<,?8gDio? -?Cl?H}???Pkw? c?hs?jq?ꕲ q?d`TR?V/?1%?NbX9? qh?Q|a2? 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DI?lϹI?ɇEI?hpHI?I?:H?uip?H?XFUvnH?}8H?.Q*H?]/nG? |G? qUG?2qG?)hF?`"戥F?iF?MN-F?qnE? ٫E?e.sE?5E?I D?z8D?˥~D?BD?$I D?lvAC?)p~$C?gE/QcOD`C?Nga.-C?araB?׺%B?lB?a5xB?+8NB?>.q%B?[`,_A?,A?ҪA?'sSA?}Ǖ]A?ۣX0A?oA?( @?@6@?s m@?hZ8@?Q+@?V`ȿ@,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t P??ndff0202_channelP ?@@@@@@ @"@$@&@(@*@,@.@0@1@2@3@4@5@6@7@8@9@:@;@<@=@>@?@@@@@A@A@B@B@C@C@D@D@E@E@F@F@G@G@H@H@I@I@J@J@K@K@L@L@M@M@N@N@O@O@P@@P@P@P@Q@@Q@Q@Q@R@@R@R@R@S@@S@S@S@T@@T@T@T@U@@U@U@U@V@@V@V@V@W@@W@W@W@X@@X@X@X@Y@@Y@Y@Y@Z@@Z@Z@Z@[@@[@[@[@\@@\@\@\@]@@]@]@]@^@@^@^@^@_@@_@_@_@`@ `@@`@``@`@`@`@`@a@ a@@a@`a@a@a@a@a@b@ b@@b@`b@b@b@b@b@c@ c@@c@`c@c@c@c@c@d@ d@@d@`d@d@d@d@d@e@ e@@e@`e@e@e@e@e@f@ f@@f@`f@f@f@f@f@g@ g@@g@`g@g@g@g@g@h@ h@@h@`h@h@h@h@h@i@ i@@i@`i@i@i@i@i@j@ j@@j@`j@j@j@j@j@k@ k@@k@`k@k@k@k@k@l@ l@@l@`l@l@l@l@l@m@ m@@m@`m@m@m@m@m@n@ n@@n@`n@n@n@n@n@o@ o@@o@`o@o@o@o@o@p@p@ p@0p@@p@Pp@`p@pp@p@p@p@p@p@p@p@p@q@q@ q@0q@@q@Pq@`q@pq@q@q@q@q@q@q@q@q@r@r@ r@0r@@r@Pr@`r@pr@r@r@r@r@r@r@r@r@s@s@ s@0s@@s@Ps@`s@ps@s@s@s@s@s@s@s@s@t@t@ t@0t@@t@Pt@`t@pt@t@t@t@t@t@t@t@t@u@u@ u@0u@@u@Pu@`u@pu@u@u@u@u@u@u@u@u@v@v@ v@0v@@v@Pv@`v@pv@v@v@v@v@v@v@v@v@w@w@ w@0w@@w@Pw@`w@pw@w@w@w@w@w@w@w@w@x@x@ x@0x@@x@Px@`x@px@x@x@x@x@x@x@x@x@y@y@ y@0y@@y@Py@`y@py@y@y@y@y@y@y@y@y@z@z@ z@0z@@z@Pz@`z@pz@z@z@z@z@z@z@z@z@{@{@ {@0{@@{@P{@`{@p{@{@{@{@{@{@{@{@{@|@|@ |@0|@@|@P|@`|@p|@|@|@|@|@|@|@|@|@}@}@ }@0}@@}@P}@`}@p}@}@}@}@}@}@}@}@}@~@~@ ~@0~@@~@P~@`~@p~@~@~@~@~@~@~@~@~@@@ @0@@@P@`@p@@@@@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȁ@Ѐ@؀@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȁ@Ё@؁@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȃ@Ђ@؂@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȃ@Ѓ@؃@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȅ@Є@؄@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȅ@Ѕ@؅@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȇ@І@؆@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȇ@Ї@؇@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȉ@Ј@؈@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȉ@Љ@؉@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȋ@Њ@؊@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȋ@Ћ@؋@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȍ@Ќ@،@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȍ@Ѝ@؍@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȏ@Ў@؎@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȏ@Џ@؏@@@@@@,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t A`??; ndff0202_fitP @3@6@@m@@@n@@@@P@@@:@@@<@@@t@@`@gfff&@`@@33333i@@gffff@>@q@@fffff@33338@gfff抺@@H@L@3333%@4333@ @3333@6@33333˵@Ld@@L@L@gffff@@U@ @3333@x@5@3333@@ffffw@=@3333@ffffϰ@3333@3333i@333339@ @@33333c@33333@33333@33333k@@33333ѭ@@@@43333@@s@3@fffff@@fffffx@<@43333@33333ɪ@33333@X@fffff"@33333@33333@̄@33333R@ @gffff@33333@@gffffa@fffff3@gffff@ڧ@33333@gffff@Y@43333/@@ݦ@@33333@33333j@D@ @@ڥ@33333@̖@u@U@5@@@٤@@@@c@fffffF@33333*@ @@fffffԣ@̸@@@g@33333M@3@fffff@33333@@gffffϢ@̶@33333@@33333p@Y@fffffA@)@@fffff@֡@fffff@@fffffY@@ؠ@33333@33333@;@@̜@T@@@ @gffff@@@q= ףT@zG@= ףp+@43333@q= ףT~@Uy@p= ףu@ ףp=Zq@Ql@> ףpg@> ףpec@`@QZ@MzV@jt S@A`"KP@)\(L@oʡH@(\E@RqC@nA@Zd@@=@z&1;@|?5^i:@q= ף09@MbX98@tVn7@x6@|?5^:6@x5@ +Y5@S4@oʡ4@?5^IL4@4@i|?3@㥛 p3@/$3@S㥛2@fffff2@L7A`e2@-'2@}?5^1@"~1@~jts1@#~j<1@1Z1@0@Mb0@/$a0@Hz'0@Zd;/@Cl/@x.@W-o.@'1-@.F-@w/,@Gz+@x&+@OnR*@Clg)@ rh(@A`b'@J +V&@X9v>%@)\($@a4#@"@$ @1Z @_LU@X9v@Z<@' @+e@>yX5@ʡE@Bf*@ŏ1w@ZӼ@X5;N@ׁs@鷯C@Af@/$@6@a+@ +Y@%䃞 @=U@{Pk@ q @W2ı@1%@]Fx@@u @Z< @z6> @p= ףp @N@ @.n @Sc @u% @ΪV @Qsג @HP @k @ho @5;N @|a2U0 @$C @(i @ cZ @|a2U0* @r @b+e @&S @X9@n{@ @Oe @* @ @Q @x@~:p @H} @lw# @Zd;O @QI& @J{/L& @6 ףp@fa@jt @Q@% @7>W[1 @MbX @ho @[ Aq @W2 @U0* @:M @0* @I @L F%u @I + @7>W[ @ @:v @b48 @՚h @%䃞 @ @؁sF @"lxz, @)\ @[ A @ @v=@~jt@!uq@%@v@~@Jt@Bi1@p= c@Gz@ q@.1 @@"@ףp= $@S㥛&@V-)@-阮+@~j-@-&0@n@1@jtD2@Cl'3@zG3@Mbp4@V-4@t4@K74@p= ף4@bX9(4@/$3@On2@}?5^1@Zd;0@vZ/@E-@K7A`*@Pn(@ʡE&@o$@ݵ|3#@!rh!@ - @M O/@$J{/@?߾@_I +@+@ec]@(@ c@Dl@rh@L7A`@ΪV @$(~+"@|?5#@gfffff&@gfffff*@ rhq0@MbX5@7A`=@#~jlE@̌O@%CW@ףp= a@33333j@Q$s@p= ף{@Q@q= ף@33333@gffff@33333@@fffff.@fffff@@3333G@<@@A@@@{@@}@@@@@m@@/@7@@@@@@@@@@J@3333{@̋@33333r@ŵ@L@@@@fffff@ @Q@(\6@)\y@ ףp=p@Rf@{G]@rh,S@DlH@"~j?@x&5@x&1,@?5^I$@W2D@$[@(@!lV}@?&S?( 0?n{??H?w/?2ı.n?Pec?9EGr?ZӼ?):?v/?>W[? h"lxz?Y5;N?ZӼ?^)?Cl?yX5;?Ǻ?u?8gDio?<,?8gDio? -?Cl?H}???Pkw? c?hs?jq?ꕲ q?d`TR?V/?1%?NbX9? qh?Q|a2? 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S"?1=a?KqUw?m? ?ʡE?x@e?.n?-?n?9]?):?5ctv2?ΪV?N@a?S\U]?0?bbq?ʡE?//>:?C6.6?{G?ó?Րҧ?-v?d9 ?I`s?*)?b1縷?xN̊??N0?Sx?~8m|?3b Tw?{ݨ_s?*"Rp?k?=ih? `e?MɃ>c?3^ b?bx|`?p_? &Y\^?p7-]?Gj9\?>Ώn[?<ߪF Z?v)Z?_4uhY?vɓ$Y??XX?X#qEX?^2W?#xW?[$W?}ĀV?RfL2rV?V7V?BU?LqU?o3U?*!T?w$+rT?=?1WT?ĄS?tC/mS?S?fĻR?ambR?q  R?q믲Q?7ѝr[Q?m倸Q? !P?PcP?qVP?c%IO?=O?MGN?{*mM?=8M?}7#M?*,宩L?jEL?bK?CK?BK?CJ?<"qJ??imJ?\-J? 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s@0s@@s@Ps@`s@ps@s@s@s@s@s@s@s@s@t@t@ t@0t@@t@Pt@`t@pt@t@t@t@t@t@t@t@t@u@u@ u@0u@@u@Pu@`u@pu@u@u@u@u@u@u@u@u@v@v@ v@0v@@v@Pv@`v@pv@v@v@v@v@v@v@v@v@w@w@ w@0w@@w@Pw@`w@pw@w@w@w@w@w@w@w@w@x@x@ x@0x@@x@Px@`x@px@x@x@x@x@x@x@x@x@y@y@ y@0y@@y@Py@`y@py@y@y@y@y@y@y@y@y@z@z@ z@0z@@z@Pz@`z@pz@z@z@z@z@z@z@z@z@{@{@ {@0{@@{@P{@`{@p{@{@{@{@{@{@{@{@{@|@|@ |@0|@@|@P|@`|@p|@|@|@|@|@|@|@|@|@}@}@ }@0}@@}@P}@`}@p}@}@}@}@}@}@}@}@}@~@~@ ~@0~@@~@P~@`~@p~@~@~@~@~@~@~@~@~@@@ @0@@@P@`@p@@@@@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȁ@Ѐ@؀@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȁ@Ё@؁@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȃ@Ђ@؂@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȃ@Ѓ@؃@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȅ@Є@؄@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȅ@Ѕ@؅@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȇ@І@؆@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȇ@Ї@؇@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȉ@Ј@؈@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȉ@Љ@؉@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȋ@Њ@؊@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȋ@Ћ@؋@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȍ@Ќ@،@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȍ@Ѝ@؍@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȏ@Ў@؎@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȏ@Џ@؏@@@@@@,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t  A`??ndff0504_dataP ;@@@@@\@b@@վ@`@@@@@@@I@@-@@@j@@#@ܶ@߶@>@%@ѵ@޵@n@@!@G@]@@@˳@1@@@t@@@'@|@.@@%@8@@@@@2@$@,@@@6@`@B@@r@~@@@@@Э@@֬@@H@@ԫ@@@@^@@@@)@@V@@j@z@@@@^@1@K@ި@p@z@V@1@Y@t@ @ԧ@]@*@@@@¦@@@Ʀ@x@@̥@B@=@ĥ@@@~@Q@@¤@@@@ؤ@z@[@|@ʤ@֤@r@v@z@6@@@s@@@v@P@0@t@*@$@@^@@@@l@V@P@@R@@Ȣ@*@~@&@,@0@`@@@x@P@^@@@@@$@@@@@@@d@ @B@ޡ@@@*@x@d@@2@@@@p@@@@8@*@@@@@.@ @N@6@@@6@ @0@p@@r@@<@@4@<@@4@@^@F@ @@@ @@@@|@@@<@*@B@l@@@@@@@2@h@@ܝ@@$@@\@@l@@@P@@@|@@\@\@̛@@x@x@8@@@@l@@<@@T@@@@@@ @8@}@y@t@t@ q@ n@ h@f@d@c@`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``@]@^@c@ f@@i@`k@n@r@0t@px@z@8@@8@\@|@@j@@@Ϯ@ٲ@C@@$@x@@G@@@@@@@@@@r@@W@ @@@@@@@3@@t@7@@q@@@d@H@ț@ؔ@@h@@|@s@j@d@@\@S@J@@@6@*@(@$@@@@@?@@@@@?@@@@??@?@@@??@?@@@@????@????@??@?@??@?@@?????????@?????@?@?@???@??@????@???????????@@,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t A`??ndff0504_fitP 3333@X@@&@[@h@I@@@@@@@@@0@@Q@@P@@B@@3@@(@@'@@4@@N@@ffffv@gfff&@3333@@M@3333@@B@@4333B@4333@@L@33333@3333@@@@@D@L߹@~@ @3333Ƹ@p@gffff@3333˷@}@33331@@3333@[@L@fffffյ@@W@@ߴ@@gfffn@33338@gfff@г@33333@gfffl@ffff<@ @33333߲@̱@@Y@.@@Lڱ@̱@L@c@=@@@ffffѰ@̯@33333@gffffm@LM@3333-@3333@33333@33333@33333i@.@gffff@@@P@@@fffff@̄@U@&@fffff@33333ͬ@@w@L@"@33333@ϫ@@}@T@+@33333@ڪ@gffff@gffff@b@;@@fffff@ȩ@33333@33333~@Y@6@@gffff@ͨ@@@g@G@&@@@33333ɧ@33333@@33333q@33333U@fffff9@gffff@@43333@gffffϦ@̵@gffff@43333@gffffj@fffffQ@8@gffff @@@ץ@@gffff@@z@b@L@333336@@ @@@33333ˤ@gffff@@̍@y@e@Q@>@*@@@@33333ܣ@ȣ@@33333@fffff@}@gffffk@33333Y@33333G@gffff5@#@@@fffff@gffffޢ@33333͢@@̫@fffff@@z@j@Z@K@fffff;@+@fffff@fffff @33333@fffff@@ҡ@fffffá@̴@@fffff@@|@n@gffff`@R@E@7@33333*@fffff@33333@@@fffff@33333ޠ@Ҡ@33333Ơ@33333@@33333@@@gffff@33333v@33333k@fffff`@gffffU@J@?@4@*@33333@33333@ @@@gffffҟ@̼@@̒@}@fffffh@S@33333?@*@fffff@fffff@@۞@Ȟ@fffff@̠@43333@fffffx@b@K@fffff2@33333@33333@fffffʝ@̘@fffff\@@̶@33333G@@fffff@`@fffff@33333@h@gffff.@ٔ@n@@gffffn@\(̍@GzĊ@Q҇@= ףp@\(b@Gz@(\{@p= ףw@q= ף8t@GzCq@= ףp}m@= ףp=i@)\e@Gzb@(\M`@(\\@Q8Y@{GjV@'1 T@lR@$C;P@p= SM@fffffJ@V-G@PnE@CC@1ZA@X9?@"<@V-:@q= ף7@h|?5@)\3@L7A`E2@o1@ʡE/@OnR.@K7-@ʡE+@^I ++@K7*@Yd;O *@Cl)@S)@~jt)@(\(@I +(@\(\(@K7A (@p= '@x'@)\h'@gffff&'@A`&@S&@&1\&@&@/$%@@5^I%@+N%@On%@~jt$@$@1Zd$@q= ף0$@u#@ʡE#@Z8ŭ#@Ƀ#@kwc#@ F%uB#@jt$#@^ #@J +"@"@ꕲ q"@o_ι"@d]Kȧ"@Q"@ O"@~by"@{Pk"@a+eY"@uVN"@>"@L F%5"@bX9("@ZB>"@"uq "@z6>W!@a4!@U!@r -!@H.!@46٬ @鷯g @JY8V@?ܵ@* @H.!}@m4@@47B@?߾?\(\?Gz?Ps?=yX5?"lV}?KY8?9#J{/?ea?~:?\B>٬?S?L7A`?):?u?1?'1Z?gj+?%C?8m4?N@a?q -?D9?cZB>?~jt?46?(a_Y?_Fj?'fʉ?1*?-?؞Y? {??(rw?%?rPLۿ?8-xW?Nz?k}Жs?3.?+H3?jjZ_$?Y?j+?8*5{?ղHh?S c A?N@????J5o?8gDio?:? 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D )?)'$?E )??ݰmQ?n?~5? \? rh?*-9(?+0du?ɰ72?Tt@?@@@@@A@A@B@B@C@C@D@D@E@E@F@F@G@G@H@H@I@I@J@J@K@K@L@L@M@M@N@N@O@O@P@@P@P@P@Q@@Q@Q@Q@R@@R@R@R@S@@S@S@S@T@@T@T@T@U@@U@U@U@V@@V@V@V@W@@W@W@W@X@@X@X@X@Y@@Y@Y@Y@Z@@Z@Z@Z@[@@[@[@[@\@@\@\@\@]@@]@]@]@^@@^@^@^@_@@_@_@_@`@ `@@`@``@`@`@`@`@a@ a@@a@`a@a@a@a@a@b@ b@@b@`b@b@b@b@b@c@ c@@c@`c@c@c@c@c@d@ d@@d@`d@d@d@d@d@e@ e@@e@`e@e@e@e@e@f@ f@@f@`f@f@f@f@f@g@ g@@g@`g@g@g@g@g@h@ h@@h@`h@h@h@h@h@i@ i@@i@`i@i@i@i@i@j@ j@@j@`j@j@j@j@j@k@ k@@k@`k@k@k@k@k@l@ l@@l@`l@l@l@l@l@m@ m@@m@`m@m@m@m@m@n@ n@@n@`n@n@n@n@n@o@ o@@o@`o@o@o@o@o@p@p@ p@0p@@p@Pp@`p@pp@p@p@p@p@p@p@p@p@q@q@ q@0q@@q@Pq@`q@pq@q@q@q@q@q@q@q@q@r@r@ r@0r@@r@Pr@`r@pr@r@r@r@r@r@r@r@r@s@s@ s@0s@@s@Ps@`s@ps@s@s@s@s@s@s@s@s@t@t@ t@0t@@t@Pt@`t@pt@t@t@t@t@t@t@t@t@u@u@ u@0u@@u@Pu@`u@pu@u@u@u@u@u@u@u@u@v@v@ v@0v@@v@Pv@`v@pv@v@v@v@v@v@v@v@v@w@w@ w@0w@@w@Pw@`w@pw@w@w@w@w@w@w@w@w@x@x@ x@0x@@x@Px@`x@px@x@x@x@x@x@x@x@x@y@y@ y@0y@@y@Py@`y@py@y@y@y@y@y@y@y@y@z@z@ z@0z@@z@Pz@`z@pz@z@z@z@z@z@z@z@z@{@{@ {@0{@@{@P{@`{@p{@{@{@{@{@{@{@{@{@|@|@ |@0|@@|@P|@`|@p|@|@|@|@|@|@|@|@|@}@}@ }@0}@@}@P}@`}@p}@}@}@}@}@}@}@}@}@~@~@ ~@0~@@~@P~@`~@p~@~@~@~@~@~@~@~@~@@@ @0@@@P@`@p@@@@@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȁ@Ѐ@؀@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȁ@Ё@؁@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȃ@Ђ@؂@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȃ@Ѓ@؃@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȅ@Є@؄@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȅ@Ѕ@؅@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȇ@І@؆@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȇ@Ї@؇@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȉ@Ј@؈@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȉ@Љ@؉@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȋ@Њ@؊@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȋ@Ћ@؋@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȍ@Ќ@،@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȍ@Ѝ@؍@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȏ@Ў@؎@@@@@@@@@ @(@0@8@***************************************************************************sum,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t A!a?? ndfx0504_C ) fffff@33333E@fffff@@433339@̻@33333*@̃@Ǩ@fffff@33333 @@33333@fffffҨ@@E@@r@@b@ȥ@%@x@ƣ@fffff@33333L@gffff@fffffˠ@33333@@:@ӛ@t@33333!@ؗ@33333@gffffn@fffffL@fffff8@2@333339@N@ ףp=@Q=@Gz@)\@@fffff@p= ף@{Gn@GzP@HzE@zGK@Gz`@Q@(\@أp= @ ףp=~@Q8}@zG{@zGz@(\y@ףp= x@Qw@(\v@(\v@Gz:u@p= {t@Gzs@fffffs@q= ףxr@q@Lq@Gzp@{G>p@Qo@= ףpn@)\m@l@> ףp l@GzFk@](j@Qi@(\i@)\xh@)\g@R9g@{Gf@{Gf@Gze@zGd@(\ud@\(c@xc@{Gc@̌b@(\b@fffffa@GzDa@`@x`@Q`@(\u_@(\^@{G ^@ ףp=Z]@Gz\@p= \@l[@ ףp=Z@zGAZ@(\Y@Q%Y@x&X@Zd;X@"W@e;OW@S㥛V@V-/V@ףp= U@}?5^QU@&1T@S{T@/$T@MbS@\(TS@V-R@X9vR@v?R@nQ@HzQ@ r@Q@K7P@P@|?5^ZP@Q P@Zd;O@ʡEN@zGqN@MbM@V-]M@x&1L@$cL@X9K@ rhqK@Zd;OJ@$~jJ@+J@EI@+>I@ʡEH@bX9xH@QH@ClG@rhLG@MbXF@`"ۙF@(\?F@ClE@L7A`E@p= ף@E@T㥛D@OnD@vJD@uVC@X9ȶC@"~jC@-&C@"B@x&1B@ˡEMB@Zd B@X9A@xyA@xIA@A@e;O@@7A`@@V-=@@R@@/ݤ?@m?@/$>@sh|?>@ʡE=@&1z=@Cl =@x&1<@䥛 0<@ʡ;@K7;@ ףp}8@Q+8@Cl7@+Η7@nJ7@Cl7@ +6@Cl{6@M"6@S5@w/5@p= c5@T㥛 5@S4@~jt4@Gzn4@ 24@zG4@-3@{Gz3@V-R3@fffff3@333332@Zd;2@%Ck2@V-/2@E1@1@ףp= 1@I +G1@MbX1@V-0@rh|0@cX9h0@R10@F/@~jt/@S㥛D/@V-.@V-r.@K7.@Q-@QE-@/$-@-,@Y9v>,@A`",@S+@{Gz+@NbX9t+@Zd;O+@ ++@zG*@A`*@ *@X9v*@~jt*@~jtS*@ r*@S*@Zd;*@zG:*@Mb*@n)@-)@|?5^z)@-F)@?5^IL)@(\)@7A`(@ (@~jt(@q= ף0(@S'@x&1'@1Z'@-阮'@S㥛D'@}?5^ '@Gz&@Zd;&@w/&@{Gz&@MbP&@jtD&@l1&@&@I +&@ʡ%@B`"%@7A`%@R%@xf%@x&1%@S%@Gz%@T㥛$@/$$@C$@q= ףp$@Zd;$@R$@$@z):#@=U#@3W#@;pΈ#@<,Ԛ"@W2"@z6>W["@b4"@v!@(\!@q2!@@a @z6 @ $(~Y @|a2U0 @]m{@Bf@Mb@K7A`@+eX@HP@> ףp}@uV@@aӫ@+eX@&S@ho@y)z@?@~:p@6[@gs@ o_@-q@HPX@V/;@H}8'@St$@( @V-@io@1w-!@|?5^z@ǺM@Mb@o@r -@*:H@l g@3U0*@٬\-@kt@z6>W@W[@2Zd@S!u@Vo@~j@Pkw@( @7[ @N@@ -@d]F8@{@(\@cZB@Gz @Aa+ @) 0 @vq - @cZB @ZB>Y @2% @vOj @ho @X5;N @F_ @jq @_)Ǻ @kt @k g @B @jM @_@^)@w#@&u@ׁs@S@ - @2%@_Q@:#J{@/'@+eb@"~j<@鷯@*D@fj@@9#J@sF@'1@|a2U0@Af@Q8@/$@UR'@sr@lV}6@F@ݵ|г@L F%u@NbX94@Bf@x&@cZB>h@QI@ c@(@-F@/$@Zd@tn@k @}b?B?l g?1%?-?&?QI?"uq ?9v?J +?B?/$?l g?m4@?ͪ?|a2U?ۊe?p= ףp?Q??H?Z?]m{?V/'?B?|гY?(\?%C?8m4?N@a?q -?D9?cZB>?~jt?46?(a_Y?_Fj?'fʉ?1*?-?؞Y? {??(rw?%?rPLۿ?8-xW?Nz?k}Жs?3.?+H3?jjZ_$?Y?j+?8*5{?ղHh?S c A?N@????J5o?8gDio?:? 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Y9?g\8?<,Ԛ?֐҇?k+ݓ?4)^?tgy? ^?6?.9?:?)[Z ? X4?37?hs?/iQ?(rw?.Q5?:f? Oe?]].;?( 0? ?PS"?p0?!%̴?Gŧ?b('?#gaO;?pUj?߄B?Gz?('?m?l`q8?,eX?{/L ?}?5^I?_YiR?bbq?\?NbX9?x=\r?*g\8?MP?jv? T?`< ? h"l?R%?#0?1 {?@j';?kC8?pq?|y?Mb?48E?~ƅ!Y? F6?L F%u?y?9 {?Ic&?+j0 G?:KTo?N],?B?fc]F?̴++M?n2d?ZӼ?L=U? y?M O?LJ?ͪ?_vO?]K@l g3@yz,C@Afg @H. @i|?@@-@ rh@6;NQ@H}@|Pk @]K}"@1Z$$@n%@S'@x&1(@/$*@OnR+@S,@V--@V--@x&1.@S.@^I -@Pn-@Mb,@MbX+@o*@K7A)@~j4(@㥛 &@R%@c]Kh#@cZB!@_L @٬\@Y5;@1@V-/@ݵ|г@x&1@V- @ $(~@K=@mV}b@1%d@ rh?H.!?OjM?S!uq?HzG?S!uq?{/L ?1?镲 q?V}b?o_? lV}?<,? c?U_?v?~k ?ec]?@?V-?_L?.n? -?T㥛 ?:M?jt?St$?^I +?z):?|Pk?H}8g?!uq?Af?/n@ho@ˡE@,ݓ@QI&@j+@jt@+eb@R@:M@OjM@N O @(\B @Ș@V/{@( 9@cZB!@}?5^(@"1@jt:@㥛 C@tM@ʡEU@ףp= '`@qg@p@Gzw@33333m@t@(\7@@gffff@fffff@43333#@K@L@s@$@$@33333f@@.@q@@@@z@@@@g@@@N@@d@h@@@@@Q@@3333s@gfff@@fffffѴ@A@*@@@fffffʛ@>@@Q@zG'@fffffx@p= 7q@{Gg@Gz.`@!rhU@MbL@ƻB@MbP8@(\/@Zd;O$@|a2U@}гY@PjM @ı.n@鷯@48E?b=?ׁsF?s?j+?#lxz,?y&1?= ףp=?ZB>?X9v?kw#? +?:M?0*D?2w-!?_)Ǻ?H}?]K=?jt?M O?ꭁ?m4?QH? W?kC4???&†W?bg ?ݵ|г?!>M?([Z ??C4?`TR'?4hb??,? yX5? rh?!<8b?*-9(?P6 ? m9?#?Tt?(A&?AL?~:p?%ǝ?b ?H?Tt??>٬\?S"^F?#bJ$?o%;6?!u?G?!X4?Tƿϸp?$([?/?Xj?JR?hyܝ?{?/ Ҍ?x?S:X? l`q8?0*??bg ?CV?%C?X9v?V?K46?K:u?N?)s?k T?4?q&?#?pn?ah? D )?)'$?E )??ݰmQ?n?~5? \? rh?*-9(?+0du?ɰ72?Tt 7d , \+(7)Li 1 MeV, \g(a)\-(scatt)=150 o Py鿿{E>>X2  * o Py鿿{E>>X1  * o  g^@ؠ,D@H >>XT > &Q o  6 ^@`kbݗH9hBXB > &Q  Channel o #:m?7i6?(i>>3D ( Si:m?7i6?(i i GB33pv??m->Rbv?&>&- m?GĮ76Č ??DDD???EEF4bF! G EEEv??m->v?&>&- m?GĮ76Č ?$@@ o  ) "l֙s@1` ٦@H >>@YR > &S o F " рP9@1` ٦@H >> D@YL > &S o i m H nQ?H>>D@Text1 > &xS  Yield (counts) o Fȿ>>_202   A? 2 o Fȿ>>_202  A? 2 o Fȿ>>_202  A? 2 o Fȿ>>_202  A? 2 o qq?ooĿ>> _202  A? 2  o qq?ooĿ>>_202  A? 2 o  1pȿ>>_202   A? 2 o  1pȿ>>_202  A? 2 o  1pȿ>>_202  A? 2 o  1pȿ>>_202  A? 2 o  1pȿ>> _202  A? 2  o  1pȿ>> _202  A? 2  o  1pȿ>>_202  A? 2 o  1pȿ>>_202   A? 2 o Qʿ::>> _202  A? 2  o 1΋Zyȿ^m>>_202   A? 2 o 1΋Zyȿ^m>>_202  A? 2 o 1΋Zyȿ^m>> _202  A? 2  o 1΋Zyȿ^m>>_202  A? 2 o 1΋Zyȿ^m>>_202  A? 2 o 1΋Zyȿ^m>>_202  A? 2 o WhzKvЉXͿ>> _202  A? 2  o WhzKvЉXͿ>>_202   A? 2 o WhzKvЉXͿ>>_202  A? 2 o WhzKvЉXͿ>>_202  A? 2 o WhzKvЉXͿ>> _202!  A? 2  o t"ȿ~/nz>>_202!   A? 2 o t"ȿ~/nz>>_202!  A? 2 o t"ȿ~/nz>>_202!  ? 2 o t"ȿ~/nz>>_202!  A? 2 o t"ȿ~/nz>>_202!  A? 2 o t"ȿ~/nz>> _202!  A? 2  o P"My?;zF?>>_202!  A? 2 o P"My?;zF?>>_202!  A? 2 o P"My?;zF?>>_202 !  A? 2 o  + oJe?49ȼ?HdhText > nQ  a-Si o q 'XY?7Ck?H >>Text2 > KQ Au o n i C?*o?H9hText4 > Q  DS+PUP o "b  >>Line x 318S@~?S@'x@pl7@   o #dd(>>__LayerInfoStorage7 ( 2d(   A`#? 2??  A`#? 2??  A!a#? 2??  A`#? 2?? - ^@n@4@I@ - ̰@Ͱ@@Q@   UrQ P   Q P  @ / P  @_/ 9 P   ? P  P@_c9|@ P   _9 P   _9j P  M@sr&| P  @&Q I@ P   ? P  P@[Q s@ P   P   P   P   P   P   P - I@`}@I@@GkFk @j@@@nSl " rrwJ $KS2? ף= ף=Pd2, o M:=? :M2?HdhText5 > kQ  c-Si o X2";+?sƷ?H.CYText3 > jd . \+(7)Li 1.5 MeV, \g(a)\-(scatt)=150 o Py鿿{E>>X2  * o Py鿿{E>>X1  * o i@w u@H >>XT > &Q o ai@%qz\H 9hBXB > &Q o #:m?7i6?(i>>3D ( Si:m?7i6?(i i GB33pv??m->Rbv?&>&- m?GĮ76Č ??DDD???EEF4bF! G EEEv??m->v?&>&- m?GĮ76Č ?$@@ o |jt/}@ms@H >>@YR > &S o Fu@vlLms@H >> D@YL > &S o hS2 *?H>>D@Text1 > &xS  Yield (counts) o Fȿ>>_202 !   A? 2 o Fȿ>>_202 !  A? 2 o Fȿ>>_202 !  A? 2 o Fȿ>>_202 !  A? 2 o qq?ooĿ>> _202!  A? 2  o qq?ooĿ>>_202!  A? 2 o  1pȿ>>_202!   A? 2 o  1pȿ>>_202!  A? 2 o  1pȿ>>_202!  A? 2 o  1pȿ>>_202!  A? 2 o  1pȿ>> _202!  A? 2  o  1pȿ>> _202!  A? 2  o  1pȿ>>_202!  A? 2 o  1pȿ>>_202!   A? 2 o Qʿ::>> _202!  A? 2  o 1΋Zyȿ^m>>_202!   A? 2 o 1΋Zyȿ^m>>_202!  A? 2 o 1΋Zyȿ^m>> _202!  A? 2  o 1΋Zyȿ^m>>_202!  A? 2 o 1΋Zyȿ^m>>_202!  A? 2 o 1΋Zyȿ^m>>_202!  A? 2 o WhzKvЉXͿ>> _202!  A? 2  o WhzKvЉXͿ>>_202 !   A? 2 o WhzKvЉXͿ>>_202!!  A? 2 o WhzKvЉXͿ>>_202"!  A? 2 o WhzKvЉXͿ>> _202#!  A? 2  o t"ȿ~/nz>>_202$!   A? 2 o t"ȿ~/nz>>_202%!  A? 2 o t"ȿ~/nz>>_202&!  ? 2 o t"ȿ~/nz>>_202'!  A? 2 o t"ȿ~/nz>>_202(!  A? 2 o t"ȿ~/nz>> _202)!  A? 2  o P"My?;zF?>>_202*!  A? 2 o P"My?;zF?>>_202+!  A? 2 o P"My?;zF?>>_202,!  A? 2 o f5.'?R"x?HdhText > nQ  a-Si o l8+7oD?/%G?H >>Text2 > KQ Au o s7n~ߔ2Z?}?H9hText4 > Q  DS+PUP o "MY'>>Line x $ C"W@$ C"W@2 0"@Ǧ9|@   o #dd(>>__LayerInfoStorage7 ( 2d(    A`#? 2??   A`#? 2??   A !a#? 2??  A `#? 2?? - i@y@4@I@ - p@q@@Q@   C P   ~ P  @'G P  @_9 P   ? P  P@_9j@ P   _Z9f P   _$9 P  M@s& P  @&I@ P   ? 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@Zd;@7A`%@T㥛D@MbX@x@ףp=@rh@sh @M@-@ +@!@CK@GzT @!@阮&@bX9'@NbX,@\-@&12@V-4@|?59@Q:@A`P?@阮@@%E@ZdF@)\µK@ L@ rQ@Z$S@vX@+YY@d;OM^@d;O_@d@^I e@ j@X9k@/p@I +r@;Ow@v_x@ףp=J}@Gz~@~j|@K7Ʉ@w@ ףp@{GᏦ@V-2@@xf@F@`"@x@Zd;ϣ@R@T㥛@|?5ޮ@8@Mb@rhm@nC@M@)\u@ +¦@-Ǧ@C ɦ@vͦ@@Ϧ@d;O Ԧ@~jtզ@h|?ڦ@\ۦ@V-r@V-@/ݤ@@p= @F@?5^ @Zd{@Dl;@ @On@Z@{G@+@jt @M @/$@^I @8@X9ȶ@I k@R@V-$@v&@Mb*@GzT,@(\1@K72@|?57@ ףp8@-g=@V->@1C@x&E@I@`"[K@h|O@Zd;ߏQ@m1V@T㥛W@Zd\@NbX]@ +b@rh-d@K7h@Mbj@Dln@ +p@Hz.u@Cv@㥛`{@}@jt@~j4@ʡŇ@\h@Q@V-@I +@Pnҕ@/]@@Zd;ߏ@Zd;@(\¦@ p@~j@Z@Cl'@+ٴ@1Z@ @5^I@^I B@"ŧ@X9vǧ@x&˧@Rͧ@q= #ҧ@L7Aӧ@ +Vا@Gzڧ@K7ާ@K7I@Zd@E}@Hz@V-@L7A @x@R@`"@ʡ@Zd;O@η@T㥛@#~ @NbX @/@rh@(\O@M"@^I @p= W@~j"@C$@x(@*@/@~j0@K5@\(7@,t,t,t,t,t,t,t,t,t,t,t,t,t A!a?? sall2_F N Nxy_7@`7@)n? '9@(9@TfC:@ܵJ:@rC;@6;@ĶnR<@zv<@G@\=@8w3>@ >@X>@t(Q?@p^֣?@x[@@I6U]@@r@@V|"J@@P8'A@>(A@gA@}aKA@o2AA@SItA@u(9B@W:B@ RB@bIwB@WXB@]B@V],/C@^m1C@GR|C@[&~C@\C@+fcC@jʰD@&@$D@E2WD@A$YD@';D@qXD@Ќ`D@-aD@;"E@`$E@=NecE@OpeE@3JE@ҤE@=E@k. E@Q<4F@huF@ZzXF@|CZF@fD/F@ȕF@8F@Ѩ:F@Ḅ9G@Qi=G@@G@GxRG@G@}G@ 0KH@jOH@XSXI@ķf\I@7I@I@6ƕ J@t^MJ@-aJ@VfJ@ <}J@!bJ@OǗK@n\K@̒hK@h+mK@;:K@}$gYK@ l|L@bmL@N6kL@kqL@e^FL@"޷L@V M@M@Ч~skM@FqM@LM@YزM@ N@N@kkjN@-VpN@W N@*#VN@ O@*1JO@<~Q\O@O`O@yÛO@mJHO@aO@O@QOO@h#P@gMqP@3P@U73P@5P@ tMP@SG;,OP@afP@hP@P@;RہP@jfP@W#yP@_=P@yײP@P@R5P@Y# tP@2̐P@v<^/P@>m}&P@*Q@v Q@Sa%Q@%;'Q@gJ42Q@@bRQ@L?TQ@T3kIhQ@ϡgjQ@}Q@,Q@܉-9Q@otYQ@G]DQ@T@Xќ@T@gL^[JT@S8LT@FMVT@T-XT@'e"bT@adcT@mT@LBoT@$,UyT@Ӡ,{T@vشT@NT@T@tǑT@\ T@,ѼܜT@hT@1˧T@P*1ѰT@@T@e~T@="lIT@T@>T@&xyT@IW<7ET@RlT@|&T@+QzT@((T@`T@|ӖT@ET@.6ZT@|U@RҺsU@S"^f U@hJU@EU@U@.?hU@$"!U@/vݺ(U@~"y*U@Ao1U@#3U@ :;U@o6gU@^thU@`RoU@ow:qU@ťxU@$YyU@]MU@U@U@U@MU-U@DB8U@'QU@U@U@"9ӓU@M'U@{1nU@U@\q/8,U@BscU@O׷U@\?7gU@kU@BrU@קU@X~l{U@;{QVU@U@yU@ 8U@tU@p{U@2T(U@.^U@JU9U@sXU@:o@>U@2U@3U@GU@qr}V@W-V@*QV@^z=`V@+NA V@3V@Ũ4KV@V@yV@hCYV@ϛb!V@ ;w"V@#o'V@]DP)V@.V@:K/V@=;4V@6V@j,BV@8GV@*EMHV@^LMV@u=NV@OSV@TmTV@\ZlIYV@gZV@^b*_V@!q`V@, eV@ifV@AjV@.[8lV@jopV@fqV@2@vV@IܞwV@2{V@WC}V@ZNzV@* ΂V@<V@F%QV@SxxV@bЍV@o1V@l~V@V@ZΡޡV@4V@UBV@.9nV@FV@뒭V@AmV@V@$Q~V@)ɷV@*̑V@XܼV@xElV@G V@V@̢6V@7fW@Iw@W@MX BW@!9^DW@(EW@/_HW@(IW@{]LLW@,TMW@Fz^PW@(ΓQW@\6)TW@]UW@ xWW@9 1YW@[W@4Ǩ\W@Rs_W@7Ve`W@ ^$cW@VLdW@#fW@^$8gW@>{TpjW@skW@ nW@wr,oW@kDqW@ HfrW@#4uW@D]NvW@xW@7JyW@>|W@b]}W@e R:W@ ԀW@f5W@PPMW@d\W@v_LJW@ W@̙*W@ƩsW@ᣏW@-sΐW@+_W@D+W@2G4W@-YkW@:7W@ZpW@V[>ޛW@gW@k!W@AKW@[XW@ ͅyW@'dW@=ԵW@]sW@)۪W@eW@'xpW@|%W@-F2+W@yфGW@mOW@BA_W@/IjW@H#sW@xzW@]o|W@*usW@T{W@WW@R /W@.@8W@{>V2W@+W@ aW@k|W@W@zdqW@K`J|W@C^W@$AbW@MJNW@&}_XW@x,-W@r.#0W@6&W@^ W@YW@pfW@W@QwW@`_gW@&W@SW@6VZW@=4,"W@ϗ!W@W@W@y!W@X˝W@ OW@jaW@l(W@аW@ApNW@ֹW@?K_aW@0^VW@ [&W@ W@5*OW@͞6W@T2ƨ7W@p1W@GNX@W?X@*2XmX@dfX@/X@IX@DX@C>)?X@Qn@X@ñGAX@BX@z jCX@M VDX@UxEX@*8FX@gGX@N[ HX@0^IX@8kJX@KX@փ~LX@8MX@##9NX@ȝPOX@F&PX@QX@3kk<SX@zKSX@bqUX@HUX@?MWX@IWX@teYX@렖YX@u}rZX@^ .[X@Dw\X@Z]X@ N^X@-ô_X@tI`X@VdaX@~էbX@03CucX@ďdX@]eX@y\mxfX@[)gX@bAhX@ x.iX@Oe9#jX@%jX@9(lX@#lX@|AmX@DznX@~JoX@EQ[pX@nWqX@WZrX@;"sX@NsX@"0ިtX@Fq3uX@ДvX@ҵmwX@wXxX@/8yX@*ij~!zX@܄9IzX@T{X@pI|X@j t}X@#ngS~X@0X@x!X@5\GـX@X@9,X@ DX@`X@ X@BX@1X@jk^X@U&X@%X@wX@WX@5DX@"X@=$ ތX@ؙ-ÍX@ IuX@cYX@u)dX@ PX@]X@ҜV_X@sBX@_cX@xX@fedX@mX@ϖX@sX@@kX@eX@umX@tJX@rV?X@6X@cX@S"^X@d{2X@X@YX@#48`X@[[X@c`X@iVSX@AѥX@hqX@gvX@|:e$X@ ҥX@ ~iX@{a"X@0X@xX@q!X@PI©X@J^X@5@X@̕ΫX@ŹX@`X@:⮾X@_X@\~X@GX@y;X@5X@ SX@wPX@RX@O0X@\CX@&/GX@I\UX@5HwX@ 9fX@+dvX@&EX@!uX@Ϧ9X@3׽X@*,X@5X@>YX@GX@>aX@%4rX@[_,X@?(޷PX@l%X@c'DX@ /-X@#Xf[7X@=X@ASX@YmX@N$jX@!eX@xN~X@ u'DX@VX@On>X@]gX@aX@DEAX@dX@1~uX@VX@.X@IjQX@DD{X@-$X@wcX@(X@`7l[4X@?CX@uX@flX@{X@ʅ*X@S \X@^'X@6-X@fX@YTzX@4n[X@ԬX@NX@/"UX@[X@GHX@c>X@voX@ن6X@^jX@|X@8ηOX@zx*;xX@?lX@Bϧ$X@fmX@VX@cX@BGX@7NX@X@xJ8X@X@`JX@q)X@Q|X@/ZqX@._X@$fX@#d X@+X@˂.7X@'tX@c?X@,z'X@;.>X@ czX@ÖÓX@7S|7X@Ľ(hX@OX@n{qX@1X@nX@qX@ض(X@JNX@s`X@BX@cX@cqIX@7EsX@[lIX@ X@~,RX@Aƒ(JX@"'zX@:BaX@)VRX@kW X@IQ}X@xX@&T1X@ X@B`@5X@HѹhX@oT]vX@JX@pX@(,2X@I5]X@^`X@$X@(BX@"VX@F9=MX@8X@aX@X@וX@hVX@UDgX@{V~X@oX@%ΊX@I(}!$X@uwFX@#X@7X@ &BX@DoLX@OX@,R6X@QX@߬}X@PՉX@X@|X@C.gX@P"X@f)=X@BdX@ X@GyX@X@g~X@.$X@K X@qEX@Dq}NX@weX@woX@7X@\(OX@hX@hX@a/X@ fX@>X@fsCX@X@5OuX@X@+xX@!?X@X@ϵX@yDX@e`TX@9r X@>PX@\=X@;X@j"eX@vKodX@L׸cX@BanX@AܺX@G#X@/X@sczX@0*X@J/X@2X@KX@>fVX@BmeX@zy X@i X@BsBX@^T4X@X@AX@47SX@z.EHX@3#MX@?X@'saPX@9RX@؍-+X@GX@yvX@P.X@г;X@!X@X@t4X@X@'끠X@k*X@=X@-;ğX@ZU@X@TX@#X@MGwX@ⵦԀX@3;DmX@4JxX@j X@ų_X@[S X@tKX@CRX@DXX@AX@$`SX@,EX@X@ n UX@=h,PX@ut4X@STX@MlX@\X@mX@O QX@ONYX@kX@հsX@EˆX@\IX@o9X@A5pX@X@} ƻX@V_]X@ડrX@JX@4X@[.X@61n X@GV#`X@K?X@A>}X@!tX@IX@IX@\GX@pLX@~PX@X@aFbX@brY{X@ 8X@&xX@ ̯X@RJcX@iX@G7}X@6@X@ʫ)?X@Z X@yfX@X@rX@v$hX@%5X@gX@r(X@%I X@X@)tUX@3/X@) OCX@ayFX@B"LX@ X@QX@Z>7YX@X@[ٙX@xX@rxX@"i[CX@$X4X@^X@ӨvX@/7+X@)UMkX@3`-X@dX@8պX@_ X@,+TX@ *BX@ TX@ 4X@L%MX@PX@]8X@Z`X@kX@pɱX@U9IX@ sX@X@4X@rMnX@EgEhX@BQ X@cX@-\X@iErX@c)X@}"X@ CX@l4ʤX@ SZX@hsA"2X@evX@ђӲX@>[X@~IX@o-X@ nX@1nX@RX@ X@nX@(OX@eX@t2X@WbNGX@GLPrX@hOnX@~tX@SK)X@vbX@pvX@keX@i X@p NX@/#X@c2X@`kAX@YX@p NsX@SkX@v+.X@8᤺X@(X@ X@6ہX@\X@ʭ)X@yX@9qX@PX@X@+X@2,X@oJ'X@;X@`?X@2[ TX@SkX@[&kX@FIkX@yUguX@J]~X@BW"PX@+X@gX@M ;X@O`X@A_X@Xni5X@rN졽X@X@A*X@lBX@ؤX@I<@X@`X@UX@^X@ׁX@ƫbX@U X@e6X@^X@m-8X@{ۧ>X@AX@ ҭX@O&$X@X@ƶVťX@ő"X@pX@yFX@dh~X@DPX@X@CzX@n oX@(hX@IS eX@T TX@ iYX@ IX@lނ&X@UEX@ąMX@P7X@mX@LX@VX@3X@6X@LX@8ШX@ڏoX@&pX@6g3=wX@rX@A`X@GĦZX@)RX@eX@$X@1X@kծ X@ 0X@oX@H5X@mX@&9X@GXTĉX@X@93X@5X@X@E`X@HX@a)ٻX@ X@!uX@6_mX@b}bX@+EX@ %X@X@*OIX@3X@\CwX@wX@zX@\vxX@38X@0Wm#X@ժZX@D$X@/X@/X@X@ `X@kjRX@HR-=X@*狽X@OX@.X@rJX@X@H9N`X@4XFX@9ч8X@&v#X@)lX@ eX@7ӜX@xZcX@"`X@%X@?j!X@bӔX@~X@UIX@I[jX@rIZ6X@=D|1X@NX@]X@ bX@`/X@9NeDX@9[@HX@wpX@ACX@EIX@CȔX@' PX@eCX@kX@UX@X𑃨X@WX@d'RX@IiX@IsX@2IX@nX@9}CX@$X@o/X@~ҞX@wynX@@aX@mX@ziX@nX@5xX@zq=%X@q7X@,pùX@L*X@[=X@6?X@gsX@ّX@C7JRX@]lMX@:X@;s X@kX@PfX@vNtX@AHX@BX@sX@2X@X@ս]X@~X@BX@X@LX@2X@4bfX@X@ X@=3X@ZX@$X@6WsX@/X@)X@TAGX@X@NQ?X@بX@F@*jX@)0SIX@b_DX@P8X@GX@撅X@YX@sX@8qX@a^sX@L ~X@X@d̸X@з`dX@D? "aX@<7#X@u5WX@TX@z0OX@9mX@q}X@2WFX@|AX@CRX@ i&X@{ X@2X@uX@P&$X@lR,X@j_X@SyVX@#:jX@X@X@@=X@V*X@4eX@7)OX@)cQX@5X@&pX@q]uX@WX@!9X@N#-UX@pB|;X@[X@]TX@qX@:X@XEmX@49dX@׿X@,տX@go:X@,N8X@ kX@p$+X@5?X@X@p߀[X@p߀[X@tH X@ /X@ OX@nX@7vX@@ubX@4pӺX@lbٺX@PK'X@PK'X@ X@ X@@ݸX@@ݸX@wFX@D/X@ Y~X@%qX@?4X@:QXֲX@9n#X@O7X@?VX@E)ƞX@G'ǰX@ڰX@X@XX@}X@IUyX@YZX@PX@ϡgX@lNX@o;YX@UX@_ץX@ zX@X@X@3.X@1X@M:X@)itX@ЩX@SĩX@4^X@](X@aTX@]X@TEX@NgX@>jX@a_D֦X@cx|6X@TUh X@aX@3'iX@iX@b%X@D_X@nX@mr3X@lX@ԀX@QA껀X@ф7X@u^X@[%X@⌫ X@pp?~X@Y,~X@4\e}X@S}X@1V@F|X@Ͻk|X@{X@e{X@UqzX@Y!zX@hZbeyX@JyX@SyX@DryX@/xX@w~Q"xX@mnLwX@=wX@9TovX@wZvX@^NuX@)suuX@3tX@\stX@sX@5;NsX@*FrX@=rX@;rX@V],qX@f qX@ qX@ 4G?pX@s.pX@E­QoX@rAoX@Z䍂vnX@XnX@VmX@4zmX@mQlX@lX@MkX@'kX@?jX@5_jX@oiX@niX@k-%iX@hX@&hX@3ChX@XA%AgX@%g,gX@WNfX@-fX@ГseX@ !ReX@X)dX@^dX@C|7cX@cX@bX@ڀbX@`aX@86TaX@i`X@9ok`X@"B_X@> N_X@m^X@5^X@V^X@D]X@9]X@KE]X@//\X@u\X@,3=[X@R[X@rqmKZX@1ZX@#dYX@s>YX@녎_pXX@HXX@8u-nWX@>Rm7WX@uVUVX@4v;VX@-MUX@w UX@s/:TX@otTX@E,SX@ qRX@h"RX@B&QX@ffQX@PX@*1PX@dOX@[NX@j-/NX@uHMX@!$ꉧMX@-"LX@$oLX@G/0KX@F{KX@+JX@wUdJX@ IX@sSIX@zǥ~HX@GHX@@`GX@9Y5GX@\CFX@:{mFX@%1EX@^FoEX@ar@DX@?ƼCX@#|{ CX@B"BX@3BX@vAX@=$[@X@UQ_@X@F?X@xaҔ?X@S<>X@RޞR{>X@ j=X@=Zf=X@ X@ X@A_ X@fR}Y X@O) X@w4 X@˾Z X@t X@e|@X@˱icX@%} X@uYX@(:XX@X@VM)X@ӭlYX@~XX@h=qX@DE͓X@;Q@X@d *hX@_ZX@F|aGX@Y!@X@*W@W@OqW@7ܹW@W@a;sjW@$W@>bOuW@W@AaBW@d>@qW@%W@WIIW@PW@-|&W@щW@8W@#W@=sW@ W@nW@$ajW@ǪRW@sdKW@ fW@i"W@U0LW@V@W@!#W@t:W@W@a[7W@cW@:aW@xZD5W@^reW@h[HW@]! 6W@_A7gW@nW@kOJ2W@' W@ryQW@8W@\ӲW@XW@c W@AZ]tW@ӺOW@CW@pW@W@)PW@￝]W@)W@c/W@ZsW@^8OW@?W@ KwW@,P W@='}UW@yW@"$W@* uX@%uX@k&_uX@">uX@x !uX@tX@";ʼtX@$tX@0YtX@>tX@߄B$tX@j{sX@I(}sX@ A!a??T sall2_G N K;@"h;@%=@CwA+ =@Rk?@Be6V?@} @@f#r@@X{A@}e}A@qO_)B@V _*B@SB@wNB@HA`C@įbC@C@qOC@sD@$F;uD@|7HND@ڷߣD@|mE@˗¾oE@l <^E@4D6E@Y.SF@_UF@y{BF@ޅ9F@L(G@v1*G@,G@YG@?=tIG@Sm\;G@!OH@QH@ GūH@.JH@1dYI@)I@ ge]I@Sf`I@(VNqI@7˟NI@Z)J@d J@##XJ@|[J@UVGLJ@3惫J@;$JJ@7AJ@JCK@0 gFK@w:K@LK@\G-K@p52K@}Mn6L@C?K>:L@F4L@ClvňL@DBRM@yUd!M@m^M@0%M@0;kM@1`cN@,#`:pN@:UuN@XN@[jvMN@WYfPO@لVO@MYO@qPO@\P@LP@Fl!'NP@b!3*QP@ <P@P@n2P@0OžP@ʾ+P@9CP@w.M(Q@_+Q@\'HZ^Q@cJVaQ@r38Q@PݔQ@Ln,Q@rQ@s~ Q@e)R@d4R@ޙ7R@KiR@>Hh.lR@i`R@F+ R@SQR@jQ R@c S@ S@3(S@/ԤS@WƯ7S@!̸S@8 S@tNjfS@cS@:gS@ZQ0S@=S@ T@_T@ T@$DT@j'T@B )T@CyY9T@}g:T@^iSTJT@^`nKT@D:9[T@"\T@6+kT@SrV]ZmT@E|T@.}T@6^pT@UT@[ћT@pKRT@+;T@ŃҼT@oS^T@aXݻT@jDq=T@{8T@+|T@QT@D?C-T@02YT@BT@TLT@ʟU@gj U@HmU@ U@D*U@JyuU@13*U@O,"+U@,87U@[~l8U@eCU@pEU@2@PU@fI~QU@eQ\U@.S0]U@QMShU@QiU@ܛ!M#tU@J uU@Vq6_U@bU@;F(U@o$U@F^U@ hcU@§1hU@:U@N >U@c%(U@(gAU@(>U@:6ekU@ʻU@3aU@?AtU@5'U@Mg3U@W=U@`r0U@ЃXU@Y~U@O:HkU@??U@k1U@ڪ9U@fRV@p EV@:^V@'V@|V@ڋIV@2y!V@&N0"V@ٍu*V@+V@s'3V@nf4V@a?8;V@tU6W@N~7;W@\JeCnW@6 W@-rW@԰uW@_ W@I6W@HSW@OYW@_IW@DW@hѝW@ɞ؞W@!~NRW@x3vPW@?9ɦW@NçW@uz9G8W@+6W@L@W@MۚW@'IW@:W@#j1TW@ MW@UaW@v$MW@4JW@3 aW@W@doW@2GW@DAW@;W@M)W@^W@MX@,X@^X@A㑑X@I[X@O X@o; X@fvR X@QsX@MX@ aX@VX@E_X@X@h^̞X@mX@m:)X@l"X@>~(!X@q"X@K 8%X@HJ@m0&X@H(X@k)X@*EX@IW@X@,b~~AX@PACX@DX@0_6GX@HX@h|JX@}gZKX@wMX@_NX@O_*PX@.QX@_%TX@nTX@}IWX@s5XX@xZX@\V_[X@x]X@8N#^X@^`X@GaX@!?cX@n銳dX@O,fX@eGgX@W;iX@-;jX@fjПlX@q\mX@>oX@``pX@rX@חsX@uX@vX@;xX@ڷyX@kN{X@G|X@8#~X@!FX@b~X@&wX@+qX@2SX@iRX@.c)X@' ={!X@ X@SX@?c čX@V,X@=uX@-zX@2RX@&f9X@' X@?X@w̘X@/﬚X@"8X@X@S+X@$,AX@X@QEX@ԌEX@DY@/OY@:t*Y@^nY@E;.Y@k;TY@4Y@>Y@p Y@}i Y@# Y@ze Y@n Y@c[ Y@}Y@ Y@Y@ bY@~DY@xXEY@/9ŅY@QY@tZY@+eGY@0{"Y@%Y@+IY@W?AY@GM^Y@isY@X^Y@n<Y@] KY@m,CY@2 Y@}!Y@QC7"Y@6m~#Y@B%*$Y@Q)D%Y@xA?&Y@&Y@ ă'Y@Bx(Y@f)Y@'S*Y@~9kj+Y@: ,Y@-Y@XLì-Y@%۳.Y@Mb/Y@݉B0Y@I0Y@22Y@x(L2Y@ESB3Y@H/>4Y@"c 35Y@-aA5Y@X 6Y@ʉn7Y@c9^8Y@ 9Y@\"9Y@It:Y@\>K;Y@Q;.Y@mTeG?Y@; @Y@-\:@Y@x糰AY@NʋYBY@CY@<;CY@<,LDY@Y@tBCY@1#Y@ Y@ Y@ԄHᵄY@5g3Y@5(Y@-IY@鏆Y@2 Y@:(Y@n=ˇY@V@]Y@rY@EY@8h>Y@6Y@K-Y@/Y@$yY@ǗY@rAnY@-XˌY@Cs_Y@9Y@90CCY@%P1Y@w$Y@8b~Y@Y@zvTZY@NY@t)Y@iJY@aW4Y@χdY@~D~Y@SNY@dY@K&] Y@w4inY@͔Y@ :Y@wnY@Y@ɯzY@zdbY@5Y@NdAY@0VY@v>UY@whXY@S"Y@uY@Y@,MY@%Y@DY@噗.Y@|3VvY@Hz.Y@Ǚ˲,Y@eX uY@_lӣY@:Y@񮄤Y@a>ˤY@Y@ӏ yY@$3Y@N Y@ɌWY@IY@<0Y@nOY@zeY@I3qY@T_L/Y@艨Y@ϠܨY@iOY@KbrnY@+Y@#zY@sruVY@wY@+Y@v Y@YyY@ANӫY@tx(Y@b[Y@6{Y@Y3ŬY@2Y@_}y|Y@[Y@cY@JxB?Y@“Y@I֮Y@&ՈY@H(Ǯ^Y@)Y@E4p֯Y@Og(Y@"Y@iMY@MVqܰY@Ƽ3Y@aZY@(Y@ ϕY@, %Y@%mY@gBY@Y@wY@Q:GOY@6 Y@,#?,ųY@[{bY@>`Y@Y@ôY@02Y@1iZY@AOyY@VԵY@&2 Y@t2Y@vY@?oݶY@[ѶY@**Y@_Y@0g+tY@tg·Y@oGLY@:Y@1RY@#Y@KBؿY@L\Y@6Y@`YY@]WY@zpwιY@.)Y@< 5Y@^LkY@xY@DۺY@3bߺY@xJY@& hY@"Y@{Y@.JuY@dI$Y@; UY@&]Y@Щu,Y@DY@tRuY@*s.Y@iwY@\Y@q/!Y@)Y@q Y@Ry;BY@MUމY@Y@NؾY@^D߾Y@/=Y@>GY@<~oY@hY@uaտY@"ڿY@vY@9@0G/Y@! ~Y@.tY@ƠY@H/jY@4Y@qY@(Y@TY@=4Y@ểY@; Y@XJ Y@wY@Iz@Y@(lY@. Y@ Y@BpSY@.Y@캷Y@(,Y@Y@#+Y@&Y@[Y@Y@Ug$Y@9aY@sY@:fY@dU)Y@GY@\Y@]gY@~Y@@hY@o;Y@NY@ ?Y@RY@ό4Y@}fÐY@xBY@UY@QۆQY@VBY@_Y@ךRY@;|uY@(NjY@{RfY@_gY@pnY@5=QcY@)5-PY@6ǹM8Y@=Y@6z0Y@pY@>A4Y@(`*Y@544Y@  Y@GY@xnY@t#pY@kHcY@qmM_Y@|Y@*-Y@`NY@%Y@8%lY@VY@ݞcY@SxY@+i}[Y@O}{2ZY@ߝGY@$8Y@? $Y@-Y@?>Y@V6Y@(N>Y@Y@yY@u^PY@Y@eY@y-2KY@&pY@ZTUY@頦FY@Tb8Y@Z)Y@" Y@DY@ݶQY@5QY@u5=Y@rDY@ nY@6;Y@bA݀Y@1^nY@;>OY@P4`1Y@ Y@Yİ8Y@x~Y@Y@1kY@9Y@H9Y@ryY@-Y@ѓ2aY@i_FY@YY@ $Y@[Y@wsY@Y@RY@,l*Y@VpY@l'tY@?TY@/m8,MY@|R7!Y@tY@RpY@pY@o`Y@;ѿY@SCiY@;BpY@rFY@FCY@a&;Y@ :Y@!0Y@~=Y@\CwY@"Y@pY@Y@N'Y@q0Y@ EMY@C&tY@dY@&ƍY@ uY@Y@Z| Y@$nY@t$Y@~O3Y@{">f6Y@y>Y@nsYY@2aY@ciY@5=Y@!Y@ǛY@XY@(cױY@"Y@fuY@Y@hY@*2Y@Y@cY@~ Y@'܆ Y@~,RY@Y@'Y@ Y@b!Y@s%Y@d4Y@DMHY@wY@>Y@u+aY@?QY@UY@`Y@9 Y@RkY@rFY@ D=Y@"Y@"Y@d Y@d Y@1Y@1Y@B Y@B Y@EvY@ /fY@Qs Y@Qs Y@_&ŧY@rY@TY@HֿY@UTۿY@GY@9 jY@^(`Y@;W Y@j%Y@;AՐY@w3Y@Nj;7Y@ n̽Y@½Y@7VY@SY@FVȦY@:VY@UfY@{6aqY@GLY@V|PY@*pY@CY@lY@pY@ѯY@VɱY@)>"AY@W.Y@{%¹Y@ケY@IFY@TTY@>3͸Y@{Y@W)qY@'_\Y@yY@>(FY@(QAoY@paY@]iY@:cY@!S~Y@,~Y@ˈY@_Y@k<}Y@'c|Y@MG7 Y@Y@NWY@?=lxY@OT6 Y@F0Y@Y@ Y@kY@3eLfY@yf8TY@kq|Y@ Y@Y@7Y@NmY@n̡Y@y<_Y@c]Y@VMY@  Y@Y@uY@wY@g~Y@9Y@weY@DfӶfY@RVY@>B͐Y@4xdY@p4XY@f;ҬY@Ҫ-ǬY@|GY@Q|!IY@.ǫY@8Y@]:Y@$s5Y@VW=Y@.fY@;Y@,rY@hE-Y@* |Y@Y@dY@L~-tY@8GnmY@fY@~8Y@\Y@;Y@dDY@9#JY@XIY@xRY@FGY@]_Y@ٍY@\&rY@)Y@xmTY@C'6Y@~ Y@enqY@}Y@Zxf΅Y@]?Y@ӘY@9Y@&upY@%ːCmY@#>fV%mY@pqtlY@ѩElY@3pkY@PL^kY@jrjY@B*jY@W 6iY@![ئiY@rhY@hY@ hY@s%gY@uUN7gY@0 gY@{NfY@3`-fY@lweY@&|OeY@UdY@o [dY@mGcY@%DuJcY@ƖbY@\YbY@2|aY@[aY@? aY@C `Y@N.`Y@͓4_Y@]g6>_Y@j_Y@˭X^Y@%;H>^Y@:$}]Y@XL]Y@F ᨧ\Y@ʀXk\Y@ [Y@˪[Y@^1ZY@ZY@DBYY@(ҴYY@ YY@T;?XY@> XY@WY@~:WY@ 10WY@~3LVY@0b#9.VY@.%hUY@ 4UY@`i*ՏTY@+_DUTY@\gSY@Z:rvSY@ԐRY@IVRY@ds8gQY@QY@@8UPY@\PY@"OY@"$ OY@ OY@o7NY@8)1NY@dyMY@hM8@MY@bMY@^LY@LY@ljMrKY@@(4KY@ZO[JY@UQJY@hIY@BiIY@o׫HY@ !چHY@2WaGY@ͮZGY@R}FY@? 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