Quantitative analysis of a-Si_1-xC_x:H thin films

Gracin, Davor; Jakšić, Milko; Yang, C.; Borjanović, Vesna; Praček, Borut

doi:10.1016/S0169-4332(98)00795-8

Pregled bibliografske jedinice broj: 36606

Quantitative analysis of a-Si_1-xC_x:H thin films

Gracin, Davor; Jakšić, Milko; Yang, C.; Borjanović, Vesna; Praček, Borut

Quantitative analysis of a-Si_1-xC_x:H thin films // Applied surface science, 145 (1999), 188-191 doi:10.1016/S0169-4332(98)00795-8 (međunarodna recenzija, članak, znanstveni)

CROSBI ID: 36606 Za ispravke kontaktirajte CROSBI podršku putem web obrasca

Naslov
Quantitative analysis of a-Si_1-xC_x:H thin films

Autori
Gracin, Davor ; Jakšić, Milko ; Yang, C. ; Borjanović, Vesna ; Praček, Borut

Izvornik
Applied surface science (0169-4332) 145 (1999); 188-191

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
a-Si_1-xC_x:H thin films

Sažetak
The composition of a-Si_1-xC_x:H films, deposited by magnetron sputtering, was measured by AES (Auger Electron Spectrometry), RBS (Rutherford Backscattering Spectrometry) using both, protons and alpha particles, ERDA (Elastic Recoil Detection Analysis) and FTIR spectrometry. The results obtained by all three methods show agreement in C_c/C_Si ratio within the experimental error. However, the AES somewhat underestimates the silicon concentrations, which is discussed as a consequence of chemical bonding and matrix effects. The hydrogen concentrations obtained by ERDA are typically about 30% higher than those estimated by FTIR, possibly due to the presence of non-bonded hydrogen in the film.

Izvorni jezik
Engleski

Znanstvena područja
Fizika

POVEZANOST RADA

Projekti:
00980302
00980206

Ustanove:
Fakultet elektrotehnike i računarstva, Zagreb,
Institut "Ruđer Bošković", Zagreb

Profili:

Milko Jakšić (autor)