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Pregled bibliografske jedinice broj: 360633

Structural analysis of annealed amorphous SiO/SiO2 superlattice

Pivac, Branko; Dubček, Pavo; Capan, Ivana; Zorc, Hrvoje; Bernstorff, S.; Duguay, S.; Slaoui, A.;
Structural analysis of annealed amorphous SiO/SiO2 superlattice // Thin Solid Films, 516 (2008), 20; 6796-6799 doi:10.1016/j.tsf.2007.12.005 (međunarodna recenzija, članak, znanstveni)

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Naslov
Structural analysis of annealed amorphous SiO/SiO2 superlattice

Autori
Pivac, Branko ; Dubček, Pavo ; Capan, Ivana ; Zorc, Hrvoje ; Bernstorff, S. ; Duguay, S. ; Slaoui, A. ;

Izvornik
Thin Solid Films (0040-6090) 516 (2008), 20; 6796-6799

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
Si nanostructures; SiO/SiO2 amorphous superlattice; small angle X-ray scattering

Sažetak
We present a study on amorphous SiO/SiO2 superlattice prepared by high vacuum physical vapor deposition of 4 nm thin films of SiO and SiO2 (10 layers each) from corresponding targets on silicon substrate. After evaporation the samples were annealed at different temperatures in the 600 °C to 1100 °C range. The analysis of the 2D grazing-incidence small-angle X-ray scattering pattern has shown the existence of a clear Bragg peak due to the bilayer correlation in vertical direction. It is shown that annealing linearly reduces the thickness of the bilayer up to 1100 °C when the conversion to the SiO2 phase is completed. The particles formed at that temperature are not completely spherical and their vertical correlation is maintained only partly. We attribute this bahavior to a not optimal control of the silicon diffusion within the ex SiO layer.

Izvorni jezik
Engleski

Znanstvena područja
Fizika



POVEZANOST RADA

Projekti:
098-0000000-3191 - Optička svojstva nanostrukturnih slojeva (Zorc, Hrvoje, MZOS ) ( CroRIS)
098-0982886-2866 - Temeljna svojstva nanostruktura i defekata u poluvodičima i dielektricima (Pivac, Branko, MZOS ) ( CroRIS)

Ustanove:
Institut "Ruđer Bošković", Zagreb

Profili:

Avatar Url Branko Pivac (autor)

Avatar Url Ivana Capan (autor)

Avatar Url Pavo Dubček (autor)

Avatar Url Hrvoje Zorc (autor)

Poveznice na cjeloviti tekst rada:

doi www.sciencedirect.com

Citiraj ovu publikaciju:

Pivac, Branko; Dubček, Pavo; Capan, Ivana; Zorc, Hrvoje; Bernstorff, S.; Duguay, S.; Slaoui, A.;
Structural analysis of annealed amorphous SiO/SiO2 superlattice // Thin Solid Films, 516 (2008), 20; 6796-6799 doi:10.1016/j.tsf.2007.12.005 (međunarodna recenzija, članak, znanstveni)
Pivac, B., Dubček, P., Capan, I., Zorc, H., Bernstorff, S., Duguay, S., Slaoui, A. & (2008) Structural analysis of annealed amorphous SiO/SiO2 superlattice. Thin Solid Films, 516 (20), 6796-6799 doi:10.1016/j.tsf.2007.12.005.
@article{article, author = {Pivac, Branko and Dub\v{c}ek, Pavo and Capan, Ivana and Zorc, Hrvoje and Bernstorff, S. and Duguay, S. and Slaoui, A.}, year = {2008}, pages = {6796-6799}, DOI = {10.1016/j.tsf.2007.12.005}, keywords = {Si nanostructures, SiO/SiO2 amorphous superlattice, small angle X-ray scattering}, journal = {Thin Solid Films}, doi = {10.1016/j.tsf.2007.12.005}, volume = {516}, number = {20}, issn = {0040-6090}, title = {Structural analysis of annealed amorphous SiO/SiO2 superlattice}, keyword = {Si nanostructures, SiO/SiO2 amorphous superlattice, small angle X-ray scattering} }
@article{article, author = {Pivac, Branko and Dub\v{c}ek, Pavo and Capan, Ivana and Zorc, Hrvoje and Bernstorff, S. and Duguay, S. and Slaoui, A.}, year = {2008}, pages = {6796-6799}, DOI = {10.1016/j.tsf.2007.12.005}, keywords = {Si nanostructures, SiO/SiO2 amorphous superlattice, small angle X-ray scattering}, journal = {Thin Solid Films}, doi = {10.1016/j.tsf.2007.12.005}, volume = {516}, number = {20}, issn = {0040-6090}, title = {Structural analysis of annealed amorphous SiO/SiO2 superlattice}, keyword = {Si nanostructures, SiO/SiO2 amorphous superlattice, small angle X-ray scattering} }

Časopis indeksira:


  • Current Contents Connect (CCC)
  • Web of Science Core Collection (WoSCC)
    • Science Citation Index Expanded (SCI-EXP)
    • SCI-EXP, SSCI i/ili A&HCI
  • Scopus

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