Naslov
Influence of Scaling and Source/Drain Series Resistance on the Characteristics of Ultra-Thin Body FinFETs

Autori
Šakić, Agata ; Poljak, Mirko ; Jovanović, Vladimir ; Suligoj, Tomislav

Vrsta, podvrsta i kategorija rada
Radovi u zbornicima skupova, cjeloviti rad (in extenso), znanstveni

Izvornik
Proceedings of the 31st International Convention MIPRO / Biljanović, P. ; Skala, K. - Zagreb : Denona, 2008, 84-89

ISBN
978-953-233-036-6

Skup
31st International Convention MIPRO

Mjesto i datum
Opatija, Hrvatska, 26.05.2008. - 30.05.2008

Vrsta sudjelovanja
Predavanje

Vrsta recenzije
Međunarodna recenzija

Ključne riječi
body-tied; ultra-thin body; FinFET; short-channel effects; scaling; series resistance

Sažetak
We have shown that the Tfin/Leff ratio in ultra-thin body (UTB) FinFETs can be as high as 0.375 (for devices with Tfin = 30 nm) and 0.5 (for devices with Tfin = 10 nm) for excellent short-channel effects (SCEs) control. Results presented in this paper indicate that the devices with larger fin widths are more immune to S/D series resistance influence on device performance, and this fact is in direct opposition to the demand of ultra-thin fins for improved gate-control of the channel. S/D extension length, constrained by the fabrication process capabilities, presents a real limiter in FinFET device scaling.

Izvorni jezik
Engleski

Znanstvena područja
Elektrotehnika

POVEZANOST RADA