Pregled bibliografske jedinice broj: 315329
On the evaluation of optical parameters of a thin semiconductor film from transmission spectra, and application to GaN films
On the evaluation of optical parameters of a thin semiconductor film from transmission spectra, and application to GaN films // Measurement science & technology, 19 (2008), 10; 105303, 7 doi:10.1088/0957-0233/19/10/105303 (međunarodna recenzija, članak, znanstveni)
CROSBI ID: 315329 Za ispravke kontaktirajte CROSBI podršku putem web obrasca
Naslov
On the evaluation of optical parameters of a thin semiconductor film from transmission spectra, and application to GaN films
Autori
Šantić, Branko ; Scholz, Ferdinand
Izvornik
Measurement science & technology (0957-0233) 19
(2008), 10;
105303, 7
Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni
Ključne riječi
thin films ; semiconductors ; optical transmission
Sažetak
The analysis of the optical transmission spectra of semiconductor thin films on a transparent substrate is revisited. The equation for the optical transmission is re-derived and applied for the evaluation of optical parameters. A method based on the pace of the interference pattern is analyzed in detail. It can be used for the determination of the film-thickness, refractive index and absorption coefficient. Small values of the absorption coefficient can be determined as a fitting parameter at all wavelengths, regardless of strong interference. The method is compared to the frequently encountered envelope-method of Manifacier et al. and Swanepoel. The suitability of the method is illustrated on two GaN thin films grown on sapphire. Below the band-gap, the index of refraction of GaN can be described by the equation n(lamda[nm])=2.19+2.57(lamda-345)^( 1/2).
Izvorni jezik
Engleski
Znanstvena područja
Fizika
POVEZANOST RADA
Projekti:
098-0982886-2894 - Tanki filmovi legura silicija na prijelazu iz amorfne u uređenu strukturu (Gracin, Davor, MZOS ) ( CroRIS)
098-0982886-2897 - Poluvodički materijali za optoelektroniku i nanotehnologiju (Šantić, Branko, MZOS ) ( CroRIS)
Ustanove:
Institut "Ruđer Bošković", Zagreb
Profili:
Branko Šantić
(autor)
Citiraj ovu publikaciju:
Časopis indeksira:
- Current Contents Connect (CCC)
- Web of Science Core Collection (WoSCC)
- Science Citation Index Expanded (SCI-EXP)
- SCI-EXP, SSCI i/ili A&HCI
- Scopus
