Naslov
Determination of the optical parameters of semiconductor thin films from optical transmission

Autori
Šantić Branko

Vrsta, podvrsta i kategorija rada
Sažeci sa skupova, sažetak, znanstveni

Izvornik
Zbornik povzetkov / Janez Šetina, Janez Kovač - , 2007, 22-22

Skup
14. Mednarodni Znanstveni Sestanek s Področja Vakuumske Znanosti In Tehnike

Mjesto i datum
Bled, Slovenija, 01.06.2007

Vrsta sudjelovanja
Poster

Vrsta recenzije
Nije recenziran

Ključne riječi
tanki filmovi; optička transmisija; indeks loma; poluvodiči
(thin films; optical transmission; refractive index; semiconductors)

Sažetak
The optical transmission spectra are frequently used for the characterization of thin semiconductor films for the determination of the film's thickness, the refractive index, the absorption coefficient and the energy band gap (Eg) of a semiconductor. For that purpose the methods of Manifacier, et all, and particularly of Swanepoel are frequently used in the literature. Here, we reexamine these methods. A probable inaccuracy in Swanepoel 's formula for the transmission is analyzed and pertinent corrections are introduced. Further, both methods use the interference maxima and minima for the evaluation of the refractive index n(lamda). As an alternative, we examine the determination of n(lamda) from the pace of the interference patterns. Further, we propose the use of the substrate’ s transmittance as the base line signal (Io). This is useful for the samples grown on substrates with the unpolished backside as well as for the spectral range in which the absorption of the substrate is not negligible.

Izvorni jezik
Engleski

Znanstvena područja
Fizika

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