Pregled bibliografske jedinice broj: 308281
GISAXS study of Si nanoclusters in SiO/SiO2 layers
GISAXS study of Si nanoclusters in SiO/SiO2 layers // Vacuum, 82 (2008), 2; 189-192 doi:10.1016/j.vacuum.2007.07.024 (međunarodna recenzija, članak, znanstveni)
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Naslov
GISAXS study of Si nanoclusters in SiO/SiO2 layers
Autori
Pivac, Branko ; Dubček, Pavo ; Capan, Ivana ; Radić, Nikola ; Bernstorff, Sigrid
Izvornik
Vacuum (0042-207X) 82
(2008), 2;
189-192
Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni
Ključne riječi
Silicon nanostructures ; SiO/SiO2 superlattice ; Solar cells ; Grazing-incidence small-angle X-ray scattering
Sažetak
We present a study on amorphous SiO/SiO2 superlattice using grazing-incidence small-angle X-ray scattering (GISAXS). Such nanostructured material might be of great interest for photovoltaic conversion and optoelectronics. Amorphous SiO/SiO2 superlattices were prepared by magnetron sputtering of thin SiO and SiO2 films (20 layers each) on Si (1 0 0) substrate. Rotation of the Si substrate during evaporation ensures homogeneity of the films over the whole substrate. After the evaporation, the samples were annealed at 1100 1C for 1 h in vacuum. The analysis of the 2-D GISAXS pattern has shown that Si nanocrystals are formed in the remaining SiO2 films in the annealed samples. From the 2-D GISAXS pattern, their shape, size and inter-particle distance are determined.
Izvorni jezik
Engleski
Znanstvena područja
Fizika
POVEZANOST RADA
Projekti:
098-0982886-2866 - Temeljna svojstva nanostruktura i defekata u poluvodičima i dielektricima (Pivac, Branko, MZOS ) ( CroRIS)
098-0982886-2895 - Novi amorfni i nanostrukturirani tankoslojni materijali (Radić, Nikola, MZOS ) ( CroRIS)
Ustanove:
Institut "Ruđer Bošković", Zagreb
Citiraj ovu publikaciju:
Časopis indeksira:
- Current Contents Connect (CCC)
- Web of Science Core Collection (WoSCC)
- Science Citation Index Expanded (SCI-EXP)
- SCI-EXP, SSCI i/ili A&HCI
- Scopus