Pregled bibliografske jedinice broj: 303598
Microstructural properties of amorphous silicon alloys deposited by dc magnetron source
Microstructural properties of amorphous silicon alloys deposited by dc magnetron source // Vacuum, 46 (1995), 8-10; 943-946 doi:10.1016/0042-207X(95)00078-X (međunarodna recenzija, članak, znanstveni)
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Naslov
Microstructural properties of amorphous silicon alloys deposited by dc magnetron source
Autori
Gracin, Davor ; Radić, Nikola ; Desnica, Uroš
Izvornik
Vacuum (0042-207X) 46
(1995), 8-10;
943-946
Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni
Ključne riječi
amorphous silicon ; amorphous silicon carbide ; IR spectroscopy ; NIR spectroscopy
Sažetak
The a-Si:H, a-Si1-xCx:H and a-Si1-yNy:H alloys were deposited by dc magnetron sputtering and their microstructural properties were estimated as a function of hydrogen (5-30 at%), carbon (x=0-0.4) and nitrogen (y=0-0.3)content. The sample density and void volume distribution in deposited alloys were estimated by IR and NIR spectroscopy. It has been found that the total void volume contribution increases, the void size distribution broadens and its mean value increases as the concentration of eah alloying element increases.
Izvorni jezik
Engleski
Znanstvena područja
Fizika
Napomena
Conference: 4th European Vacuum Conference (EVC-4)1st Swedish Vacuum Meeting (SVM-1) Location: UPPSALA, SWEDEN Date: JUN 13-17, 1994
POVEZANOST RADA
Ustanove:
Institut "Ruđer Bošković", Zagreb
Citiraj ovu publikaciju:
Časopis indeksira:
- Current Contents Connect (CCC)
- Web of Science Core Collection (WoSCC)
- Science Citation Index Expanded (SCI-EXP)
- SCI-EXP, SSCI i/ili A&HCI
- Scopus
