Naslov
Structural analysis of annealed amorphous SiO/SiO2 superlattice

Autori
Pivac, Branko ; Dubček, Pavo ; Capan, Ivana ; Zorc, Hrvoje ; Bernstorff, Sigrid ; Duguay, S. ; Slaoui, A. ;

Vrsta, podvrsta i kategorija rada
Sažeci sa skupova, sažetak, ostalo

Izvornik
Book of abstracts: Symposium D: Advanced materials and concepts for photovoltaics / Kroon, J.M. ; Dennler, G. ; Jaeger-Waldau, A. ; Slaoui, A. - Strasbourg : European Materials Research Society, 2007, 26-26

Skup
Symposium of the European Materials Research Society (E-MRS) spring meeting

Mjesto i datum
Strasbourg, Francuska, 28.05.2007. - 01.06.2007

Vrsta sudjelovanja
Poster

Vrsta recenzije
Međunarodna recenzija

Ključne riječi
Si nanostructures ; SiO/SiO2 amorphous superlattice ; small angle X-ray scattering ;

Sažetak
We present a study on amorphous SiO/SiO2 superlattice prepared by high vacuum physical vapor deposition of 4nm thin films of SiO and SiO2 (10 layers each) from corresponding targets on silicon substrate. After evaporation the samples were annealed at different temperatures in the 600º ; C to 1100º ; C range. The analysis of the 2D grazing-incidence small-angle X-ray scattering pattern has shown the existence of a clear Bragg peak due to the bilayer correlation in vertical direction. It is shown that annealing linearly reduces the thickness of the bilayer up to 1100°C when the conversion to the SiO2 phase is completed. The formed particles are not completely spherical and their vertical correlation is maintained only partly.

Izvorni jezik
Engleski

Znanstvena područja
Fizika

POVEZANOST RADA