Naslov
Silicon nanoparticles formation in annealed SiO/SiO2 multilayers

Autori
Kovačević, Ivana ; Dubček, Pavo ; Duguay, S. ; Zorc, Hrvoje ; Radić, Nikola ; Pivac, Branko ; Slaoui, A. ; Bernstorff, S. ;

Izvornik
Physica E: Low-dimensional Systems and Nanostructures (1386-9477) 38 (2007), 1-2; 50-53

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
Si nanostructures; SiO/SiO2 amorphous superlattice; Small-angle X-ray scattering

Sažetak
We present a study on amorphous SiO/SiO2 superlattice performed by grazing-incidence small-angle X-ray scattering (GISAXS). Amorphous SiO/SiO2 superlattices were prepared by high-vacuum evaporation of 3 nm thin films of SiO and SiO2 (10 layers each) onto Si(1 0 0) substrate. After the deposition, samples were annealed at 1100 1C for 1 h in vacuum, yielding to Si nanocrystals formation. Using a Guinier approximation, the shape and the size of the crystals were obtained. The size of the growing nanoparticles in the direction perpendicular to the film surface is well controlled by the bilayer thickness. However, their size varies more significantly in the direction parallel to the film surface.

Izvorni jezik
Engleski

Znanstvena područja
Fizika

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