Pregled bibliografske jedinice broj: 296935
Characterization of a broad ion beam source by non-conventional methods
Characterization of a broad ion beam source by non-conventional methods // The International Conference On Metallurgical Coatings And Thin Films
San Diego (CA), Sjedinjene Američke Države, 2003. (predavanje, nije recenziran, neobjavljeni rad, znanstveni)
CROSBI ID: 296935 Za ispravke kontaktirajte CROSBI podršku putem web obrasca
Naslov
Characterization of a broad ion beam source by non-conventional methods
Autori
Kersten, H., Wiese, R., Bojić, D., Thieme, G., Kopitov, A., Scholze, F., Neumann, H.
Vrsta, podvrsta i kategorija rada
Sažeci sa skupova, neobjavljeni rad, znanstveni
Skup
The International Conference On Metallurgical Coatings And Thin Films
Mjesto i datum
San Diego (CA), Sjedinjene Američke Države, 04.2003
Vrsta sudjelovanja
Predavanje
Vrsta recenzije
Nije recenziran
Ključne riječi
plasma diagnostics; ion beam characterization; non-conventional methods
Sažetak
For optimization and adjustment of ion beam sources in surface application, knowledge of physical beam parameters and plasma processes in the ion source has to be provided by suitable diagnostics. For this purpose, novel diagnostic methods which complete the common diagnostics are suggested. The so-called "non-conventional" methods are: visualization of the ion beam by interaction with a cloud of micro-disperse particles and characterization of the sheath region in the plasma source by sheath photometry.
Izvorni jezik
Engleski
Znanstvena područja
Fizika
