Pregled bibliografske jedinice broj: 296931
On the coating of powder particles in a magnetron discharge
On the coating of powder particles in a magnetron discharge // DPG-Tagung "Plasmaphysik" 2003
Aachen, Njemačka, 2003. (poster, nije recenziran, neobjavljeni rad, znanstveni)
CROSBI ID: 296931 Za ispravke kontaktirajte CROSBI podršku putem web obrasca
Naslov
On the coating of powder particles in a magnetron discharge
Autori
G. Thieme, M. Fröhlich, D. Bojić, A. Kopytov, H. Kersten, R. Hippler
Vrsta, podvrsta i kategorija rada
Sažeci sa skupova, neobjavljeni rad, znanstveni
Skup
DPG-Tagung "Plasmaphysik" 2003
Mjesto i datum
Aachen, Njemačka, 03.2003
Vrsta sudjelovanja
Poster
Vrsta recenzije
Nije recenziran
Ključne riječi
metallic films; magnetron; silicon oxide particles
Sažetak
Thin metallic films (Al, Ti, Cu) were deposited by means of DC-magnetron-sputtering on silicon oxide particles suspended in an Argon-RF-discharge (5Pa, 5W). The coated particles were examined by electron microscopy (SEM). During these experiments, an interesting observation was made: when the magnetron was turned on the entire particle cloud began to rotate. After the magnetron was turned off the rotation ceased fast due to neutral drag. This particle motion was studied in dependence on various parameters like pressure and magnetron power. The rotation is believed to be caused by collision of ions with the particles.
Izvorni jezik
Engleski
Znanstvena područja
Fizika
