Naslov
TUNGSTEN MULTILAYERS

Autori
Radić, Nikola ; Dubček, Pavo ; Bernstorff, Sigrid ; Salamon, Krešimir

Izvornik
IBR Elettra Annual Report 2004 Austro SAXS

Vrsta, podvrsta
Ostale vrste radova, izvještaj

Godina
2005

Ključne riječi
Tungsten; multilayers; X-ray reflectivity

Sažetak
Superior properties of tungsten makes it suitable for gate contacts and interconnects in ULSI/ VLSI devices, diffusion barriers in Al-W based technology, absorption layer for masks in x-ray lithography, and alternating layers in X-ray mirrors.

Izvorni jezik
Engleski

Znanstvena područja
Fizika

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