Pregled bibliografske jedinice broj: 245426
Microfabrication at the Elettra Synchrotron Radiation Facility
Microfabrication at the Elettra Synchrotron Radiation Facility // AMST '96 - Advanced Manufacturing Systems and Technology / Kuljanić, Elso (ur.).
Beč : New York (NY): Springer, 1996. str. 487-494 (predavanje, međunarodna recenzija, cjeloviti rad (in extenso), znanstveni)
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Naslov
Microfabrication at the Elettra Synchrotron Radiation Facility
Autori
De Bona, Francesco ; Matteucci, Maurizio ; Mohr, Juergen ; Pantenburg, Franz Josef ; Zelenika, Saša
Vrsta, podvrsta i kategorija rada
Radovi u zbornicima skupova, cjeloviti rad (in extenso), znanstveni
Izvornik
AMST '96 - Advanced Manufacturing Systems and Technology
/ Kuljanić, Elso - Beč : New York (NY) : Springer, 1996, 487-494
Skup
AMST '96 - Advanced Manufacturing Systems and Technology
Mjesto i datum
Udine, Italija, 1996
Vrsta sudjelovanja
Predavanje
Vrsta recenzije
Međunarodna recenzija
Ključne riječi
MEMs; microfabrication; LIGA; deep X-litography
Sažetak
The first micro-structures produced at Elettra (Trieste, Italy) with deep x-ray litography are presented in this work. The most important details concerning LIGA technique and in particular deep x-ray litography using synchrotron radiation are described. The scanning electron microscopy images of test micro-structures made of polymethylmethacrylate characterized by a height of 200 micrometers and lateral dimensions in between 10 and 200 micrometers are presented. In all the considered cases good accuracy with high aspect ratios and nanometric roughness is observed.
Izvorni jezik
Engleski
Znanstvena područja
Fizika, Strojarstvo
