Naslov
Study of Ge islands on Si (100) substrates

Autori
Pivac, Branko ; Kovačević, Ivana ; Dubček, Pavo ; Radić, Nikola ; Bernstorff, Sigrid ; Vlahović, Branislav ; Zulim, Ivan

Vrsta, podvrsta i kategorija rada
Radovi u zbornicima skupova, cjeloviti rad (in extenso), znanstveni

Izvornik
Proceedings of 20th European Photovoltaic Solar Energy Conference / Palz, W. ; Ossenbrink, H. ; Helm, P. - München : WIP-Munich, 2005, 421-423

Skup
20th European Photovoltaic Solar Energy Conference

Mjesto i datum
München, Njemačka, 06.06.2005. - 10.06.2005

Vrsta sudjelovanja
Poster

Vrsta recenzije
Međunarodna recenzija

Ključne riječi
Ge nanostructures; grazing incidence small-angle X-ray scattering; atomic force microscopy

Sažetak
We present a preliminary study of Ge islands formation on Si(100) substrates using grazing-incidence small-angle X-ray scattering (GISAXS). Samples were prepared by a high-vacuum evaporation of a 5nm thick Ge layer on Si(100) substrate held at 200  C. The samples were subsequently annealed at different temperatures for 1h in vacuum, yielding to island formation. A Fortran program IsGISAXS was used for the simulation and analysis of Ge islands. Vertical cut (perpendicular to the surface) of the experimental 2D GISAXS pattern has been fitted using a Guinier approximation. Obtained parameters were used for the simulations. The simulated 2D GISAXS pattern well reproduce experimental data for cylindrically shaped islands with morphological parameters R=4 nm, H/R= 0.25 and the average inter-island distance D=5 nm

Izvorni jezik
Engleski

Znanstvena područja
Fizika

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